Multi-incidence digital holographic profilometry with high axial resolution and enlarged measurement range

Spherical wave illumination scanning digital holographic profilometry

In this work, we proposed what we believe to be a novel scanning solution for the assessment of high-NA samples, referred to as spherical-wave illumination scanning digital holographic profilometry (SWS-DHP). This approach introduces a 2F optimization methodology, based on the measurement of the focal length of the object to determine the spherical component of the scanning. Furthermore, re-optimization of 2F, whether it needs to be operated depends on the measured object's NA to inspect more information. Meanwhile, utilizing phase space analysis shows SWS superiority in information transfer for high-NA samples compared to plane-wave illumination scanning. In addition, this method introduces a shape reconstruction algorithm with volumetric aberration compensation based on the propagation of the aberrated object and illumination waves to obtain high-quality measurements. Finally, the imaging merits of SWS-DHP were proved through simulations and were experimentally verified for the object of NA up to 0.87.

Structured illumination phase and fluorescence microscopy for bioimaging

This study presents a dual-modality microscopic imaging approach that combines quantitative phase microscopy and fluorescence microscopy based on structured illumination (SI) to provide structural and functional information for the same sample. As the first imaging modality, structured illumination digital holographic microscopy (SI-DHM) is implemented along the transmission beam path. SI-DHM acts as a label-free, noninvasive approach and provides high-contrast and quantitative phase images utilizing the refractive index contrast of the inner structures of samples against the background. As the second imaging modality, structured illumination (fluorescence) microscopy (SIM) is constructed along the reflection beam path. SIM utilizes fluorescent labeling and provides super-resolution images for specific functional structures of samples. We first experimentally demonstrated phase imaging of SI-DHM on rice leaves and fluorescence (SIM) imaging on mouse kidney sections. Then, we demonstrated dual-modality imaging of biological samples, using DHM to acquire the overall cell morphology and SIM to obtain specific functional structures. These results prove that the proposed technique is of great importance in biomedical studies, such as providing insight into cell physiology by visualizing and quantifying subcellular structures.

Multi-Incidence Holographic Profilometry for Large Gradient Surfaces with Sub-Micron Focusing Accuracy

Surface reconstruction for micro-samples with large discontinuities using digital holography is a challenge. To overcome this problem, multi-incidence digital holographic profilometry (MIDHP) has been proposed. MIDHP relies on the numerical generation of the longitudinal scanning function (LSF) for reconstructing the topography of the sample with large depth and high axial resolution. Nevertheless, the method is unable to reconstruct surfaces with large gradients due to the need of: (i) high precision focusing that manual adjustment cannot fulfill and (ii) preserving the functionality of the LSF that requires capturing and processing many digital holograms. In this work, we propose a novel MIDHP method to solve these limitations. First, an autofocusing algorithm based on the comparison of shapes obtained by the LSF and the thin tilted element approximation is proposed. It is proven that this autofocusing algorithm is capable to deliver in-focus plane localization with submicron resolution. Second, we propose that wavefield summation for the generation of the LSF is carried out in Fourier space. It is shown that this scheme enables a significant reduction of arithmetic operations and can minimize the number of Fourier transforms needed. Hence, a fast generation of the LSF is possible without compromising its accuracy. The functionality of MIDHP for measuring surfaces with large gradients is supported by numerical and experimental results.

Single-shot digital multiplexed holography for the measurement of deep shapes

This work develops a single-shot holographic profilometer that enables shape characterization of discontinuous deep surfaces. This is achieved by combining hologram frequency multiplexing and an illumination technique of complex amplitude in multi-incidence angle profilometer. Object illumination is carried out from seven directions simultaneously, where the radial angular coordinates of illumination plane waves obey the geometric series. It is shown that: (i) the illumination pattern provides the required frequency separation of all object wavefronts in transverse frequency space, which is necessary for hologram demultiplexing, and (ii) numerical generation of longitudinal scanning function (LSF) is possible, which has large measurement range, high axial resolution, and small side lobes. Low side lobes of LSF and the developed multiplexed field dependent aberration compensation method are essential to minimize the negative influence of speckle noise of single-shot capture on the measurement result. The utility of the proposed method is demonstrated with experimental measurement of heights of two step-like objects.