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Lukashchuk A, Yildirim HK, Bancora A, Lihachev G, Liu Y, Qiu Z, Ji X, Voloshin A, Bhave SA, Charbon E, Kippenberg TJ. Photonic-electronic integrated circuit-based coherent LiDAR engine. Nat Commun 2024; 15:3134. [PMID: 38605067 PMCID: PMC11009237 DOI: 10.1038/s41467-024-47478-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/22/2023] [Accepted: 04/02/2024] [Indexed: 04/13/2024] Open
Abstract
Chip-scale integration is a key enabler for the deployment of photonic technologies. Coherent laser ranging or FMCW LiDAR, a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range, and immunity to interference. However, wafer-scale integration of these systems has been challenged by stringent requirements on laser coherence, frequency agility, and the necessity for optical amplifiers. Here, we demonstrate a photonic-electronic LiDAR source composed of a micro-electronic-based high-voltage arbitrary waveform generator, a hybrid photonic circuit-based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide amplifier. Importantly, all systems are realized in a wafer-scale manufacturing-compatible process comprising III-V semiconductors, silicon nitride photonic integrated circuits, and 130-nm SiGe bipolar complementary metal-oxide-semiconductor (CMOS) technology. We conducted ranging experiments at a 10-meter distance with a precision level of 10 cm and a 50 kHz acquisition rate. The laser source is turnkey and linearization-free, and it can be seamlessly integrated with existing focal plane and optical phased array LiDAR approaches.
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Affiliation(s)
- Anton Lukashchuk
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Halil Kerim Yildirim
- Advanced Quantum Architecture Laboratory (AQUA), Swiss Federal Institute of Technology Lausanne (EPFL), CH-2002, Neuchâtel, Switzerland
| | - Andrea Bancora
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Grigory Lihachev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Yang Liu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Zheru Qiu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Xinru Ji
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Andrey Voloshin
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Sunil A Bhave
- OxideMEMS Lab, Purdue University, 47907, West Lafayette, IN, USA
| | - Edoardo Charbon
- Advanced Quantum Architecture Laboratory (AQUA), Swiss Federal Institute of Technology Lausanne (EPFL), CH-2002, Neuchâtel, Switzerland.
| | - Tobias J Kippenberg
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland.
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Sun C, Chen Z, Ye S, Lin J, Shi W, Li B, Teng F, Li X, Zhang A. Highly-time-resolved FMCW LiDAR with synchronously-nonlinearity-corrected acquisition for dynamic locomotion. OPTICS EXPRESS 2023; 31:7774-7788. [PMID: 36859902 DOI: 10.1364/oe.480346] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/14/2022] [Accepted: 02/09/2023] [Indexed: 06/18/2023]
Abstract
Highly-time-resolved and precise tracking of position, velocity, and acceleration is urgently required when highly dynamic legged robots are walking, trotting, and jumping. Frequency-modulated continuous-wave (FMCW) laser ranging is able to provide precise measurement in short distance. However, FMCW light detection and ranging (LiDAR) suffers from a low acquisition rate and poor linearity of laser frequency modulation in wide bandwidth. A sub-millisecond-scale acquisition rate and nonlinearity correction in the wide frequency modulation bandwidth have not been reported in previous studies. This study presents the synchronous nonlinearity correction for a highly-time-resolved FMCW LiDAR. The acquisition rate of 20 kHz is obtained by synchronizing the measurement signal and the modulation signal of laser injection current with a symmetrical triangular waveform. The linearization of laser frequency modulation is conducted by resampling of 1000 intervals interpolated in every up-sweep and down-sweep of 25 µs, while measurement signal is stretched or compressed in every period of 50 µs. The acquisition rate is demonstrated to be equal to the repetition frequency of laser injection current for the first time to the best of authors' knowledge. This LiDAR is successfully used to track the foot trajectory of a jumping single-leg robot. The high velocity up to 7.15 m/s and high acceleration of 365 m/s2 are measured during the up-jumping phase, while heavy shock takes place with high acceleration of 302 m/s2 as the foot end strikes the ground. The measured foot acceleration of over 300 m/s2, which is more than 30 times gravity acceleration, is reported on a jumping single-leg robot for the first time.
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Elshorbagy MH, Esteban Ó, Cuadrado A, Alda J. Optoelectronic refractometric sensing device for gases based on dielectric bow-ties and amorphous silicon solar cells. Sci Rep 2022; 12:18355. [PMID: 36319645 PMCID: PMC9626455 DOI: 10.1038/s41598-022-21299-w] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/27/2022] [Accepted: 09/26/2022] [Indexed: 01/24/2023] Open
Abstract
The transformation of an hydrogenated amorphous silicon solar cell (aSiH) into an optoelectronic refratometric sensor has been possible through the addition of dielectric bow-tie resonant structures. The indium transparent oxide top electrode is replaced by a thin metallic layer to selectively prevent the direct transmission of light to the active layer of the cell. Then, an array of dielectric bow-tie structures is placed on top of this electrode, to activate the optical absorption through surface plasmon resonance (SPR). The whole device is exposed to the analyte under measure, which is the surrounding medium. Three different dielectric materials with low, medium, and high refractive index were selected for the bow-ties, namely magnesium fluoride (MgF[Formula: see text]), silicon dioxide (SiO[Formula: see text]), and aluminum nitride (AlN) have been tested as coupling structure for SPR excitation. The maximization of the readout/short circuit current has been achieved through the geometrical parameters of such structure. We have selected the geometrical parameters to maximize the short circuit current delivered by the a-Si cell at a given selected wavelength. The design has been customized to gas measurements application, where the index of refraction is slightly above 1 around 10[Formula: see text]. Our analysis reveals ultra-high sensitivity of [Formula: see text] (mA/W)/RIU, and a figure of merit FOM= 107 RIU[Formula: see text], when the bow-tie is made of SiO[Formula: see text]. A performance rally competitive with those previously reported in literature, with the additional advantage of circunventing both moving parts and spectral interrogation elements.
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Affiliation(s)
- Mahmoud H. Elshorbagy
- grid.411806.a0000 0000 8999 4945Physics Department, Faculty of Science, Minia University, 61519 El-Minya, Egypt ,grid.4795.f0000 0001 2157 7667Faculty of Optics and Optometry, Applied Optics Complutense Group, University Complutense of Madrid, C/Arcos de Jalón, 118, 28037 Madrid, Spain
| | - Óscar Esteban
- grid.7159.a0000 0004 1937 0239Photonics Engineering Group, University of Alcalá, 28801 Alcalá de Henares, Madrid Spain
| | - Alexander Cuadrado
- grid.28479.300000 0001 2206 5938Escuela de Ciencias Experimentales y Tecnología, University Rey Juan Carlos, 28933 Móstoles, Madrid, Spain
| | - Javier Alda
- grid.4795.f0000 0001 2157 7667Faculty of Optics and Optometry, Applied Optics Complutense Group, University Complutense of Madrid, C/Arcos de Jalón, 118, 28037 Madrid, Spain
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Tran MA, Zhang C, Morin TJ, Chang L, Barik S, Yuan Z, Lee W, Kim G, Malik A, Zhang Z, Guo J, Wang H, Shen B, Wu L, Vahala K, Bowers JE, Park H, Komljenovic T. Extending the spectrum of fully integrated photonics to submicrometre wavelengths. Nature 2022; 610:54-60. [PMID: 36171286 PMCID: PMC9534754 DOI: 10.1038/s41586-022-05119-9] [Citation(s) in RCA: 23] [Impact Index Per Article: 11.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/06/2021] [Accepted: 07/18/2022] [Indexed: 11/24/2022]
Abstract
Integrated photonics has profoundly affected a wide range of technologies underpinning modern society1-4. The ability to fabricate a complete optical system on a chip offers unrivalled scalability, weight, cost and power efficiency5,6. Over the last decade, the progression from pure III-V materials platforms to silicon photonics has significantly broadened the scope of integrated photonics, by combining integrated lasers with the high-volume, advanced fabrication capabilities of the commercial electronics industry7,8. Yet, despite remarkable manufacturing advantages, reliance on silicon-based waveguides currently limits the spectral window available to photonic integrated circuits (PICs). Here, we present a new generation of integrated photonics by directly uniting III-V materials with silicon nitride waveguides on Si wafers. Using this technology, we present a fully integrated PIC at photon energies greater than the bandgap of silicon, demonstrating essential photonic building blocks, including lasers, amplifiers, photodetectors, modulators and passives, all operating at submicrometre wavelengths. Using this platform, we achieve unprecedented coherence and tunability in an integrated laser at short wavelength. Furthermore, by making use of this higher photon energy, we demonstrate superb high-temperature performance and kHz-level fundamental linewidths at elevated temperatures. Given the many potential applications at short wavelengths, the success of this integration strategy unlocks a broad range of new integrated photonics applications.
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Affiliation(s)
| | | | - Theodore J Morin
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, USA
| | - Lin Chang
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, USA.
| | | | - Zhiquan Yuan
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | | | | | | | | | - Joel Guo
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, USA
| | - Heming Wang
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Boqiang Shen
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Lue Wu
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Kerry Vahala
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - John E Bowers
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA, USA
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Lihachev G, Riemensberger J, Weng W, Liu J, Tian H, Siddharth A, Snigirev V, Shadymov V, Voloshin A, Wang RN, He J, Bhave SA, Kippenberg TJ. Low-noise frequency-agile photonic integrated lasers for coherent ranging. Nat Commun 2022; 13:3522. [PMID: 35725718 PMCID: PMC9209488 DOI: 10.1038/s41467-022-30911-6] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/04/2021] [Accepted: 05/24/2022] [Indexed: 11/27/2022] Open
Abstract
Frequency modulated continuous wave laser ranging (FMCW LiDAR) enables distance mapping with simultaneous position and velocity information, is immune to stray light, can achieve long range, operate in the eye-safe region of 1550 nm and achieve high sensitivity. Despite its advantages, it is compounded by the simultaneous requirement of both narrow linewidth low noise lasers that can be precisely chirped. While integrated silicon-based lasers, compatible with wafer scale manufacturing in large volumes at low cost, have experienced major advances and are now employed on a commercial scale in data centers, and impressive progress has led to integrated lasers with (ultra) narrow sub-100 Hz-level intrinsic linewidth based on optical feedback from photonic circuits, these lasers presently lack fast nonthermal tuning, i.e. frequency agility as required for coherent ranging. Here, we demonstrate a hybrid photonic integrated laser that exhibits very narrow intrinsic linewidth of 25 Hz while offering linear, hysteresis-free, and mode-hop-free-tuning beyond 1 GHz with up to megahertz actuation bandwidth constituting 1.6 × 1015 Hz/s tuning speed. Our approach uses foundry-based technologies - ultralow-loss (1 dB/m) Si3N4 photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase-noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise at mid-range offsets. By utilizing difference-drive and apodization of the photonic chip to suppress mechanical vibrations of the chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm. Our results constitute a photonic integrated laser system for scenarios where high compactness, fast frequency actuation, and high spectral purity are required. Stable and tunable integrated lasers are fundamental building blocks for applications from spectroscopy to imaging and communication. Here the authors present a narrow linewidth hybrid photonic integrated laser with low frequency noise and fast linear wavelength tuning. They then provide an efficient FMCW LIDAR demonstration.
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Affiliation(s)
- Grigory Lihachev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Johann Riemensberger
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Wenle Weng
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland.,Institute for Photonics and Advanced Sensing (IPAS), and School of Physical Sciences, The University of Adelaide, Adelaide, South Australia, 5005, Australia
| | - Junqiu Liu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Hao Tian
- OxideMEMS Lab, Purdue University, West Lafayette, IN, 47907, USA
| | - Anat Siddharth
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Viacheslav Snigirev
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Vladimir Shadymov
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Andrey Voloshin
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Rui Ning Wang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Jijun He
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland
| | - Sunil A Bhave
- OxideMEMS Lab, Purdue University, West Lafayette, IN, 47907, USA
| | - Tobias J Kippenberg
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015, Lausanne, Switzerland.
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A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits. SENSORS 2022; 22:s22114227. [PMID: 35684846 PMCID: PMC9185365 DOI: 10.3390/s22114227] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/27/2022] [Revised: 05/26/2022] [Accepted: 05/27/2022] [Indexed: 12/23/2022]
Abstract
In this review we present some of the recent advances in the field of silicon nitride photonic integrated circuits. The review focuses on the material deposition techniques currently available, illustrating the capabilities of each technique. The review then expands on the functionalisation of the platform to achieve nonlinear processing, optical modulation, nonvolatile optical memories and integration with III-V materials to obtain lasing or gain capabilities.
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Zarebidaki H, Fathipour M, Shahabadi M, Bogaerts W. Disk-loaded silicon micro-ring resonator for high-Q resonance. OPTICS EXPRESS 2021; 29:22688-22703. [PMID: 34266027 DOI: 10.1364/oe.430268] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/29/2021] [Accepted: 06/20/2021] [Indexed: 06/13/2023]
Abstract
By adding two disks to a standard silicon micro-ring resonator, a very high-quality factor (Q) asymmetric resonance with Q values as high as 7.773 × 105 and slope rates in excess of 880 dB/nm can be achieved. A circuit model has been proposed for this device based on which an analysis has been carried out that can predict the effect of reflections in the coupling components. Depending on the coupling coefficient between the disks and the micro-ring resonator (MRR), it is possible to use this design in three regimes, with different spectral features. Moreover, it is shown that the disks introduce a discontinuity in the transmission spectrum and the relative positioning of the disks in the ring provides a new degree of freedom in the design step. The proposed device features a high extinction ratio (ER) around 1550 nm and could be fabricated in any standard silicon photonics technology without requiring any extra materials or processing steps. The proposed resonator has a high sensitivity of ΔλRes (nm)/Δn > 299 nm/RIU, which makes it suitable for sensing applications and efficient modulators.
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