Effects of nonlinear loss in high-Q Si ring resonators for narrow-linewidth III-V/Si heterogeneously integrated tunable lasers

Design of ultrahigh-Q silicon microring resonators based on free-form curves

A design method for ultrahigh-Q microring resonators (MRRs) based on Bezier free-form curves was proposed and demonstrated. An MRR consisting of a specially designed 180° waveguide bend, a directional coupler, and two low-loss multi-mode strip waveguides was designed. The free-form curves were used to increase the degree of freedom in the design, shaping the waveguide bend with a gradient width and curvature. This design effectively reduced the propagation loss caused by the roughness of waveguide sidewalls and the mode mismatch loss caused by the excitation of high order modes. The small effective radius of only 20µm enabled the MRR to have a large free spectral range (FSR) and a compact and flexible structure. The MRR was manufactured using a standard process provided by foundry and measured to have an ultrahigh loaded Q factor of 1.86 × 106 and a FSR of about 1 nm.

High-Q and high finesse silicon microring resonator

We demonstrate the design, fabrication, and experimental characterization of a single transverse mode adiabatic microring resonator (MRR) implemented using the silicon-on- insulator (SOI) platform using local oxidation of silicon (LOCOS) approach. Following its fabrication, the device was characterized experimentally and an ultrahigh intrinsic Q-factor of ∼2 million with a free spectral range (FSR) of 2 nm was achieved, giving rise to a finesse of ∼1100, the highest demonstrated so far in SOI platform at the telecom band. We have further studied our device to analyze the source of losses that occur in the MRR and to understand the limits of the achievable Q-factor. The surface roughness was quantified using AFM scans and the root mean square roughness was found to be ∼ 0.32±0.03 nm. The nonlinear losses were further examined by coupling different optical power levels into the MRR. Indeed, we could observe that the nonlinear losses become more pronounced at power levels in the range of hundreds of microwatts. The demonstrated approach for constructing high-Q and high finesse MRRs can play a major role in the implementation of devices such as modulators, sensors, filters, frequency combs and devices that are used for quantum applications, e.g., photon pair generation.

Athermal, fabrication-tolerant Si-SiN FIR filters for a silicon photonics foundry platform

A means of athermalizing unbalanced Mach-Zehnder interferometers on a 300 mm silicon photonics foundry platform utilizing Si and SiN layers to produce the path imbalance is demonstrated. This technique can be applied to all other forms of finite impulse response filters, such as arrayed waveguide gratings. Wafer scale performance of fabricated devices is analyzed for their expected performance in the target application: odd-even channel (de)-interleavers for dense wavelength division multiplexing links. Finally, a method is proposed to improve device performance to be more robust to fabrication variations while simultaneously maintaining athermality.

Linear and nonlinear characterization of a broadband integrated Si-rich silicon nitride racetrack ring resonator for on-chip applications

We demonstrate the linear and nonlinear characterization of a plasma-enhanced chemical vapor deposited silicon-rich silicon nitride (SRSN) racetrack ring resonator for on-chip applications within the telecommunication wavelength range. The SRSN waveguide parameters are optimized by employing the refractive index profile measured by ellipsometry to achieve flat dispersion in the telecom band. Furthermore, we measure the thermo-optic coefficient of the micro-resonator by analyzing the temperature-dependent transmission spectra and assess it to be 3.2825×10-5 ∘ C -1. Additionally, we study power-dependent transmission spectra to investigate the effect of local heating and nonlinear absorption. The power-dependent transmission spectra exhibit a blueshifting of the resonance peak in the visible and near-IR regions, which indicates the presence of nonlinear losses in that range. The power-dependent transmission spectra almost remain unchanged in the telecom band, revealing the absence of nonlinear losses and excellent thermal stability in that wavelength range. Our experimental results reveal that the SRSN-based structure can be employed potentially to realize linear and nonlinear applications in the telecom band.

Damping of relaxation oscillations, photon-photon resonance, and tolerance to external optical feedback of III-V/SiN hybrid lasers with a dispersive narrow band mirror

We address the stability of a tunable hybrid laser based on a III-V Reflective Semiconductor Optical Amplifier (RSOA) edge-coupled with a Silicon Photonic (SiPh) dispersive mirror through a model of time-delayed algebraic differential equations that accounts for the narrow band mirror. Our results allow to (i) analyze the stability of single mode lasing, (ii) quantify the impact of the mirror bandwidth on the damping of the laser relaxation oscillations and the emergence of photon-photon resonance, and (iii) study the tolerance of the laser to the external optical feedback. Thanks to this analysis, we find a mirror design that gives ultra-high stability up to an external feedback level of -10 dB. The aim of the work is providing a tool for understanding and interpreting the dynamics of these lasers and design configurations for isolator-free operation.

High-Q TeO2–Si Hybrid Microring Resonators

We present the design and experimental measurement of tellurium oxide-clad silicon microring resonators with internal Q factors of up to 1.5 × 106, corresponding to a propagation loss of 0.42 dB/cm at wavelengths around 1550 nm. This compares to a propagation loss of 3.4 dB/cm for unclad waveguides and 0.97 dB/cm for waveguides clad with SiO2. We compared our experimental results with the Payne–Lacey model describing propagation dominated by sidewall scattering. We conclude that the relative increase in the refractive index of TeO2 reduces scattering sufficiently to account for the low propagation loss. These results, in combination with the promising optical properties of TeO2, provide a further step towards realizing compact, monolithic, and low-loss passive, nonlinear, and rare-earth-doped active integrated photonic devices on a silicon photonic platform.

High-performance lasers for fully integrated silicon nitride photonics

Silicon nitride (SiN) waveguides with ultra-low optical loss enable integrated photonic applications including low noise, narrow linewidth lasers, chip-scale nonlinear photonics, and microwave photonics. Lasers are key components to SiN photonic integrated circuits (PICs), but are difficult to fully integrate with low-index SiN waveguides due to their large mismatch with the high-index III-V gain materials. The recent demonstration of multilayer heterogeneous integration provides a practical solution and enabled the first-generation of lasers fully integrated with SiN waveguides. However, a laser with high device yield and high output power at telecommunication wavelengths, where photonics applications are clustered, is still missing, hindered by large mode transition loss, non-optimized cavity design, and a complicated fabrication process. Here, we report high-performance lasers on SiN with tens of milliwatts output power through the SiN waveguide and sub-kHz fundamental linewidth, addressing all the aforementioned issues. We also show Hertz-level fundamental linewidth lasers are achievable with the developed integration techniques. These lasers, together with high-Q SiN resonators, mark a milestone towards a fully integrated low-noise silicon nitride photonics platform. This laser should find potential applications in LIDAR, microwave photonics and coherent optical communications.

422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m-1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.