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Xu Q, Zhou Z, Tan C, Pan X, Wen Z, Zhang J, Zhou D, Sun Y, Chen X, Zhou L, Dai N, Chu J, Hao J. A spectrally selective visible microbolometer based on planar subwavelength thin films. NANOSCALE ADVANCES 2023; 5:2054-2060. [PMID: 36998670 PMCID: PMC10044596 DOI: 10.1039/d2na00937d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/21/2022] [Accepted: 02/23/2023] [Indexed: 06/19/2023]
Abstract
In this work, we experimentally demonstrate a new type of compact, low-cost, visible microbolometer based on metal-insulator-metal (MIM) planar subwavelength thin films, which exploits resonant absorption for spectral selectivity without additional filters and has the advantages of compact design, simple structure, cost-efficiency, and large format fabrication. The experimental results show that a proof-of-principle microbolometer exhibits spectrally selective properties in the visible frequency range. At a resonant absorption wavelength of 638 nm, a responsivity of about 10 mV W-1 is achieved at room temperature at a bias current of 0.2 mA, which is about one order of magnitude higher than that of the control device (a bare Au bolometer). Our proposed approach provides a viable solution for the development of compact and inexpensive detectors.
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Affiliation(s)
- Qianqian Xu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Ziji Zhou
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Chong Tan
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Xiaohang Pan
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
| | - Zhengji Wen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
| | - Jinguo Zhang
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University Shanghai 200433 China
| | - Dongjie Zhou
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Yan Sun
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
| | - Xin Chen
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
| | - Lei Zhou
- State Key Laboratory of Surface Physics and Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Physics Department, Fudan University Shanghai 200433 China
| | - Ning Dai
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences Hangzhou 310024 China
| | - Junhao Chu
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University Shanghai 200433 China
| | - Jiaming Hao
- State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University Shanghai 200433 China
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Jiang S, Li J, Li J, Lai J, Yi F. Metamaterial microbolometers for multi-spectral infrared polarization imaging. OPTICS EXPRESS 2022; 30:9065-9087. [PMID: 35299344 DOI: 10.1364/oe.452981] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/06/2022] [Accepted: 02/23/2022] [Indexed: 06/14/2023]
Abstract
Vanadium oxide (VOx) microbolometers enable the construction of high-performance yet low-cost and uncooled imaging detectors in the mid-infrared spectrum. Typical micro-bolometers are broadband sensors with no polarization selectivity. Thus, imaging detectors based on microbolometers have to use separate spectral and polarization filters to select the target spectral bands and polarization states, and the resulting systems are complicated and bulky. Here we demonstrate that by using metamaterial absorbers (MAs), which are arrays of optical resonators with sub-wavelength dimensions and spacing, we simultaneously tailor the VOx microbolometers' spectral and polarization responses, the need for separate spectral filters and polarizers can be mitigated. The MAs selectively absorb the TM polarization component of the incident light in a spectral band with tunable central wavelength and bandwidth while rejecting the TE polarization component. Two MAs with average TM absorption of 0.8322 in the 5.150 µm - 6.422 µm band and 0.7720 in the 5.867 µm - 7.467 µm band are fabricated, and the polarization extinction ratio (PER) are 42.24 and 42.65, respectively. The MAs are applied to VOx micro-bolometers, and the measured detector responses agree well with the absorption spectra of the MAs. The achieved peak responsivities of two fabricated detectors are 1.0 V/W at 6.0 µm and 1.46 V/W at 6.8 µm, respectively. And the two detectors achieve a D* of 6.94×105 cm·Hz1/2W-1 at 11Hz and 9.95×105 cm·Hz1/2W-1 at 36Hz, respectively. Our work paved the way towards large format room temperature multi-spectral infrared polarization imaging detector.
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Li J, Li J, Zhou S, Yi F. Metasurface Photodetectors. MICROMACHINES 2021; 12:mi12121584. [PMID: 34945434 PMCID: PMC8704368 DOI: 10.3390/mi12121584] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/09/2021] [Revised: 11/30/2021] [Accepted: 12/02/2021] [Indexed: 11/16/2022]
Abstract
Photodetectors are the essential building blocks of a wide range of optical systems. Typical photodetectors only convert the intensity of light electrical output signals, leaving other electromagnetic parameters, such as the frequencies, phases, and polarization states unresolved. Metasurfaces are arrays of subwavelength structures that can manipulate the amplitude, phase, frequency, and polarization state of light. When combined with photodetectors, metasurfaces can enhance the light-matter interaction at the pixel level and also enable the detector pixels to resolve more electromagnetic parameters. In this paper, we review recent research efforts in merging metasurfaces with photodetectors towards improved detection performances and advanced detection schemes. The impacts of merging metasurfaces with photodetectors, on the architecture of optical systems, and potential applications are also discussed.
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Affiliation(s)
- Jinzhao Li
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
| | - Junyu Li
- Raytron Technology Co., Ltd., Yantai 264006, China;
| | - Shudao Zhou
- College of Meteorology and Oceanography, National University of Defense Technology, Changsha 410073, China;
| | - Fei Yi
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
- Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology, Wuhan 430074, China
- Correspondence:
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Liu H, Wang P, Wu J, Yan X, Yuan X, Zhang Y, Zhang X. Switchable and Dual-Tunable Multilayered Terahertz Absorber Based on Patterned Graphene and Vanadium Dioxide. MICROMACHINES 2021; 12:mi12060619. [PMID: 34072164 PMCID: PMC8226437 DOI: 10.3390/mi12060619] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/20/2021] [Revised: 05/22/2021] [Accepted: 05/25/2021] [Indexed: 11/16/2022]
Abstract
In this paper, a switchable and dual-tunable terahertz absorber based on patterned graphene and vanadium dioxide is proposed and analyzed. By controlling the Fermi level of graphene and the temperature of vanadium dioxide, the device’s function can be switched and its absorbing properties can be tuned. When the vanadium dioxide is in an insulator state, the device can be switched from near-total reflection (>97%) to ultra-broadband absorption (4.5–10.61 THz) as the Fermi level of graphene changes from 0 to 0.8 eV. When the vanadium dioxide is changed to a metal state, the device can act as a single-band absorber (when the Fermi level of graphene is 0 eV) and a dual-band absorber with peaks of 4.16 THz and 7.3 THz (when the Fermi level of graphene is 0.8 eV). Additionally, the absorber is polarization-insensitive and can maintain a stable high-absorption performance within a 55° incidence angle. The multilayered structure shows great potential for switchable and tunable high-performance terahertz devices.
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Affiliation(s)
- Hongyao Liu
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
- School of Information and Communication Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
| | - Panpan Wang
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
| | - Jiali Wu
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
| | - Xin Yan
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
- Correspondence:
| | - Xueguang Yuan
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
| | - Yangan Zhang
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
| | - Xia Zhang
- State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; (H.L.); (P.W.); (J.W.); (X.Y.); (Y.Z.); x (X.Z.)
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