Yao W, Huang Z, Chen J, Li W, Yu L, Zou Y, Zhao X, Duan J, Yao Y, Xu X. Ultralong waveguide grating antenna enabled by evanescent field modulation.
OPTICS LETTERS 2022;
47:5397-5400. [PMID:
36240373 DOI:
10.1364/ol.470365]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/14/2022] [Accepted: 09/27/2022] [Indexed: 06/16/2023]
Abstract
Waveguide grating antenna (WGA) is a key component for an on-chip optical phased array. In order to form a beam with a small divergence angle, WGAs of several millimeters in length are highly desired. However, in high-index-contrast platforms such as silicon-on-insulator (SOI), such long WGAs typically require weakly modulated gratings with critical feature sizes below 10 nm. In this paper, we experimentally demonstrate a new, to the best of our knowledge, strategy to implement long WGAs. Instead of directly modulating a waveguide, we propose periodically modulating the evanescent field with subwavelength blocks. With this arrangement, weak grating strength can be achieved while maintaining a minimum feature size as large as 100 nm. For proof-of-concept, we experimentally demonstrate a 1-mm-long, single-etched WGA on a conventional 220 nm SOI platform, which achieves a far-field divergence angle of 0.095° and a wavelength scanning sensitivity of 0.168°/nm.
Collapse