Chromatic confocal sensor-based sub-aperture scanning and stitching for the measurement of microstructured optical surfaces

Hybrid diffractive-refractive lens for chromatic confocal measurement system

A novel chromatic confocal measurement (CCM) method using a hybrid diffractive- refractive lens is presented. This hybrid diffractive- refractive lens is designed to optimize the linearity of chromatic dispersion and minimize the size of the optical system. The hybrid diffractive- refractive lens is fabricated by etching a diffractive surface onto a quartz aspheric lens through lithography, which combines the high numerical aperture (NA) of a refractive lens with the unique dispersion properties of the diffractive optical elements (DOE). The lens is incorporated as a dispersive objective lens in a CCM experimental system. The system has a measurement range of 514.8 µm, calibrated using a laser displacement interferometer. The experimental results show that the wavelength-to-axial position coding of the CCM system achieves high linearity (R2= 0.9999) in the working wavelength range (500-700 nm). The system has an axial resolution of 0.08 µm and a displacement measurement nonlinear error of less than 2.05 µm.

Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center

Chromatic confocal sensor-based on-machine measurement is effective for identifying and compensating for form errors of the ultra-precisely machined components. In this study, an on-machine measurement system was developed for an ultra-precision diamond turning machine to generate microstructured optical surfaces, for which the sensor probe adopts a uniform spiral scanning motion. To avoid the tedious spiral center alignment, a self-alignment method was proposed without additional equipment or artefact, which identified the deviation of the optical axis to the spindle axis by matching the measured surface points and the designed surface. The feasibility of the proposed method was demonstrated by numerical simulation with full consideration of noises and system dynamics. Practically, taking a typical microstructured surface as an example, the on-machine measured points were reconstructed after calibrating the alignment deviation, which was then verified by off-machine white light interferometry measurement. Avoiding tedious operations and special artefacts may significantly simplify the on-machine measurement process, thereby greatly improving the efficiency and flexibility for the measurement.

Error Analysis and Correction of Thickness Measurement for Transparent Specimens Based on Chromatic Confocal Microscopy with Inclined Illumination

As a fast, high-accuracy and non-contact method, chromatic confocal microscopy is widely used in micro dimensional measurement. In this area, thickness measurement for transparent specimen is one of the typical applications. In conventional coaxial illumination mode, both the illumination and imaging axes are perpendicular to the test specimen. At the same time, there are also geometric measurement limitations in conventional mode. When measuring high-transparency specimen, the energy efficiency will be quite low, and the reflection will be very weak. This limitation will significantly affect the signal-to-noise ratio. The inclined illumination mode is a good solution to overcome this bottleneck, but the thickness results may vary at different axial positions of the sample. In this paper, an error correction method for thickness measurement of transparent samples is proposed. In the authors’ work, the error correction model was analyzed and simulated, and the influence caused by the different axial positions of sample could be theoretically eliminated. The experimental results showed that the thickness measurement of the samples was practically usable, and the measurement errors were significantly reduced by less than 2.12%, as compared to the uncorrected system. With this error correction model, the standard deviation had decreased significantly, and the axial measurement accuracy of the system can reach the micron level. Additionally, this model has the same correction effect on the samples with different refractive indexes. Therefore, the system can realize the requirement of measurement at different axial positions.