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You X, Liu J, Li Y, Jiang Y, Liu J. 3D microscopy in industrial measurements. J Microsc 2023; 289:137-156. [PMID: 36427335 DOI: 10.1111/jmi.13161] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/05/2022] [Revised: 11/19/2022] [Accepted: 11/21/2022] [Indexed: 11/27/2022]
Abstract
Quality control is essential to ensure the performance and yield of microdevices in industrial processing and manufacturing. In particular, 3D microscopy can be considered as a separate branch of microscopic instruments and plays a pivotal role in monitoring processing quality. For industrial measurements, 3D microscopy is mainly used for both the inspection of critical dimensions to ensure the design performance and detection of defects for improving the yield of microdevices. However, with the progress of advanced manufacturing technology and the increasing demand for high-performance microdevices, 3D microscopy has ushered in new challenges and development opportunities, such as breakthroughs in diffraction limit, 3D characterisation and calibrations of critical dimensions, high-precision detection and physical property determination of defects, and application of artificial intelligence. In this review, we provide a comprehensive survey about the state of the art and challenges in 3D microscopy for industrial measurements, and provide development ideas for future research. By describing techniques and methods with their advantages and limitations, we provide guidance to researchers and developers about the most suitable technique available for their intended industrial measurements.
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Affiliation(s)
- Xiaoyu You
- Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.,State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Laboratory of Microsystems and Microstructures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, China
| | - Jing Liu
- Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.,State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Laboratory of Microsystems and Microstructures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, China
| | - Yifei Li
- Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.,State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Laboratory of Microsystems and Microstructures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, China
| | - Yong Jiang
- Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.,State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Laboratory of Microsystems and Microstructures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, China
| | - Jian Liu
- Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.,State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Lab of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, Heilongjiang, China.,Key Laboratory of Microsystems and Microstructures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, China
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