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Paul P, Schmitt P, Sigurjónsdóttir VV, Hanemann K, Felde N, Schröder S, Otto F, Gruenewald M, Fritz T, Roddatis V, Tünnermann A, Szeghalmi A. Atomically Thin Metal-Dielectric Heterostructures by Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES 2023; 15:22626-22636. [PMID: 37097287 DOI: 10.1021/acsami.2c22590] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Heterostructures increasingly attracted attention over the past several years to enable various optoelectronic and photonic applications. In this work, atomically thin interfaces of Ir/Al2O3 heterostructures compatible with micro-optoelectronic technologies are reported. Their structural and optical properties were determined by spectroscopic and microscopic techniques (XRR, XPS, HRTEM, spectroscopic ellipsometry, and UV/vis/NIR spectrophotometry). The XRR and HRTEM analyses reveal a layer-by-layer growth mechanism of Ir in atomic scale heterostructures, which is different from the typical island-type growth of metals on dielectrics. Alongside, XPS investigations imply the formation of Ir-O-Al bonding at the interfaces for lower Ir concentrations, in contrast to the nanoparticle core-shell structure formation. Precisely tuning the ratio of the constituents ensures the control of the dispersion profile along with a transition from effective dielectric to metallic heterostructures. The Ir coating thickness was varied ranging from a few angstroms to films of about 7 nm in the heterostructures. The transition has been observed in the structures containing individual Ir coating thicknesses of about 2-4 nm. Following this, we show epsilon-near-zero metamaterials with tunable dielectric constants by precisely varying the composition of such heterostructures. Overall, a comprehensive study on structural and optical properties of the metal-dielectric interfaces of Ir/Al2O3 heterostructures was addressed, indicating an extension of the material portfolio available for novel optical functionalities.
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Affiliation(s)
- Pallabi Paul
- Institute of Applied Physics and Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Paul Schmitt
- Institute of Applied Physics and Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Vilborg Vala Sigurjónsdóttir
- Institute of Applied Physics and Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Kevin Hanemann
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Nadja Felde
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Sven Schröder
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Felix Otto
- Institute of Solid-State Physics, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
| | - Marco Gruenewald
- Institute of Solid-State Physics, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
| | - Torsten Fritz
- Institute of Solid-State Physics, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
| | - Vladimir Roddatis
- Institute of Materials Physics, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
| | - Andreas Tünnermann
- Institute of Applied Physics and Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
| | - Adriana Szeghalmi
- Institute of Applied Physics and Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 15, 07745 Jena, Germany
- Center of Excellence in Photonics, Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany
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