Metamaterials-based broadband absorption in long-wave infrared frequency enabled by multilayered ENZ films on metal-coated patterned silicon

Flexible broadband metamaterial absorber in long-wave infrared with visible transparency fabricated by laser direct writing

Absorption of the long-wave infrared from human beings and the surroundings is a key step to infrared imaging and sensing. Here we demonstrate a flexible and transparent broadband infrared absorber using the photoresist-assisted metamaterials fabricated by one-step laser direct writing. The photoresist is patterned by the laser as an insulator layer as well as a mask to build the complementary bilayer metamaterials without lithography. The average absorptivity is 94.5% from 8 to 14 μm in experiment due to the broadband destructive interference of the reflected beam explained by the Fabry-Perot cavity model. The proposed absorber is applicable to various substrates with additional merits of polarization insensitivity and large angle tolerance, which offers a promising solution for thermal detection and management.