Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica

Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Fused silica glass is the preferred material for applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of particular interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures in glass has proven evasive due to its high thermal and chemical stability as well as mechanical hardness. Here we present an approach for the generation of hollow microstructures in fused silica glass with high precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip.

Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication.

Controllable high-throughput high-quality femtosecond laser-enhanced chemical etching by temporal pulse shaping based on electron density control

We developed an efficient fabrication method of high-quality concave microarrays on fused silica substrates based on temporal shaping of femtosecond (fs) laser pulses. This method involves exposures of fs laser pulse trains followed by a wet etching process. Compared with conventional single pulses with the same processing parameters, the temporally shaped fs pulses can enhance the etch rate by a factor of 37 times with better controllability and higher quality. Moreover, we demonstrated the flexibility of the proposed method in tuning the profile of the concave microarray structures by changing the laser pulse delay, laser fluence, and pulse energy distribution ratio. Micro-Raman spectroscopy was conducted to elucidate the stronger modification induced by the fs laser pulse trains in comparison with the single pulses. Our calculations show that the controllability is due to the effective control of localized transient free electron densities by temporally shaping the fs pulses.

Tailored surface birefringence by femtosecond laser assisted wet etching

Surface texturing is demonstrated by the combination of wet etching and ultrafast laser nanostructuring of silica glass. Using potassium hydroxide (KOH) at room temperature as an etchant of laser modified glass, we show the polarization dependent linear increase in retardance reaching a threefold value within 25 hours. The dispersion control of birefringence by the etching procedure led to achromatic behaviour over the entire visible spectral range. The mechanism of enhanced KOH etching selectivity after femtosecond laser exposure is discussed and correlated to the formation of various laser-induced defects, such as silicon-rich oxygen deficiency and color centers.

Chemical-assisted femtosecond laser writing of lab-in-fibers

The lab-on-chip (LOC) platform has presented a powerful opportunity to improve functionalization, parallelization, and miniaturization on planar or multilevel geometries that has not been possible with fiber optic technology. A migration of such LOC devices into the optical fiber platform would therefore open the revolutionary prospect of creating novel lab-in-fiber (LIF) systems on the basis of an efficient optical transport highway for multifunctional sensing. For the LIF, the core optical waveguide inherently offers a facile means to interconnect numerous types of sensing elements along the optical fiber, presenting a radical opportunity for optimizing the packaging and densification of diverse components in convenient geometries beyond that available with conventional LOCs. In this paper, three-dimensional patterning inside the optical fiber by femtosecond laser writing, together with selective chemical etching, is presented as a powerful tool to form refractive index structures such as optical waveguides and gratings as well as to open buried microfluidic channels and optical resonators inside the flexible and robust glass fiber. In this approach, optically smooth surfaces (~12 nm rms) are introduced for the first time inside the fiber cladding that precisely conform to planar nanograting structures when formed by aberration-free focusing with an oil-immersion lens across the cylindrical fiber wall. This process has enabled optofluidic components to be precisely embedded within the fiber to be probed by either the single-mode fiber core waveguide or the laser-formed optical circuits. We establish cladding waveguides, X-couplers, fiber Bragg gratings, microholes, mirrors, optofluidic resonators, and microfluidic reservoirs that define the building blocks for facile interconnection of inline core-waveguide devices with cladding optofluidics. With these components, more advanced, integrated, and multiplexed fiber microsystems are presented demonstrating fluorescence detection, Fabry-Perot interferometric refractometry, and simultaneous sensing of refractive index, temperature, and bending strain. The flexible writing technique and multiplexed sensors described here open powerful prospects to migrate the benefits of LOCs into a more flexible and miniature LIF platform for highly functional and distributed sensing capabilities. The waveguide backbone of the LIF inherently provides an efficient exchange of information, combining sensing data that are attractive in telecom networks, smart catheters for medical procedures, compact sensors for security and defense, shape sensors, and low-cost health care products.

Assessing the phase retardation in corneal tissues using a femtosecond laser

We developed and validated a versatile test method for precise quantification of phase retardation in corneal tissues using a femtosecond laser. It is based on an experimental system for direct measurement of corneal phase rotation due to corneal birefringence effects using a dual-polarizer, computer-controlled, femtosecond laser design. It also includes a comprehensive analytical model using Jones matrices. The test method presented is used for quantification of phase retardation in corneal tissues by employing the experimental data obtained from corneal phase rotation measurements and using analytical model assessments. The experimental and theoretical results obtained, and thus, the system's high accuracy and repeatability potential for assessing the corneal phase retardation are validated using control phase retardation evaluation.

Laser-written photonic crystal optofluidics for electrochromatography and spectroscopy on a chip

Femtosecond laser processes were optimized for nonlinear interactions with various optical materials to develop a novel biophotonic lab-on-a-chip device that integrates laser-formed waveguides (WGs), microfluidic channels and photonic crystals (PCs). Such integration seeks the unique demonstration of dual PC functionalities: (1) efficient chromatographic separation and filtration of analytes through a porous PC embedded inside a microfluidic channel and (2) optofluidic spectroscopy through embedded WGs that probe PC stopband shifts as varying analyte concentrations flow and separate. The building blocks together with their integration were demonstrated, providing embedded porous PCs through which electrochromatography drove an accelerated mobile phase of analyte and an optical stopband was probed via integrated buried WGs. Together, these laboratory results underpin the promise of simultaneous chromatographic and spectroscopic capabilities in a single PC optofluidic device.

Digital projection photochemical etching defines gray-scale features

We demonstrate a maskless photochemical etching method that is capable of performing one-step etching of multi-level structures. This method uses a digital projector to focus an image onto the sample and define the etching pattern. By combining digital projection photochemical etching with diffraction phase microscopy, etch heights can be measured in situ in a non-destructive manner. This method is single shot, eliminating the need for expensive gray-scale masks or laser scanning methods. The etch rate is studied as a function of the wavelength and irradiance of the projected light. A lateral etch resolution of 2 μm is demonstrated by etching selected portions of the USAF-1951 target. Micropillars, multi-level plateaus, and an Archimedean spiral are etched, each in a single processing step, to illustrate the unique capabilities.