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Li R, Zhang C, Li J, Zhang Y, Liu S, Hu Y, Jiang S, Chen C, Xin C, Tao Y, Dong B, Wu D, Chu J. Magnetically encoded 3D mesostructure with high-order shape morphing and high-frequency actuation. Natl Sci Rev 2022; 9:nwac163. [PMID: 36381211 PMCID: PMC9647007 DOI: 10.1093/nsr/nwac163] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/07/2022] [Revised: 07/05/2022] [Accepted: 07/14/2022] [Indexed: 09/08/2023] Open
Abstract
Inspired by origami/kirigami, three-dimensional (3D) mesostructures assembled via a mechanics-guided approach, with reversible and maneuverable shape-morphing capabilities, have attracted great interest with regard to a broad range of applications. Despite intensive studies, the development of morphable 3D mesostructures with high-order (multi-degree-of-freedom) deformation and untethered high-frequency actuation remains challenging. This work introduces a scheme for a magnetically encoded transferable 3D mesostructure, with polyethylene terephthalate (PET) film as the skeleton and discrete magnetic domains as actuation units, to address this challenge. The high-order deformation, including hierarchical, multidirectional and blending shape morphing, is realized by encoding 3D discrete magnetization profiles on the architecture through ultraviolet curing. Reconfigurable 3D mesostructures with a modest structural modulus (∼3 GPa) enable both high-frequency (∼55 Hz) and large-deformation (∼66.8%) actuation under an alternating magnetic field. Additionally, combined with the shape-retention and adhesion property of PET, these 3D mesostructures can be readily transferred and attached to many solid substrates. On this basis, diverse functional devices, including a switchable colour letter display, liquid mixer, sequential flashlight and biomimetic sliding robot, are demonstrated to offer new perspectives for robotics and microelectronics.
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Affiliation(s)
- Rui Li
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Cong Zhang
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Jiawen Li
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Yachao Zhang
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Shunli Liu
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Yanlei Hu
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Shaojun Jiang
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Chao Chen
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Chen Xin
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Yuan Tao
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Bin Dong
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Dong Wu
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
| | - Jiaru Chu
- Hefei National Laboratory for Physical Sciences at the Microscale, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
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Yin W, Yang Y, Yang R, Yao B. Tunable depth of focus with modified complex amplitude modulation of an optical field. APPLIED OPTICS 2022; 61:3502-3509. [PMID: 35471448 DOI: 10.1364/ao.453313] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/07/2022] [Accepted: 03/22/2022] [Indexed: 06/14/2023]
Abstract
Bessel beams have nondiffraction and self-healing properties in the propagation direction and are widely used in particle optical manipulation and optical microscopy. Bessel beams can be generated by axicons or spatial light modulators, which can produce a zero-order or high-order Bessel beam with different parameters depending on the specific application. The modulation of Bessel beams achieved in the spatial spectrum domain by optimization algorithms has a low light energy utilization rate due to the small effective modulation region. We propose a Bessel-like beam phase generation algorithm based on an improved iterative optimization algorithm directly in the spatial domain to achieve a tunable modulation of the beam's length and the axial center position. The optimization time is reduced from minutes to seconds relative to the genetic algorithm, providing a new means of modulation for different applications in various fields.
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Wang M, Yu Z, Zhang N, Liu W. Drilling high aspect ratio holes by femtosecond laser filament with aberrations. FRONTIERS OF OPTOELECTRONICS 2021; 14:522-528. [PMID: 36637764 PMCID: PMC9743919 DOI: 10.1007/s12200-021-1214-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/26/2021] [Accepted: 04/29/2021] [Indexed: 06/17/2023]
Abstract
A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament, which is employed to drill holes on copper targets. By shifting or rotating the focusing lens, additional aberration is imposed on the focused laser beam, and significant influence is produced on the aspect ratio and cross-sectional shape of the micro-holes. Experimental results show that when proper aberration is introduced, the copper plate with a thickness of 3 mm can be drilled through with an aspect ratio of 30, while no through-holes can be drilled on 3-mm-thickness copper plates by femtosecond laser with minimized aberration. In addition, when femtosecond laser filament with large astigmatism is used, micro-holes that had a length to width ratio up to 3.3 on the cross-section are obtained. Therefore, the method proposed here can be used to fabricate long oval holes with high aspect ratios.
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Affiliation(s)
- Manshi Wang
- Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China
| | - Zhiqiang Yu
- Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China
| | - Nan Zhang
- Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China.
| | - Weiwei Liu
- Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China
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Lao Z, Xia N, Wang S, Xu T, Wu X, Zhang L. Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review. MICROMACHINES 2021; 12:465. [PMID: 33924199 PMCID: PMC8074609 DOI: 10.3390/mi12040465] [Citation(s) in RCA: 16] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/14/2021] [Revised: 04/11/2021] [Accepted: 04/16/2021] [Indexed: 12/14/2022]
Abstract
Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.
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Affiliation(s)
- Zhaoxin Lao
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Sha Tin, Hong Kong 999077, China; (N.X.); (S.W.)
- Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China
- CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230022, China
| | - Neng Xia
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Sha Tin, Hong Kong 999077, China; (N.X.); (S.W.)
| | - Shijie Wang
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Sha Tin, Hong Kong 999077, China; (N.X.); (S.W.)
| | - Tiantian Xu
- Guangdong Provincial Key Laboratory of Robotics and Intelligent System, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China; (T.X.); (X.W.)
| | - Xinyu Wu
- Guangdong Provincial Key Laboratory of Robotics and Intelligent System, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China; (T.X.); (X.W.)
| | - Li Zhang
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Sha Tin, Hong Kong 999077, China; (N.X.); (S.W.)
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Li ZZ, Li XY, Yu F, Chen QD, Tian ZN, Sun HB. Circular cross section waveguides processed by multi-foci-shaped femtosecond pulses. OPTICS LETTERS 2021; 46:520-523. [PMID: 33528399 DOI: 10.1364/ol.414962] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/17/2020] [Accepted: 12/24/2020] [Indexed: 06/12/2023]
Abstract
We developed a simple multi-foci-shaped femtosecond pulsed (MFSFP) method for processing circular cross section waveguides in transparent materials. With this flexible processing method, the focus energy distribution can be designed freely and arbitrarily, and single-mode waveguides with cross section circularity better than 96.0% were achieved. The mode shape difference (1.93%) of circular waveguides is smaller than the difference (7.01%) of normal elliptical waveguides. The coupling abilities of the two kinds of waveguides were investigated with three-dimensional (3D) directional couplers in both experiments and theoretical simulations. The coupling coefficient difference of circular waveguides in vertical and horizontal coupling directions was ∼0.01mm-1, which was smaller than 0.33mm-1 of normal waveguides. The circular symmetric waveguides will play an important role in large-scale high-intensity 3D photonic integrated circuits.
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Alimohammadian E, Liu S, Salehizadeh M, Li J, Herman P. Compensating deep focusing distortion for femtosecond laser inscription of low-loss optical waveguides. OPTICS LETTERS 2020; 45:6306-6309. [PMID: 33186976 DOI: 10.1364/ol.403823] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/27/2020] [Accepted: 09/29/2020] [Indexed: 06/11/2023]
Abstract
Various beam shaping approaches were examined to counter the negative influence of surface aberration arising when inscribing optical waveguides deeply inside of glass with a femtosecond laser. Aberration correction was found unable to completely recover the low-loss waveguide properties, prompting a comprehensive examination of waveguides formed with focused Gaussian-Bessel beams. Diverging conical phase fronts are presented as a hybrid means of partial aberration correction to improve insertion loss and a new, to the best of our knowledge, means of asymmetric beam shaping. In this way, low-loss waveguides are presented over shallow to deep writing depth (2.8 mm) where morphological and modal properties could be further tuned with conical phase front.
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Lee H, Gan Z, Chen M, Min S, Yang J, Xu Z, Shao X, Lin Y, Li WD, Kim JT. On-Demand 3D Printing of Nanowire Probes for High-Aspect-Ratio Atomic Force Microscopy Imaging. ACS APPLIED MATERIALS & INTERFACES 2020; 12:46571-46577. [PMID: 32924414 DOI: 10.1021/acsami.0c14148] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
With the growing importance of three-dimensional (3D) nanomaterials and devices, there has been a great demand for high-fidelity, full profile topographic characterizations in a nondestructive manner. A promising route is to employ a high-aspect-ratio (HAR) probe in atomic force microscopy (AFM) imaging. However, the fabrication of HAR-AFM probes continues to suffer from extravagant cost, limited material choice, and complicated manufacturing steps. Here, we report one-step, on-demand electrohydrodynamic 3D printing of metallic HAR-AFM probes with tailored dimensions. Our additive fabrication approach yields a freestanding metallic nanowire with an aspect ratio over 30 directly on a cantilever within tens of seconds, producing a HAR-AFM probe. Furthermore, the benefits associated with unprecedented simplicity in the probe's dimension control, material selection, and regeneration are provided. The 3D-printed HAR-AFM probe exhibits a better fidelity in deep trench AFM imaging than a standard pyramidal probe. We expect this approach to find facile, material-saving manufacturing routes in particular for customizing functional nanoprobes.
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Affiliation(s)
- Heekwon Lee
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Zhuofei Gan
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Mojun Chen
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Siyi Min
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Jihyuk Yang
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Zhaoyi Xu
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Xueying Shao
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Yuan Lin
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Wen-Di Li
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
| | - Ji Tae Kim
- Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China
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Arita Y, Lee J, Kawaguchi H, Matsuo R, Miyamoto K, Dholakia K, Omatsu T. Photopolymerization with high-order Bessel light beams. OPTICS LETTERS 2020; 45:4080-4083. [PMID: 32667359 DOI: 10.1364/ol.396012] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/23/2020] [Accepted: 06/05/2020] [Indexed: 06/11/2023]
Abstract
We study photopolymerization with high-order Bessel light beams with phase singularities on-axis. Self-trapping and self-focusing of propagation-invariant light beams in a photopolymer allow the fabrication of extended helical microfibers with a length scale of a centimeter, which is more than an order of magnitude larger than the propagation distance of the Bessel light beams. We show the evolution of microfibers rotating at a rate proportional to the incident optical power, while the periodicity of the helical structures remains constant, irrespective of the laser power. This suggests that optical momentum transfer plays a predominant role in the growth and rotation of such fiber structures.
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