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Lettner T, Zeuner KD, Schöll E, Huang H, Scharmer S, da Silva SFC, Gyger S, Schweickert L, Rastelli A, Jöns KD, Zwiller V. GaAs Quantum Dot in a Parabolic Microcavity Tuned to 87Rb D 1. ACS PHOTONICS 2020; 7:29-35. [PMID: 32025532 PMCID: PMC6994066 DOI: 10.1021/acsphotonics.9b01243] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/28/2019] [Indexed: 06/10/2023]
Abstract
We develop a structure to efficiently extract photons emitted by a GaAs quantum dot tuned to rubidium. For this, we employ a broadband microcavity with a curved gold backside mirror that we fabricate by a combination of photoresist reflow, dry reactive ion etching in an inductively coupled plasma, and selective wet chemical etching. Precise reflow and etching control allows us to achieve a parabolic backside mirror with a short focal distance of 265 nm. The fabricated structures yield a predicted (measured) collection efficiency of 63% (12%), an improvement by more than 1 order of magnitude compared to unprocessed samples. We then integrate our quantum dot parabolic microcavities onto a piezoelectric substrate capable of inducing a large in-plane biaxial strain. With this approach, we tune the emission wavelength by 0.5 nm/kV, in a dynamic, reversible, and linear way, to the rubidium D1 line (795 nm).
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Affiliation(s)
- Thomas Lettner
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Katharina D. Zeuner
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Eva Schöll
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Huiying Huang
- Institute
of Semiconductor and Solid State Physics, Johannes Kepler University Linz, 4040 Linz, Austria
| | - Selim Scharmer
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | | | - Samuel Gyger
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Lucas Schweickert
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Armando Rastelli
- Institute
of Semiconductor and Solid State Physics, Johannes Kepler University Linz, 4040 Linz, Austria
| | - Klaus D. Jöns
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
| | - Val Zwiller
- Department
of Applied Physics, Royal Institute of Technology, Albanova University Centre, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
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2
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Jakubczyk T, Delmonte V, Fischbach S, Wigger D, Reiter DE, Mermillod Q, Schnauber P, Kaganskiy A, Schulze JH, Strittmatter A, Rodt S, Langbein W, Kuhn T, Reitzenstein S, Kasprzak J. Impact of Phonons on Dephasing of Individual Excitons in Deterministic Quantum Dot Microlenses. ACS PHOTONICS 2016; 3:2461-2466. [PMID: 28713845 PMCID: PMC5503178 DOI: 10.1021/acsphotonics.6b00707] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2016] [Indexed: 05/15/2023]
Abstract
Optimized light-matter coupling in semiconductor nanostructures is a key to understand their optical properties and can be enabled by advanced fabrication techniques. Using in situ electron beam lithography combined with a low-temperature cathodoluminescence imaging, we deterministically fabricate microlenses above selected InAs quantum dots (QDs), achieving their efficient coupling to the external light field. This enables performing four-wave mixing microspectroscopy of single QD excitons, revealing the exciton population and coherence dynamics. We infer the temperature dependence of the dephasing in order to address the impact of phonons on the decoherence of confined excitons. The loss of the coherence over the first picoseconds is associated with the emission of a phonon wave packet, also governing the phonon background in photoluminescence (PL) spectra. Using theory based on the independent boson model, we consistently explain the initial coherence decay, the zero-phonon line fraction, and the line shape of the phonon-assisted PL using realistic quantum dot geometries.
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Affiliation(s)
- Tomasz Jakubczyk
- Univ.
Grenoble Alpes, F-38000 Grenoble, France
- “Nanophysique
et Semiconducteurs” Group, CNRS,
Institut Néel, F-38000 Grenoble, France
- E-mail:
| | - Valentin Delmonte
- Univ.
Grenoble Alpes, F-38000 Grenoble, France
- “Nanophysique
et Semiconducteurs” Group, CNRS,
Institut Néel, F-38000 Grenoble, France
| | - Sarah Fischbach
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - Daniel Wigger
- Institut
für Festkörpertheorie, Universität
Münster, 48149 Münster, Germany
- E-mail:
| | - Doris E. Reiter
- Institut
für Festkörpertheorie, Universität
Münster, 48149 Münster, Germany
| | - Quentin Mermillod
- Univ.
Grenoble Alpes, F-38000 Grenoble, France
- “Nanophysique
et Semiconducteurs” Group, CNRS,
Institut Néel, F-38000 Grenoble, France
| | - Peter Schnauber
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - Arsenty Kaganskiy
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - Jan-Hindrik Schulze
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - André Strittmatter
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - Sven Rodt
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
| | - Wolfgang Langbein
- Cardiff
University School of Physics and Astronomy, The Parade, Cardiff CF24 3AA, United
Kingdom
| | - Tilmann Kuhn
- Institut
für Festkörpertheorie, Universität
Münster, 48149 Münster, Germany
| | - Stephan Reitzenstein
- Institut
für Festkörperphysik, Technische
Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
- E-mail:
| | - Jacek Kasprzak
- Univ.
Grenoble Alpes, F-38000 Grenoble, France
- “Nanophysique
et Semiconducteurs” Group, CNRS,
Institut Néel, F-38000 Grenoble, France
- E-mail:
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3
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Schnauber P, Schmidt R, Kaganskiy A, Heuser T, Gschrey M, Rodt S, Reitzenstein S. Using low-contrast negative-tone PMMA at cryogenic temperatures for 3D electron beam lithography. NANOTECHNOLOGY 2016; 27:195301. [PMID: 27023850 DOI: 10.1088/0957-4484/27/19/195301] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We report on a 3D electron beam lithography (EBL) technique using polymethyl methacrylate (PMMA) in the negative-tone regime as a resist. First, we briefly demonstrate 3D EBL at room temperature. Then we concentrate on cryogenic temperatures where PMMA exhibits a low contrast, which allows for straightforward patterning of 3D nano- and microstructures. However, conventional EBL patterning at cryogenic temperatures is found to cause severe damage to the microstructures. Through an extensive study of lithography parameters, exposure techniques, and processing steps we deduce a hypothesis for the cryogenic PMMA's structural evolution under electron beam irradiation that explains the damage. In accordance with this hypothesis, a two step lithography technique involving a wide-area pre-exposure dose slightly smaller than the onset dose is applied. It enables us to demonstrate a >95% process yield for the low-temperature fabrication of 3D microstructures.
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Affiliation(s)
- Peter Schnauber
- Institut für Festkörperphysik, Technische Universität Berlin, Hardenbergstraße 36, D-10623 Berlin, Germany
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4
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Trotta R, Martín-Sánchez J, Wildmann JS, Piredda G, Reindl M, Schimpf C, Zallo E, Stroj S, Edlinger J, Rastelli A. Wavelength-tunable sources of entangled photons interfaced with atomic vapours. Nat Commun 2016; 7:10375. [PMID: 26815609 PMCID: PMC4737804 DOI: 10.1038/ncomms10375] [Citation(s) in RCA: 95] [Impact Index Per Article: 11.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/06/2015] [Accepted: 12/03/2015] [Indexed: 12/03/2022] Open
Abstract
The prospect of using the quantum nature of light for secure communication keeps spurring the search and investigation of suitable sources of entangled photons. A single semiconductor quantum dot is one of the most attractive, as it can generate indistinguishable entangled photons deterministically and is compatible with current photonic-integration technologies. However, the lack of control over the energy of the entangled photons is hampering the exploitation of dissimilar quantum dots in protocols requiring the teleportation of quantum entanglement over remote locations. Here we introduce quantum dot-based sources of polarization-entangled photons whose energy can be tuned via three-directional strain engineering without degrading the degree of entanglement of the photon pairs. As a test-bench for quantum communication, we interface quantum dots with clouds of atomic vapours, and we demonstrate slow-entangled photons from a single quantum emitter. These results pave the way towards the implementation of hybrid quantum networks where entanglement is distributed among distant parties using optoelectronic devices.
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Affiliation(s)
- Rinaldo Trotta
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
| | - Javier Martín-Sánchez
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
| | - Johannes S. Wildmann
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
| | - Giovanni Piredda
- Forschungszentrum Mikrotechnik, FH Vorarlberg, Hochschulstr. 1, A-6850 Dornbirn, Austria
| | - Marcus Reindl
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
| | - Christian Schimpf
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
| | - Eugenio Zallo
- Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstr. 20, D-01069 Dresden, Germany
- Paul-Drude-Institut für Festkörperelektronik, Hausvogteilplatz 5-7, 10117 Berlin, Germany
| | - Sandra Stroj
- Forschungszentrum Mikrotechnik, FH Vorarlberg, Hochschulstr. 1, A-6850 Dornbirn, Austria
| | - Johannes Edlinger
- Forschungszentrum Mikrotechnik, FH Vorarlberg, Hochschulstr. 1, A-6850 Dornbirn, Austria
| | - Armando Rastelli
- Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Altenbergerstr. 69, A-4040 Linz, Austria
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