Ultra-high-Q thin-silicon nitride strip-loaded ring resonators

Absorption and scattering limits of silicon nitride integrated photonics in the visible spectrum

Visible-light photonic integrated circuits (PICs) promise scalability for technologies such as quantum information, biosensing, and scanning displays, yet extending large-scale silicon photonics to shorter wavelengths has been challenging due to the higher losses. Silicon nitride (SiN) has stood out as the leading platform for visible photonics, but the propagation losses strongly depend on the film's deposition and fabrication processes. Current loss measurement techniques cannot accurately distinguish between absorption and surface scattering, making it difficult to identify the dominant loss source and reach the platform's fundamental limit. Here we demonstrate an ultra-low loss, high-confinement SiN platform that approaches the limits of absorption and scattering across the visible spectrum. Leveraging the sensitivity of microresonators to loss, we probe and discriminate each loss contribution with unparalleled sensitivity, and derive their fundamental limits and scaling laws as a function of wavelength, film properties and waveguide parameters. Through the design of the waveguide cross-section, we show how to approach the absorption limit of the platform, and demonstrate the lowest propagation losses in high-confinement SiN to date across the visible spectrum. We envision that our techniques for loss characterization and minimization will contribute to the development of large-scale, dense PICs that redefine the loss limits of integrated platforms across the electromagnetic spectrum.

Low Power Coherent Ising Machine Based on Mechanical Kerr Nonlinearity

Finding a reliable Ising machine for solving nondeterministic polynomial-class problems has attracted great attention in recent years, where an authentic system can be expanded with polynomial-scaled resources to find the ground state Ising Hamiltonian. In this Letter, we propose an extremely low power optomechanical coherent Ising machine based on a new enhanced symmetry breaking mechanism and highly nonlinear mechanical Kerr effect. The mechanical movement of an optomechanical actuator induced by the optical gradient force greatly increases the nonlinearity by a few orders and significantly reduces the power threshold using conventional structures capable of fabrication via photonic integrated circuit platforms. With the simple but strong bifurcation mechanism and remarkably low power requirement, our optomechanical spin model opens a path for chip-scale integration of large-size Ising machine implementations with great stability.

Ultra-low loss visible light waveguides for integrated atomic, molecular, and quantum photonics

Atomic, molecular and optical (AMO) visible light systems are the heart of precision applications including quantum, atomic clocks and precision metrology. As these systems scale in terms of number of lasers, wavelengths, and optical components, their reliability, space occupied, and power consumption will push the limits of using traditional laboratory-scale lasers and optics. Visible light photonic integration is critical to advancing AMO based sciences and applications, yet key performance aspects remain to be addressed, most notably waveguide losses and laser phase noise and stability. Additionally, a visible light integrated solution needs to be wafer-scale CMOS compatible and capable of supporting a wide array of photonic components. While the regime of ultra-low loss has been achieved at telecommunication wavelengths, progress at visible wavelengths has been limited. Here, we report the lowest waveguide losses and highest resonator Qs to date in the visible range, to the best of our knowledge. We report waveguide losses at wavelengths associated with strontium transitions in the 461 nm to 802 nm wavelength range, of 0.01 dB/cm to 0.09 dB/cm and associated intrinsic resonator Q of 60 Million to 9.5 Million, a decrease in loss by factors of 6x to 2x and increase in Q by factors of 10x to 1.5x over this visible wavelength range. Additionally, we measure an absorption limited loss and Q of 0.17 dB/m and 340 million at 674 nm. This level of performance is achieved in a wafer-scale foundry compatible Si₃N₄ platform with a 20 nm thick core and TEOS-PECVD deposited upper cladding oxide, and enables waveguides for different wavelengths to be fabricated on the same wafer with mask-only changes per wavelength. These results represent a significant step forward in waveguide platforms that operate in the visible, opening up a wide range of integrated applications that utilize atoms, ions and molecules including sensing, navigation, metrology and clocks.

Optical biosensors: an exhaustive and comprehensive review

Optical biosensors have exhibited worthwhile performance in detecting biological systems and promoting significant advances in clinical diagnostics, drug discovery, food process control, and environmental monitoring. Without complexity in their pretreatment and probable influence on the nature of target molecules, these biosensors have additional advantages such as high sensitivity, robustness, reliability, and potential to be integrated on a single chip. In this review, the state of the art optical biosensor technologies, including those based on surface plasmon resonance (SPR), optical waveguides, optical resonators, photonic crystals, and optical fibers, are presented. The principles for each type of biosensor are concisely introduced and particular emphasis has been placed on recent achievements. The strengths and weaknesses of each type of biosensor have been outlined as well. Concluding remarks regarding the perspectives of future developments are discussed.

1.4 million Q factor Si3N4 micro-ring resonator at 780 nm wavelength for chip-scale atomic systems

A silicon nitride micro-ring resonator with a loaded Q factor of 1.4 × 10⁶ at 780 nm wavelength is demonstrated on silicon substrates. This is due to the low propagation loss waveguides achieved by optimization of waveguide sidewall interactions and top cladding refractive index. Potential applications include laser frequency stabilization allowing for chip-scale atomic systems targeting the ⁸⁷Rb atomic transition at 780.24 nm. The temperature dependent wavelength shift of the micro-ring was determined to be 13.1 pm/K indicating that a minimum temperature stability of less than ±15 mK is required for such devices for wavelength locking applications. If a polyurethane acrylate top cladding of an optimized thickness is used then the micro-ring could effectively be athermal, resulting in reduced footprint, power consumption, and cost of potential devices.

Strip-loaded waveguide on titanium dioxide thin films by nanoimprint replication

We present a convenient, low-cost, and mass-production-compatible technique for the fabrication of strip-loaded waveguides. The technique is based on the atomic layer deposition of a slab waveguide, nanoimprinting of a strip, and integration of two structures by lamination. The guiding layer is chosen to be a 200 nm thick titanium dioxide film. The waveguide characteristics are determined by the use of ring resonators. The technique is demonstrated for titanium dioxide thin films, but it is applicable to any other material that meets the refractive index difference condition between the loading strip and the slab waveguide.

Hybrid plasmonic–photonic whispering gallery mode resonators for sensing: a critical review

In this review we present the state of the art and the most recent advances in the field of optical sensing with hybrid plasmonic–photonic whispering gallery mode (WGM) resonators.