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Zhao H, Zheng C, Pi M, Liang L, Song F, Zheng K, Zhang Y, Wang Y, Tittel FK. WMS-based near-infrared on-chip acetylene sensor using polymeric SU8 Archimedean spiral waveguide with Euler S-bend. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2023; 302:123020. [PMID: 37364413 DOI: 10.1016/j.saa.2023.123020] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/07/2023] [Revised: 06/04/2023] [Accepted: 06/14/2023] [Indexed: 06/28/2023]
Abstract
SU8 is a cost-effective polymer material that is highly suitable for large-scale fabrication of waveguides. However, it has not been employed for on-chip gas measurement utilizing infrared absorption spectroscopy. In this study, we propose a near-infrared on-chip acetylene (C2H2) sensor using SU8 polymer spiral waveguides for the first time to our knowledge. The performance of the sensor based on wavelength modulation spectroscopy (WMS) was experimentally validated. By incorporating the proposed Euler-S bend and Archimedean spiral SU8 waveguide, we achieved a reduction in the sensor's size by over fifty percent. Leveraging the WMS technique, we evaluated the C2H2 sensing performance at 1532.83 nm for SU8 waveguides of lengths 7.4 cm and 13 cm. The limit of detection (LoD) values were 2197.1 ppm (parts per million) and 425.5 ppm, respectively, with an averaging time of 0.2 s. Furthermore, the experimentally obtained optical power confinement factor (PCF) closely approximated the simulated value, with a value of 0.0172 compared to the simulated value of 0.016. The waveguide loss is measured to be 3 dB/cm. The rise time and fall time were approximately 2.05 s and 3.27 s, respectively. This study concludes that the SU8 waveguide exhibits significant potential for high-performance on-chip gas sensing in the near-infrared wavelength range.
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Affiliation(s)
- Huan Zhao
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Chuantao Zheng
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
| | - Mingquan Pi
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Lei Liang
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
| | - Fang Song
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Kaiyuan Zheng
- Department of Electrical Engineering and Photonics Research Institute, The Hong Kong Polytechnic University, Hong Kong, China
| | - Yu Zhang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Yiding Wang
- State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
| | - Frank K Tittel
- Department of Electrical and Computer Engineering, Rice University, 6100 Main Street, Houston, TX 77005, USA
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Zhang X, Zhou C, Luo Y, Yang Z, Zhang W, Li L, Xu P, Zhang P, Xu T. High Q-factor, ultrasensitivity slot microring resonator sensor based on chalcogenide glasses. OPTICS EXPRESS 2022; 30:3866-3875. [PMID: 35209636 DOI: 10.1364/oe.450092] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/30/2021] [Accepted: 01/13/2022] [Indexed: 06/14/2023]
Abstract
In this article, the chalcogenide slot waveguide is theoretically studied, and the highest power confinement factors of the slot region and the cladding region are obtained to be 36.3% and 56.7%, respectively. A high-sensitivity chalcogenide slot microring resonator sensor is designed and fabricated by electron-beam lithography and dry etching. The structure increases the sensitivity of the sensor compared with the conventional evanescent field waveguide sensor. The cavity has achieved a quality factor of 1 × 104 by fitting the resonant peaks with the Lorentzian profile, one of the highest quality factors reported for chalcogenide slot microring resonators. The sensor sensitivity is measured to be 471 nm/RIU, which leads to an intrinsic limit of detection of 3.3 × 10--4 RIU.
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Fu YL, Deng CS, Ma SS. Design and analysis of refractive index sensors based on slotted photonic crystal nanobeam cavities with sidewall gratings. APPLIED OPTICS 2020; 59:896-903. [PMID: 32225225 DOI: 10.1364/ao.380459] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/12/2023]
Abstract
We propose and numerically investigate a refractive index sensor based on a one-dimensional slotted photonic crystal nanobeam cavity with sidewall gratings for refractive index sensing in a gaseous environment. By using the three-dimensional finite-difference time-domain method, we demonstrate that our proposed sensor simultaneously possesses a high quality factor of $ 3.71 \times {10^6} $3.71×106 and a high sensitivity of 508 nm/RIU (refractive index unit) at the resonant wavelength near 1583 nm, yielding a detection limit as low as $ 1.97 \times {10^{ - 6}} $1.97×10-6 RIU. Moreover, the mode volume of the cavity's fundamental resonant mode is found to be as small as $ 0.022(\lambda /n)^3 $0.022(λ/n)3, resulting in a very compact effective sensing area. We finally study and assess the effect of fabrication disorder on the performances of our proposed sensor. We believe our proposed sensor will be a promising candidate for applications not only in multiplexed biochemical sensing and multielement mixture detection, but also in optical trapping of single biomolecules or nanoparticles.
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Borta P, Monniello L, Kurdi ME, Saada S, Sauvage S, Girard H, Checoury X. Increasing the angular sensitivity of two-dimensional photonic crystal based sensors to arbitrary values. OPTICS EXPRESS 2019; 27:1578-1589. [PMID: 30696222 DOI: 10.1364/oe.27.001578] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/20/2018] [Accepted: 01/02/2019] [Indexed: 06/09/2023]
Abstract
A new design of photonic crystal (PhC) for optical sensing using guided mode resonance (GMR) is presented. We theoretically show that angular sensitivity is inversely proportional to the group velocity of the probed mode and can be made arbitrarily high in a properly designed PhC. PhCs made in polycrystalline diamond on insulator are fabricated. The angular sensitivity dependence is validated. We measured modes with group velocity of c/80 at a wavelength of 800 nm. A sensitivity in the order of 500 ° per refractive index unit is inferred, a value much larger than the one usually encountered in PhCs.
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