Optomechanical characterization of silicon nitride membrane arrays

Narrow-linewidth Fano microcavities with resonant subwavelength grating mirror

We report on the theoretical and experimental investigations of optical microcavities consisting in the plane-plane arrangement of a broadband high-reflectivity mirror and a suspended one-dimensional grating mirror possessing a high-quality factor Fano resonance. By varying the length of these cavities from the millimeter to the few-micron range, we observe at short lengths the reduction of the spectral linewidth predicted to occur for such a Fano cavity as compared to a conventional broadband mirror cavity with the same length and internal losses. Such narrow linewidth and small modevolume microcavities with high-mechanical quality ultrathin mirrors will be attractive for a wide range of applications within optomechanics and sensing.

Millimeter-scale ultrathin suspended metasurface integrated high-finesse optomechanical cavity

A typical optomechanical system is a cavity with one movable mirror and one fixed mirror. However, this configuration has been considered incapable of integrating sensitive mechanical elements while maintaining high cavity finesse. Although the membrane-in-the-middle solution seems to be able to overcome this contradiction, it introduces additional components that will lead to unexpected insertion loss, resulting in reduced cavity quality. Here we propose a Fabry-Perot optomechanical cavity composed of an ultrathin suspended Si₃N₄ metasurface and a fixed Bragg grating mirror, with a measured finesse up to 1100. Transmission loss of this cavity is very low as the reflectivity of this suspended metasurface tends to unity around 1550 nm. Meanwhile, the metasurface has a millimeter-scale transverse dimension and a thickness of only 110 nm, which guarantees a sensitive mechanical response and low cavity diffraction loss. Our metasurface-based high-finesse optomechanical cavity has a compact structure, which facilitates the development of quantum and integrated optomechanical devices.

Polarization-independent optical spatial differentiation with a doubly-resonant one-dimensional guided-mode grating

We report on the design and experimental characterization of a suspended silicon nitride subwavelength grating possessing a polarization-independent guided-mode resonance at oblique incidence. At this resonant wavelength we observe that the transverse intensity profile of the transmitted beam is consistent with a first-order spatial differentiation of the incident beam profile in the direction of the grating periodicity, regardless of the incident light polarization. These observations are corroborated by full numerical simulations. The simple one-dimensional and symmetric design, combined with the thinness and excellent mechanical properties of these essentially loss-free dieletric films, is attractive for applications in optical processing, sensing and optomechanics.

Collimation and finite-size effects in suspended resonant guided-mode gratings

The optical transmission of resonant guided-mode gratings patterned on suspended silicon nitride thin films and illuminated at normal incidence with a Gaussian beam is investigated both experimentally and theoretically. Effects due to the beam focusing and its finite size are accounted for by a phenomenological coupled-mode model whose predictions are found to be in very good agreement with the experimentally measured spectra for various grating structures and beam sizes, and which allow for a detailed analysis of the respective magnitude of these effects. These results are highly relevant for the design and optimization of such suspended structured films that are widely used for photonics, sensing, and optomechanics applications.

Optical spatial differentiation with suspended subwavelength gratings

We investigate first- and second-order spatial differentiation of an optical beam transverse profile using guided-mode resonances in thin, suspended subwavelength gratings. Highly reflective one-dimensional gratings are patterned on freestanding 200 nm-thick silicon nitride membranes using Electron Beam Lithography and plasma etching. The optical transmission of these gratings, designed for illumination with either TM or TE polarized light, are experimentally measured under normal and oblique incidence and found to be in excellent agreement with the predictions of an analytical coupled-mode model as well as Rigorous Coupled Wave Analysis numerical simulations. Intensity profiles consistent with high quality first- and second-order spatial differentiation of a Gaussian beam are observed in transmission at oblique and normal incidence, respectively. Such easy-to-fabricate, ultrathin and loss-free optical components may be attractive for beam shaping and optical information processing and computing.

Stress-Controlled Frequency Tuning and Parametric Amplification of the Vibrations of Coupled Nanomembranes

Noninvasive tuning of the mechanical resonance frequencies of suspended parallel nanomembranes in various monolithic arrays is achieved by piezoelectric control of their tensile stress. Parametric amplification of their thermal fluctuations is shown to be enhanced by the piezoelectric actuation and amplification factors of up to 20 dB in the sub-parametric oscillation threshold regime are observed.

Flexure-tuned membrane-at-the-edge optomechanical system

We introduce a passively-aligned, flexure-tuned cavity optomechanical system in which a membrane is positioned microns from one end mirror of a Fabry-Perot optical cavity. By displacing the membrane through gentle flexure of its silicon supporting frame (i.e., to ∼80 m radius of curvature (ROC)), we gain access to the full range of available optomechanical couplings, finding also that the optical spectrum exhibits none of the abrupt discontinuities normally found in "membrane-in-the-middle" (MIM) systems. More aggressive flexure (3 m ROC) enables >15 μm membrane travel, milliradian tilt tuning, and a wavelength-scale (1.64 ± 0.78 μm) membrane-mirror separation. We also provide a complete set of analytical expressions for this system's leading-order dispersive and dissipative optomechanical couplings. Notably, this system can potentially generate orders of magnitude larger linear dissipative or quadratic dispersive strong coupling parameters than is possible with a MIM system. Additionally, it can generate the same purely quadratic dispersive coupling as a MIM system, but with significantly suppressed linear dissipative back-action (and force noise).

Integrated Optomechanical Arrays of Two High Reflectivity SiN Membranes

Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 μm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.

Microcavities with suspended subwavelength structured mirrors

We investigate the optical properties of microcavities with suspended subwavelength structured mirrors, such as high-contrast gratings or two-dimensional photonic crystals slabs, and focus in particular on the regime in which the microcavity free-spectral range is larger than the width of a Fano resonance of the highly reflecting structured mirror. In this unusual regime, the transmission spectrum of the microcavity essentially consists in a single mode, whose linewidth can be significantly narrower than both the Fano resonance linewidth and the linewidth of an equally short cavity without structured mirror. This generic interference effect-occuring in any Fabry-Perot resonator with a strongly wavelength-dependent mirror-can be exploited for realizing small modevolume and high quality factor microcavities and, if high mechanical quality suspended structured thin films are used, for optomechanics and optical sensing applications.