Tilted subwavelength gratings: controlling anisotropy in metamaterial nanophotonic waveguides

Broadband integrated polarization splitter and rotator using subwavelength grating claddings

We present a broadband integrated photonic polarization splitter and rotator (PSR) using adiabatically tapered coupled waveguides with subwavelength grating (SWG) claddings. The PSR adiabatically rotates and splits the fundamental transverse-magnetic (TM₀) input to the fundamental transverse-electric (TE₀) mode in the coupler waveguide, while passing the TE₀ input through the same waveguide. The SWGs work as an anisotropic metamaterial and facilitate modal conversions, making the PSR efficient and broadband. We rigorously present our design approaches in each section and show the SWG effect by comparing with and without the SWG claddings. The coupling coefficients in each segment explicitly show a stronger coupling effect when the SWGs are included, confirmed by the coupled-mode theory simulations. The full numerical simulation shows that the SWG-PSR operates at 1500-1750 nm (≈250 nm) wavelengths with an extinction ratio larger than 20 dB, confirmed by the experiment for the 1490-1590 nm range. The insertion losses are below 1.3 dB. Since our PSR is designed based on adiabatical mode evolution, the proposed PSR is expected to be tolerant to fabrication variations and should be broadly applicable to polarization management in photonic integrated circuits.

Optimization of bulk sensitivity for strip, slot, and subwavelength grating-based waveguides for dual-polarization operation

We propose a dual-polarization optimization method for the bulk sensitivity of silicon-on-insulator (SOI) waveguides by defining a multi-objective function that accounts for the substrate leakage losses. The proposed optimization method was used to design micro-ring resonator bulk sensors with strip, slot, subwavelength grating, and subwavelength grating slot waveguides. The subwavelength grating slot waveguide has a bulk sensitivity of 520 nm/RIU and 325 nm/RIU for the TE and TM modes, respectively, both of which are higher than the bulk sensitivities of strip, slot, and subwavelength grating waveguides. Moreover, our Monte Carlo analysis shows that the subwavelength grating slot waveguide has the highest immunity to fabrication errors.

Polarization independent Bragg gratings using tilted subwavelength grating waveguide Bragg gratings

We propose and experimentally demonstrate a polarization independent subwavelength grating (SWG) waveguide Bragg grating (WBG) by using an SWG waveguide with tilted segments. By optimizing the tilting angle and other geometry parameters, such as the width and the length of the loading segments used to create the BG, we can obtain a zero birefringence tilted SWG waveguide and consequently, a polarization independent SWG WBG. In our simulations, the optimal tilting angle is ∼ 58°, whereas the optimal angle obtained in fabrication is ∼ 46°. This deviation is mainly due to fabrication errors, e.g., on the sidewall angle of the silicon segments. For the optimal tilting angle of 46°, the characterized Bragg wavelengths of the TE and TM modes are both ∼ 1517 nm. We believe that the proposed device can have applications in optical communications and interconnections.

Broadband and low-loss TM-pass polarizer using tilted subwavelength structures

Photonic systems built on the Silicon-on-Insulator platform exhibit a strong birefringence, and must thus be operated with a single polarization for most applications. Hence, on-chip polarizers that can effectively suppress an undesired polarization state are key components for these systems. Polarizers that extinguish TE polarized light while letting TM polarized light pass with low losses are particularly challenging to design for the standard 220 nm Silicon-on-Insulator platform, because the modal confinement is stronger for TE polarization than for TM polarzation. Here, we propose and design a broadband, low loss and high extinction ratio TM-pass polarizer by engineering a Bragg grating that reflects the fundamental TE mode into the first order TE mode using a subwavelength metamaterial which at the same time allows the TM mode to pass. Our device achieves an extinction ratio in excess of 20 dB, insertion losses below 0.5 dB and back-reflections of the fundamental TE mode of the order of -20 dB in a bandwidth of 150 nm as demonstrated with full 3D-FDTD simulations.

Ultracompact Polarization Splitter-Rotator Based on Shallowly Etched Subwavelength Gratings and Anisotropic Metasurfaces

Polarization splitter-rotators (PSRs) are an essential component in on-chip polarization-sensitive and polarization-division multiplexing systems. In this work, we propose an ultracompact and high-performance silicon-based polarization splitter-rotator utilizing anisotropic metasurfaces, which is the first to combine the two, to our knowledge. The tilted periodic metasurface structure has different modulation effects on different polarized light fields, such as the transverse-electric (TE) mode and the transverse-magnetic (TM) mode, which are beneficial for designing polarization management devices. According to the results, the entire length of the silicon PSR was ~13.5 μm. The TE-to-TM conversion loss and polarization conversion ratio ere -0.154 dB and 96.5% at 1.55 μm, respectively. In the meanwhile, the cross talk and reflection loss were -27.0 dB and -37.3 dB, when the fundamental TE mode was input. The insertion loss and cross talk were -0.19 dB and -25.01 dB at the central wavelength when the fundamental TM mode was input. In addition, the bandwidth reached up to ~112 nm with polarization conversion loss and insertion loss higher than -0.46 dB and -0.36 dB. The simulations also show that the designed devices had good fabrication tolerance.

Efficient mode converters and filters using asymmetrical directional couplers with subwavelength gratings

Mode-division multiplexing (MDM) is a promising solution to improve data transmission capacity for future optical interconnect networks. Mode converters and mode filters play a key role in on-chip MDM systems. Here, we propose and experimentally demonstrate a device, enabling mode conversion and filtering simultaneously, which is composed of asymmetrical directional couplers with subwavelength gratings, in a small footprint of 14.7 µm × 1.42 µm. The device can realize optical mode conversion between the first-order transverse electric (TE) mode and the fundamental TE mode, and can also filter the fundamental TE mode efficiently. The conversion efficiency is over 95%, with a broad 1 dB bandwidth over 80 nm and a high mode extinction ratio of >29 dB. As a mode filter, strong mode elimination of >30 dB is achieved.

Mid-infrared silicon-on-insulator waveguides with single-mode propagation over an octave of frequency

Increasing the working optical bandwidth of a photonic circuit is important for many applications, in particular chemical sensing at mid-infrared wavelengths. This useful bandwidth is not only limited by the transparency range of waveguide materials, but also the range over which a waveguide is single or multimoded for predictable circuit behaviour. In this work, we show the first experimental demonstration of "endlessly single-mode" waveguiding in silicon photonics. Silicon-on-insulator waveguides were designed, fabricated and characterised at 1.95 µm and 3.80 µm. The waveguides were shown to support low-loss propagation (1.46 ± 0.13 dB/cm loss at 1.95 µm and 1.55 ± 0.35 dB/cm at 3.80 µm) and single-mode propagation was confirmed at 1.95 µm, meaning that only the fundamental mode was present over the wavelength range 1.95 - 3.80 µm. We also present the prospects for the use of these waveguides in sensing applications.

Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics

An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.

Silicon subwavelength grating waveguides with high-index chalcogenide glass cladding

Silicon subwavelength grating waveguides enable flexible design in integrated photonics through nano-scale refractive index engineering. Here, we explore the possibility of combining silicon subwavelength gratings waveguides with a high-index chalcogenide glass as a top cladding, thus modifying the waveguiding behavior and opening a new design axis for these structures. A detailed investigation of the heterogeneous SWG waveguide with high-index cladding is presented based on analytical and numerical simulations. We design, fabricate and characterize silicon subwavelength grating waveguide microring resonators with an As₂₀S₈₀ cladding. Thanks to As₂₀S₈₀ negative thermo-optic coefficient, we achieve near athermal behavior with a measured minimum thermally induced resonance shift of -1.54 pm/K, highlighting the potential of subwavelength grating waveguides for modal confinement engineering and to control light-matter interaction. We also show that the chalcogenide glass can be thermally reflowed to remove air gaps inside the cladding, resulting in a highly conformal structure. These types of waveguides can find application in reconfigurable photonics, nonlinear optics, metamaterials or slow light.

High-efficiency conversion from waveguide mode to an on-chip beam using a metamaterial engineered Bragg deflector

Diffraction gratings that redirect light propagating in a channel waveguide to an on-chip slab are emerging as important building blocks in integrated photonics. Such distributed Bragg deflectors enable precise shaping of slab confined beams for a variety of applications, including wavelength multiplexing, optical phased array feeding, and coupling interfaces for on-chip point-to-point communications. However, these deflectors suffer from significant losses caused by off-chip radiation. In this Letter, we show, for the first time, to the best of our knowledge, that off-chip radiation can be dramatically reduced by using the single-beam phase matching condition and subwavelength metamaterial refractive index engineering. We present a deflector design with losses below 0.3 dB, opening a path toward new applications of distributed Bragg deflectors in integrated photonics.

Meta-grating outcouplers for optimized beam shaping in the visible

Accurate coupling between optical modes at the interface between photonic chips and free space is required for the development of many on-chip devices. This control is critical in quantum technologies where large-diameter beams with designed mode profiles are required. Yet, these designs are often difficult to achieve at shorter wavelengths where fabrication limits the resolution of designed devices. In this work we demonstrate optimized outcoupling of free-space beams at 461 nm using a meta-grating approach that achieves a 16 dB improvement in the apodized outcoupling strength. We design and fabricate devices, demonstrating accurate reproduction of beams with widths greater than 100 µm.

Broadband and compact polarization beam splitter in LNOI hetero-anisotropic metamaterials

In this paper, theoretical modeling and numerical simulations of a high-performance polarization beam splitter (PBS) based on hetero-anisotropic metamaterials are proposed on the lithium-niobate-on-insulator (LNOI) platform. The hetero-anisotropic metamaterials constructed by sub-wavelength gratings (SWGs) can be regarded as effective anisotropy medium, which exhibits strong birefringence without breaking the geometrical symmetry, contributing to the formation of PBS. Rather than the principle of PBS based on beat-length difference of transverse electric (TE) polarization and transverse magnetic (TM) polarization, the device can realize polarization beam splitting in single beat length, and the footprint of the proposed PBS can be reduced to 8 µm × 160 µm (with S-bend). The simulation results show that the bandwidth is 185 nm (1450∼1634 nm) for TE polarization while the bandwidth is 85 nm (1490∼1575 nm) for TM polarization when the polarization extinction ratio is >20 dB. Furthermore, the insertion loss is less than 1 dB in the range of 1450 to 1650 nm, for both TE and TM polarization. Additionally, the proposed device proves strong robustness of the fabrication tolerance.

Polarization-dependent tuning of Bragg reflection enabled through tilted subwavelength grating waveguide Bragg gratings

We propose and demonstrate experimentally tilted subwavelength grating (SWG) waveguide Bragg gratings (WBGs). By tilting the SWG segments and optimizing the duty cycle, we can achieve polarization-dependent tuning of the spectral response of the SWG WBG, namely, the spectral response of the fundamental transverse electric (TE) mode shifts toward shorter wavelengths, while that for the transverse magnetic (TM) mode remains almost unchanged. In particular, for tilting angles of 5° and 30°, we can obtain a blueshift in the Bragg wavelength of 7 and 35 nm for the TE mode, while the Bragg wavelength for the TM mode remains within 0.5 nm. The proposed tilted SWG WBGs provide a novel method to manage polarization and/or obtain polarization-dependent wavelength selectivity with integrated WBG devices.

Broadband and high-extinction-ratio polarization beam splitter on tilted subwavelength gratings waveguides

A compact asymmetrical directional coupler (ADC), which is composed of a strip and a tilted subwavelength gratings (TSWG) waveguide, is proposed to realize a broadband and high-extinction-ratio polarization beam splitter (PBS). In addition to conventional SWG structural parameters, such as its period and duty cycle, a TSWG waveguide provides an extra degree of freedom to solely adjust the TE modal effective index for more accurate phase matching. Hence the TE polarization state is coupled more efficiently in the ADC system, and then the extinction ratio (ER) is consequently improved. The simulation of our proposed device demonstrated a higher coupling efficiency and an ultrahigh ER of 34.2 dB for the TM polarization state at the center wavelength around 1550 nm. The operating bandwidth of the TM polarization state defined as the spectral range, with ER higher than 20 dB, is determined to be as broad as 75 nm. And, with an assisted hybrid plasmonic waveguide at the end of the cross port, the achieved bandwidth of the TE polarization state is as broad as 133 nm. They are much broader than those of other DC/ADC implemented PBS devices. Moreover, further analysis shows that the tilting angle of the TSWG waveguide has much higher fabrication tolerance than changing SWG duty cycle.

Polarization splitting directional coupler using tilted subwavelength gratings

On-chip polarization splitters are key elements for coherent optical communication systems and polarization diversity circuits. These devices are often implemented with directional couplers that are symmetric for one polarization and strongly asymmetric for the other polarization. To achieve this asymmetry, highly dissimilar waveguides are used in each coupler arm, often requiring additional material layers or etch steps. Here we demonstrate polarization splitting with a directional coupler composed of two fully etched subwavelength waveguides, differing only in the tilt angle of the silicon segments. Our device exhibits deep-UV compatible feature sizes, is 14 µm long, and covers a 72 nm bandwidth with insertion losses below 1 dB and an extinction ratio in excess of 15 dB.

Experimental demonstration of metamaterial anisotropy engineering for broadband on-chip polarization beam splitting

Subwavelength metamaterials exhibit a strong anisotropy that can be leveraged to implement high-performance polarization handling devices in silicon-on-insulator. Whereas these devices benefit from single-etch step fabrication, many of them require small feature sizes or specialized cladding materials. The anisotropic response of subwavelength metamaterials can be further engineered by tilting its constituent elements away from the optical axis, providing an additional degree of freedom in the design. In this work, we demonstrate this feature through the design, fabrication and experimental characterization of a robust multimode interference polarization beam splitter based on tilted subwavelength gratings. A 110-nm minimum feature size and a standard silicon dioxide cladding are maintained. The resulting device exhibits insertion loss as low as 1 dB, an extinction ratio better than 13 dB in a 120-nm bandwidth, and robust tolerances to fabrication deviations.

Nonuniform depolarization properties of typical nanostructures and potential applications

Nonuniform depolarization properties of ${\text{SiO}_2}$SiO₂ thin film, two-dimensional (2D) Si grating, and three-dimensional Si cylinder grating, were systematically investigated by Lu-Chipman decomposition. We find that introducing surface profiles with dimensions comparable to the detecting wavelengths can lead to obvious nonuniform depolarization, and control of the sample azimuth can manipulate the uniformity of the depolarizer components. The results indicate that the 2D nanostructure shows obvious nonuniform depolarization at 0° and 90° azimuths, while almost uniform depolarization at 45° azimuth. These discovered phenomena may give rise to some potential applications, such as the detection of the existence of nanostructures without a priori information about the sample, and the design of a uniform or nonuniform depolarizer.

Ultra-broadband silicon photonics devices based on subwavelength metamaterials -INVITED

Subwavelength structured waveguides provide tailorable optical properties that can be leveraged to overcome bandwidth limitations in a wide range of photonic devices. In this invited talk, we present an overview of recent developments on subwavelength engineered building blocks, including phase shifters, mode multiplexers, polarization beam splitters and zero-birefringence waveguides.

Experimental study of subwavelength grating bimodal waveguides as ultrasensitive interferometric sensors

Over the recent years, subwavelength grating (SWG) structures have increasingly attracted attention in the area of evanescent-field photonic sensors. In this Letter, for the first time to the best of our knowledge, we demonstrate experimentally the real-time refractive index (RI) sensing using the SWG bimodal interferometric structures. Two different configurations are considered to compare the effect of the nonlinear phase shift, obtained between the two first transverse electromagnetic propagating modes, in the measured bulk sensitivity. Very high experimental values up to 2270 nm/RIU are reached, which perfectly match the numerical simulations and significantly enhance other existing SWG and spectral-based sensors. By measuring the spectral shift, the obtained experimental sensitivity does not depend on the sensor length. As a result, a highly sensitive and compact single-channel interferometer is experimentally validated for refractive index sensing, thus opening new paths in the field of optical integrated sensors.

Single-channel bimodal interferometric sensor using subwavelength structures

A novel configuration of photonic sensors based on a single-channel bimodal interferometer is proposed. The design consists of a subwavelength grating (SWG) periodic structure supporting two dispersive TE-like modes that interfere at the output to create fringes in the transmission spectrum. Dispersion relations of the bimodal periodic structures have been computed in order to study the sensing performance, obtaining a theoretical bulk sensitivity of ~1300nm/RIU and a surface sensitivity of ~6.1nm/nm. Finite-Difference Time Domain (FDTD) analysis has been also carried out in order to confirm the previously obtained sensitivity results, thus showing a perfect agreement between theoretical modelling and simulation.