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Zhang C, Chen L, Lin Z, Song J, Wang D, Li M, Koksal O, Wang Z, Spektor G, Carlson D, Lezec HJ, Zhu W, Papp S, Agrawal A. Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region. LIGHT, SCIENCE & APPLICATIONS 2024; 13:23. [PMID: 38246925 PMCID: PMC10800353 DOI: 10.1038/s41377-023-01330-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/07/2023] [Revised: 10/22/2023] [Accepted: 11/06/2023] [Indexed: 01/23/2024]
Abstract
Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.
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Affiliation(s)
- Cheng Zhang
- School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei, 430074, China.
| | - Lu Chen
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
- University of Maryland, College Park, MD, 20742, USA
| | - Zhelin Lin
- School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei, 430074, China
| | - Junyeob Song
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
| | - Danyan Wang
- School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei, 430074, China
| | - Moxin Li
- School of Optical and Electronic Information & Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei, 430074, China
| | - Okan Koksal
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
| | - Zi Wang
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
- University of Maryland, College Park, MD, 20742, USA
| | - Grisha Spektor
- National Institute of Standards and Technology, Boulder, CO, 80305, USA
| | - David Carlson
- National Institute of Standards and Technology, Boulder, CO, 80305, USA
| | - Henri J Lezec
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
| | - Wenqi Zhu
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
- University of Maryland, College Park, MD, 20742, USA
| | - Scott Papp
- National Institute of Standards and Technology, Boulder, CO, 80305, USA
| | - Amit Agrawal
- National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA.
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Mao Y, Zhao D, Yan S, Zhang H, Li J, Han K, Xu X, Guo C, Yang L, Zhang C, Huang K, Chen Y. A vacuum ultraviolet laser with a submicrometer spot for spatially resolved photoemission spectroscopy. LIGHT, SCIENCE & APPLICATIONS 2021; 10:22. [PMID: 33479192 PMCID: PMC7820001 DOI: 10.1038/s41377-021-00463-3] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/10/2020] [Revised: 12/25/2020] [Accepted: 12/31/2020] [Indexed: 05/25/2023]
Abstract
Vacuum ultraviolet (VUV) lasers have demonstrated great potential as the light source for various spectroscopies, which, if they can be focused into a small beam spot, will not only allow investigation of mesoscopic materials and structures but also find application in the manufacture of nano-objects with excellent precision. In this work, we report the construction of a 177 nm VUV laser that can achieve a record-small (~0.76 μm) focal spot at a long focal length (~45 mm) by using a flat lens without spherical aberration. The size of the beam spot of this VUV laser was tested using a metal grating and exfoliated graphene flakes, and we demonstrated its application in a fluorescence spectroscopy study on pure and Tm3+-doped NaYF4 microcrystals, revealing a new emission band that cannot be observed in the traditional up-conversion process. In addition, this laser system would be an ideal light source for spatially and angle-resolved photoemission spectroscopy.
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Affiliation(s)
- Yuanhao Mao
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Dong Zhao
- Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui, 230026, China
| | - Shen Yan
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Hongjia Zhang
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Juan Li
- Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui, 230026, China
| | - Kai Han
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Xiaojun Xu
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Chuan Guo
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China
| | - Lexian Yang
- State Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing, 100084, China
| | - Chaofan Zhang
- College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan, 410073, China.
| | - Kun Huang
- Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui, 230026, China.
| | - Yulin Chen
- State Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing, 100084, China.
- Department of Physics, Clarendon Laboratory, University of Oxford, Oxford, UK.
- School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, China.
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Huang Y, Zhu J, Jin S, Wu M, Chen X, Wu W. Polarization-controlled bifunctional metasurface for structural color printing and beam deflection. OPTICS LETTERS 2020; 45:1707-1710. [PMID: 32235979 DOI: 10.1364/ol.387408] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/13/2020] [Accepted: 02/07/2020] [Indexed: 06/11/2023]
Abstract
We propose a polarization-controlled bifunctional metasurface composed of arrayed trapezoidal nanoantennas. Under orthogonal-polarized incidence, different types of gap-surface plasmons are generated, regulating the intensity and phase, respectively. Thus, structural color printing and beam deflection functions are achieved on a miniaturized chip. The color printing function works from 400 to 800 nm, exhibiting a subwavelength-scale chromatic image with a broad gamut. The beam deflection function works from 360 to 540 nm, mapping light to the first diffraction order with the anomalous angle from 40.4° to 76.6°. The proposed bifunctional metasurface could serve as a key component in integrated optics systems and will find many other wide-ranging applications in optical and biological areas.
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