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For: Nguyen TD, Carl DA, Hess DW, Lieberman MA, Gronsky R. Structural and Interfacial Characteristics of thin (<10 nm) SiO2 Films Grown by Electron Cyclotron Resonance Plasma Oxidation on [100] Si Substrates. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-223-75] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

For:	Nguyen TD, Carl DA, Hess DW, Lieberman MA, Gronsky R. Structural and Interfacial Characteristics of thin (<10 nm) SiO2 Films Grown by Electron Cyclotron Resonance Plasma Oxidation on [100] Si Substrates. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-223-75] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

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(The first 100,000 artilces are displayed in RCA.)