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For: Ravet MF, Gicquel A, Anger E, Wang ZZ, Chen Y, Rousseaux F. Realization Of X-Ray Lithography Masks Based On Diamond Membranes. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-306-103] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
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