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For: Lee KH, Moon BY, Chung YC, Lee SM, Kim SC, Kim D, Jang J. Effect of Ion Doping Temperature on Electrical Properties of APCVD A-Si. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-345-35] [Citation(s) in RCA: 27] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
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