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For: Liu S, Solomon P, Carpio R, Fowler B, Simmons D, Wang J, Wise R, Imper G, Riley N, Moslehi M, Ravindra N. Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-389-269] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

For:	Liu S, Solomon P, Carpio R, Fowler B, Simmons D, Wang J, Wise R, Imper G, Riley N, Moslehi M, Ravindra N. Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-389-269] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]

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(The first 100,000 artilces are displayed in RCA.)