Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.

Development of MEMS Tactile Sensation Device for Haptic Robot

A tactile sensation device using micro-electromechanical system (MEMS) has been developed. This device is integrated with a haptic sensation robot for use as fingers. The tactile device must be miniaturized to enable attachment of the actuator mechanism to the fingers. Therefore, we used MEMS technology for this device. The device is composed of an interface part fabricated by 3D printing, pins, and MEMS cantilever-type actuators. It has the ability to stimulate the mechanoreceptors of the fingertips. The device and robot can display not only high-resolution images of the fingertips but also the repulsion force during finger operations such as tool holding and rotation. We have not yet achieved the final device because of fabrication problems. In this paper, we explain the details, progress of development, and results of trials on the prototype device.