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Number Cited by Other Article(s)
1
Yao L, Watkins JJ. Photoinduced disorder in strongly segregated block copolymer composite films for hierarchical pattern formation. ACS NANO 2013;7:1513-1523. [PMID: 23305531 DOI: 10.1021/nn3052956] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
2
Takemoto I, Fuji Y, Yoshida I, Hashimoto K, Miyagawa T, Yamaguchi S, Takahashi K, Konishi S, Lee Y. Tailored Glass Transition of ArF Resists for Resolution Enhancement at sub-50nm node. J PHOTOPOLYM SCI TEC 2005. [DOI: 10.2494/photopolymer.18.399] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
3
Brainard RL, Cobb J, Cutler CA. Current Status of EUV Photoresists. J PHOTOPOLYM SCI TEC 2003. [DOI: 10.2494/photopolymer.16.401] [Citation(s) in RCA: 35] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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