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Zhao K, Zhao J, Wei X, Guan X, Deng C, Dai B, Zhu J. Bottom-Up Cu Filling of High-Aspect-Ratio through-Diamond vias for 3D Integration in Thermal Management. MICROMACHINES 2023; 14:290. [PMID: 36837990 PMCID: PMC9967922 DOI: 10.3390/mi14020290] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/19/2022] [Revised: 01/18/2023] [Accepted: 01/19/2023] [Indexed: 06/18/2023]
Abstract
Three-dimensional integrated packaging with through-silicon vias (TSV) can meet the requirements of high-speed computation, high-density storage, low power consumption, and compactness. However, higher power density increases heat dissipation problems, such as severe internal heat storage and prominent local hot spots. Among bulk materials, diamond has the highest thermal conductivity (≥2000 W/mK), thereby prompting its application in high-power semiconductor devices for heat dissipation. In this paper, we report an innovative bottom-up Cu electroplating technique with a high-aspect-ratio (10:1) through-diamond vias (TDV). The TDV structure was fabricated by laser processing. The electrolyte wettability of the diamond and metallization surface was improved by Ar/O plasma treatment. Finally, a Cu-filled high-aspect-ratio TDV was realized based on the bottom-up Cu electroplating process at a current density of 0.3 ASD. The average single-via resistance was ≤50 mΩ, which demonstrates the promising application of the fabricated TDV in the thermal management of advanced packaging systems.
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Affiliation(s)
- Kechen Zhao
- National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
| | - Jiwen Zhao
- National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
| | - Xiaoyun Wei
- Huawei Technologies Co., Ltd., Dongguan 523799, China
| | - Xiaoyu Guan
- National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
| | - Chaojun Deng
- Huawei Technologies Co., Ltd., Dongguan 523799, China
| | - Bing Dai
- National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
| | - Jiaqi Zhu
- National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
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Yung KL, Xu Y, Tian W, Ko SM, Foster JA. Light absorption and hydrophobicity of a polystyrene/multiwall carbon nanotube composite with surface nanostructures. NANOTECHNOLOGY 2021; 32:385302. [PMID: 34144541 DOI: 10.1088/1361-6528/ac0cb2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/02/2021] [Accepted: 06/17/2021] [Indexed: 06/12/2023]
Abstract
This paper describes an investigation into how combined carbon nanotube doping and surface nanostructuring affects the surface properties of polystyrene. Multiwall carbon nanotubes (MWCNTs) have unique anisotropic electrical properties that can be utilized for light absorption, electromagnetic shielding and nanoscale electostatic forces. Polystyrene was doped with 5 wt% MWCNTs and the resulting composite was wetted onto a porous anodic alumina template to form a nanostructure surface of nanotubes. Scanning electron microscopy revealed a hierarchical surface structure with the composite nanotubes bundled together as the MWCNTs increased the attractive forces between the composite nanotubes. Water droplet testing revealed that this hierarchical surface structure was superhydrophobic. Though the presence of the MWCNTs caused a direct increase in absorption, the hierarchical surface structure increased reflection. The addition of 5 wt% of the anionic surfactant Sodium Dodecyl Benzene Sulfonate to ensure MWCNT dispersal did not significantly change hydrophobicity or light absorption despite the hierarchical surface structure becoming finer. The created composite has potential use as a surface layer on an organic surface cell as it provides reduced cleaning needs and electrical disturbance but further work is required to reduce the reflection.
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Affiliation(s)
- Kai-Leung Yung
- Department of Industrial and Systems Engineering, Faculty of engineering, The Hong Kong Polytechnic University, Hong Kong S.A.R, People's Republic of China
| | - Yan Xu
- Department of Industrial and Systems Engineering, Faculty of engineering, The Hong Kong Polytechnic University, Hong Kong S.A.R, People's Republic of China
| | - Wei Tian
- Department of Applied Chemistry, School of Science, Northwestern Polytechnical University, Xi'an, People's Republic of China
| | - Sui Man Ko
- Department of Industrial and Systems Engineering, Faculty of engineering, The Hong Kong Polytechnic University, Hong Kong S.A.R, People's Republic of China
| | - James Abbott Foster
- Department of Industrial and Systems Engineering, Faculty of engineering, The Hong Kong Polytechnic University, Hong Kong S.A.R, People's Republic of China
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Xu W, Yi P, Gao J, Deng Y, Peng L, Lai X. Large-Area Stable Superhydrophobic Poly(dimethylsiloxane) Films Fabricated by Thermal Curing via a Chemically Etched Template. ACS APPLIED MATERIALS & INTERFACES 2020; 12:3042-3050. [PMID: 31860263 DOI: 10.1021/acsami.9b19677] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Inspired by nature, large-area stable superhydrophobic poly(dimethylsiloxane) (PDMS) films have generated extensive interest for various applications such as self-cleaning, corrosion protection, liquid transport, optical services, and flexible electronics. However, the current methods used to prepare such films are difficult to apply for efficient large-area fabrication. In this article, an effective technique for fabricating low adhesive superhydrophobic films based on the use of a chemically etched template followed by a thermal curing process is introduced. On the basis of this approach, the importance of chemical solution concentration as well as etching time is discussed to outline the specific rules required for forming different surface topographies of the templates. Then, PDMS films with varying wettabilities can be fabricated in which one can achieve CA > 160° and SA < 10°. Finally, for engineering needs and actual preparation, large-area PDMS films are obtained via a roll-to-roll (R2R) process, which show a superhydrophobic property even after high-intensity friction and have excellent acid and alkaline resistance, UV resistance, and optical transparency. The prepared large-area stable superhydrophobic PDMS films have the potential to be used in the aerospace field in the future because of their excellent anti-icing performance.
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Affiliation(s)
- Weitian Xu
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
| | - Peiyun Yi
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
| | - Jie Gao
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
| | - Yujun Deng
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
| | - Linfa Peng
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
| | - Xinmin Lai
- State Key Laboratory of Mechanical System and Vibration and Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures , Shanghai Jiao Tong University , Shanghai 200240 , P. R. China
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Labonté V, Marion A, Virgilio N, Tavares JR. Gas-Phase Surface Engineering of Polystyrene Beads Used to Challenge Automated Particle Inspection Systems. Ind Eng Chem Res 2016. [DOI: 10.1021/acs.iecr.6b01573] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Vickie Labonté
- CREPEC, Department of Chemical
Engineering, Polytechnique Montreal, P.O. Box 6079, stat. Centre-Ville, Montréal (Quebec) H3C 3A7, Canada
| | - Antoine Marion
- CREPEC, Department of Chemical
Engineering, Polytechnique Montreal, P.O. Box 6079, stat. Centre-Ville, Montréal (Quebec) H3C 3A7, Canada
| | - Nick Virgilio
- CREPEC, Department of Chemical
Engineering, Polytechnique Montreal, P.O. Box 6079, stat. Centre-Ville, Montréal (Quebec) H3C 3A7, Canada
| | - Jason R. Tavares
- CREPEC, Department of Chemical
Engineering, Polytechnique Montreal, P.O. Box 6079, stat. Centre-Ville, Montréal (Quebec) H3C 3A7, Canada
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Palacios M, García O, Rodríguez-Hernández J. Constructing robust and functional micropatterns on polystyrene surfaces by using deep UV irradiation. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2013; 29:2756-2763. [PMID: 23363393 DOI: 10.1021/la304931x] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
We report the preparation of different surface patterns based on the photo-cross-linking/degradation kinetics of polystyrene (PS) by using UV light. Upon exposure to UV light, PS can be initially cross-linked, whereas an excess of the exposure time or intensity provokes the degradation of the material. Typically photolithography employs either positive or negative photoresist layers that upon removal of either the exposed or the nonexposed areas transfer the pattern of the mask. Herein, we present a system that can be both negative and positive depending on several aspects, including the irradiation time, intensity, or presence of absorbing active species (photoinitiators) using a general setup. As a result of the optimization of the time of exposure and the use of an appropriate cover or the incorporation of an appropriate amount of photoinitiator (in this particular case IRG 651), different tailor-made surface patterns can be obtained. Moreover, changes of the chemical composition of the polystyrene using, for instance, block copolymers can lead to surface patterns with variable functional groups. In this study we describe the formation of surface patterns using polystyrene-block-poly(2,3,4,5,6-pentafluorostyrene) block copolymers. The introduction of fluorinated moieties clearly modifies the wettability of the films when compared with that of the same structures obtained with PS. As a consequence we present herein a patterning methodology that can simultaneously vary not only the morphology but also the surface chemical composition.
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Affiliation(s)
- Marta Palacios
- Department of Chemistry and Properties of Polymers, Instituto de Ciencia y Tecnología de Polímeros (ICTP-CSIC), Juan de la Cierva 3, 28006 Madrid, Spain
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Huang LB, Xu Y, Yung KL, Chen W, Xie Y, Kong J. Varying the wetting properties of polycarbonate substrate by varying the nanomolding temperature. POLYM ENG SCI 2012. [DOI: 10.1002/pen.23173] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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