Much concern but little research on semiconductor occupational health issues

Lymphohematopoietic cancer mortality among Korean semiconductor manufacturing workers

BACKGROUND

We aimed to examine the lymphohematopoietic cancer mortality in a cohort of workers at a semiconductor manufacturing company in South Korea according to their jobs.

METHODS

A retrospective cohort was constructed using the personnel records of semiconductor manufacturing workers who were employed in a semiconductor company in South Korea in 1998-2012. Data on their vital status and causes of death were obtained from the National Statistical Office of South Korea. The standardized mortality ratios (SMRs) of lymphohematopoietic cancer were calculated.

RESULTS

A total of 288 deaths were reported, of which 22 were caused by lymphohematopoietic cancer, among 65,782 workers in 878,325 person-years. The SMRs for lymphohematopoietic cancer were 0.78 (95% confidence interval [CI] = 0.39-1.40; the number of observed cases [Obs] = 11) among male workers and 1.71 (95% CI = 0.85-3.06; Obs = 11) among female workers. Among female operators, excess deaths due to lymphohematopoietic cancer (SMR = 2.59, 95% CI = 1.24-4.76) and leukemia (SMR = 2.92, 95% CI = 1.26-5.76) were observed. However, they were not observed among office workers, facility managers, utility managers, or process managers.

CONCLUSION

Female operators involved in the semiconductor wafer fabrication process had higher risk of mortality from lymphohematopoietic cancer.

Semiconductor Work, Leukemia, and Cancer Risk: A Systematic Review and Meta-Analysis

BACKGROUND

With the development of the semiconductor industry over the past 60 years, various occupational diseases have been reported to coincide with rapid industrial growth. Among these occupational diseases, the association between semiconductor work and cancers, including leukemia, remains controversial. Therefore, this systematic review and meta-analysis assesses the associations between semiconductor work, leukemia, and cancer risk.

METHODS

The core research databases, including PubMed, were screened for studies published until 31 July 2022. All eligible studies assessed cancer risk among workers in the semiconductor industry.

RESULTS

Nine studies were selected after a literature review. The employment period of semiconductor workers in each study was between 1965 and 2009. Semiconductor work was not significantly associated with the risk of leukemia (Relative Risk [RR], 1.02; 95% Confidence Interval [CI], 0.74-1.41) or cancer (RR, 1.00; 95% CI, 0.93-1.07).

CONCLUSION

In this meta-analysis, semiconductor work was not significantly associated with leukemia or cancer risk. Internal comparisons, such as non-fab workers, quality of the study, employment period, and healthy worker effect, should be considered for interpretation. Furthermore, a prospective cohort study based on overall semiconductor workers in the industry could be useful to assess occupational disease risk as a mandatory component of health assessment.

Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry

Background

Refractory ceramic fibers (RCFs) are a suspected carcinogen but have been widely used as insulations. Depending on the temperature, RCFs can transform into crystalline SiO₂, which is a carcinogen that can be present in the air during bulk RCF handling. This study analyzed the physicochemical and morphological characteristics of RCFs at high temperatures and determined the exposure levels during the semiconductor scrubber maintenance.

Methods

Sampling was conducted at a company that manufactures semiconductor scrubbers using RCFs as insulation. Bulk RCF samples were collected both before and after exposure to a scrubber temperature of 700°C. Airborne RCFs were collected during scrubber maintenance, and their characteristics were analyzed using microscopes.

Results

The components of bulk RCFs were SiO₂ and Al₂O₃, having an amorphous structure. Airborne RCFs were morphologically different from bulk RCFs in size, which could negatively affect maintenance workers’ health. 58% of airborne RCFs correspond to the size of thoracic and respirable fibers. RCFs did not crystallize at high temperatures. The exposure caused by airborne RCFs during the scrubber frame assembly and insulation replacement was higher than the occupational exposure limit.

Conclusion

Workers conducting insulation replacement are likely exposed to airborne RCFs above safe exposure limits. As RCFs are suspected carcinogens, this exposure should be minimized through prevention and precautionary procedures.

The effect of subcontractor status on occupational injury and disease incidence: a cross-sectional study using the 9th Occupational Safety and Health Company Survey

BACKGROUND

Despite the efforts of contractors to identify and reduce any occupational risk that exists in subcontracted works, if the associated risks cannot be eliminated and reduced and subcontractors have to take risks, this situation can be called 'risk transfer.' The hypothesis of this study is that the contractor-subcontractor status of a company affects the risk of occupational injury or occupational disease. The inside subcontractor and outside subcontractor represent subcontractors located inside and outside the contractor workplace, respectively.

METHODS

The dataset from the 9th Occupational Safety and Health Company Survey (OSHCS) with 5219 workplaces, which was conducted in South Korea, was used. After the exclusion of 45 workplaces with no reported employees, 5174 workplaces with a total of 1,072,583 employees were used for analysis. Poisson regression was applied with the contractor-subcontractor category as the independent variable and the number of both occupational injury and disease cases per workplace as the dependent variable. Poisson regression is an appropriate model for the count-data analysis of rare events that do not follow a normal distribution but rather follow a right-skewed distribution.

RESULTS

Compared to the 'contractor' category, the 'outside contractor' reported the highest risk ratio, 1.66 (95% Confidence Interval, CI 1.09-2.41). The 'inside contractor' reported the second highest risk ratio, 1.39 (95% CI 1.07-1.78). In contrast, the 'both contractor and subcontractor' category reported a statistically significant decreased risk ratio of 0.69 (95% CI 0.57-0.84). The 'neither contractor nor subcontractor' category showed a statistically equivocal risk ratio of 0.91 (95% CI 0.76-1.07).

CONCLUSION

This study confirmed the increased risk of occupational injuries and diseases for subcontractors, whether located inside or outside the contractor workplace (1.66-fold and 1.39-fold increased risk, respectively). Future individual-based epidemiologic studies such as case-control and cohort studies could provide more detailed information such as specific risk factors associated with subcontracted works and confounders according to industry classification.

Possibility of Benzene Exposure in Workers of a Semiconductor Industry Based on the Patent Resources, 1990-2010

BACKGROUND

This study aimed to assess the possibility of benzene exposure in workers of a Korean semiconductor manufacturing company by reviewing the issued patents.

METHODS

A systematic patent search was conducted with the Google "Advanced Patent Search" engine using the keywords "semiconductor" and "benzene" combined with all of the words accessed on January 24, 2016.

RESULTS

As a result of the search, we reviewed 75 patent documents filed by a Korean semiconductor manufacturing company from 1994 to 2010. From 22 patents, we found that benzene could have been used as one of the carbon sources in chemical vapor deposition for capacitor; as diamond-like carbon for solar cell, graphene formation, or etching for transition metal thin film; and as a solvent for dielectric film, silicon oxide layer, nanomaterials, photoresist, rise for immersion lithography, electrophotography, and quantum dot ink.

CONCLUSION

Considering the date of patent filing, it is possible that workers in the chemical vapor deposition, immersion lithography, and graphene formation processes could be exposed to benzene from 1996 to 2010.

Application of the adverse outcome pathway framework to predict the toxicity of chemicals in the semiconductor manufacturing industry

Background

To solve current issues using big data, solve current issues related to the semiconductor and electronics industry, I tried to establish the data for each toxicity mechanism for adverse outcome pathway (AOP) for the exposure.

Objective

I planned to increase the efficiency of human hazard assessment by searching, analyzing, and linking test data on the relationship between key events occurred at each level, which are the biological targets of chemicals in semiconductor manufacturing.

Results

It was found that 48 kinds of chemicals had 11 AOPs, while 103 chemicals had multiple AOPs, and 26 had case evidence. As a result of AOP analysis, it was found that a total of 320 chemicals had 42 AOPs, and 190 major chemicals corresponded to 11 AOPs. It was found necessary to develop a complex AOP and secure an (inhalation or dermal) exposure scenario for combined exposure at work. As a comparative search (41 out of 190 chemicals) of biomarkers specific to occupational diseases, 12 biomarkers were found to be related to breast cancer. The AOPs for 50 specific chemicals were presented, together with occupational disease-specific AOPs and key events relationship from 50 chemicals, and taxonomic classification for each AOP analysis could be found. With a comparative search, 41 out of 190 chemicals were associated with specific biomarkers for occupational diseases, and 12 mRNA or protein biomarkers were found to be related to breast cancer by cross-validation with the attached Table 24 of the Enforcement Regulations of the OSHAct and the CTD.

Conclusion

The mechanism of occupational diseases caused by chemicals was presented, together with pathological preventions. I believe that a strategy is needed to expand the target organization for each chemical by linking with activities, such as work environment measurement, and cooperating with screening items and methods suitable for toxic chemicals, like AOP tools.

Supplementary Information

The online version contains supplementary material available at 10.1007/s13273-021-00139-4.

Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry

Background

Research on the status of many chemicals used in the semiconductor industry is needed. The purpose of this study was to describe the overall status of chemical use in the semiconductor industry in Korea and to examine it from a health perspective.

Methods

Data on the status of chemical use and safety data sheets at 11 of 12 major semiconductor workplaces in Korea were collected. The number of chemical products and chemical constituents, quantities of chemicals, and trade secret ingredients used, as well as the health hazards were examined.

Results

On average, 210 chemical products and 135 chemical constituents were used at the surveyed workplaces. Among all chemical products, 33% (range: 16-56%) contained at least one trade secret ingredient. Most of the trade secret ingredients were used in the photolithography process. Several carcinogens, including sulfuric acid, chromic acid, ethylene oxide, crystalline silica, potassium dichromate, and formaldehyde were also used. Only 29% (39 of 135) of the chemical constituents had occupational exposure limits, and more than 60% had no National Fire Protection Association health, safety, and reactivity ratings. Based on the aforementioned results, this study revealed the following. First, many chemical products and constituents are being used in the semiconductor industry and many products contained trade secret ingredients. Second, many products contained significant amounts of carcinogenic, mutagenic, and reproductive toxicant materials.

Conclusion

We conclude that protecting workers in the semiconductor industry against harm from chemical substances will be difficult, due to widespread use of trade secret ingredients and a lack of hazard information. The findings of the status of chemical use and the health and safety risks in semiconductor industry will contribute to epidemiological studies, safe workplace, and worker health protection.

Health Risk Assessment of Photoresists Used in an Optoelectronic Semiconductor Factory

Photoresist materials are indispensable in photolithography, a process used in semiconductor fabrication. The work process and potential hazards in semiconductor production have raised concerns as to adverse health effects. We therefore performed a health risk assessment of occupational exposure to positive photoresists in a single optoelectronic semiconductor factory in Taiwan. Positive photoresists are widely used in the optoelectronic semiconductor industry for photolithography. Occupational exposure was estimated using the Stoffenmanager® model. Bayesian modeling incorporated available personal air sampling data. We examined the composition and by-products of the photoresists according to descriptions published in the literature and patents; the main compositions assessed were propylene glycol methyl ether acetate (PGMEA), novolac resin, photoactive compound, phenol, cresol, benzene, toluene, and xylene. Reference concentrations for each compound were reassessed and updated if necessary. Calculated hazard quotients were greater than 1 for benzene, phenol, xylene, and PGMEA, indicating that they have the potential for exposures that exceed reference levels. The information from our health risk assessment suggests that benzene and phenol have a higher level of risk than is currently acknowledged. Undertaking our form of risk assessment in the workplace design phase could identify compounds of major concern, allow for the early implementation of control measures and monitoring strategies, and thereby reduce the level of exposure to health risks that workers face throughout their career.

Route towards sustainable smart sensors: ferroelectric polyvinylidene fluoride-based materials and their integration in flexible electronics

Printed ferroelectric devices are ideal candidates for self-powered and multifunctional sensor skins, contributing to a sustainable smart future.

Chemical use in the semiconductor manufacturing industry

BACKGROUND

The semiconductor industry is known to use a number of chemicals, but little is known about the exact chemicals used due to the ingredients being kept as a trade secret.

OBJECTIVES

The objective of this study was to analyze chemical use using a safety data sheet (SDS) and chemical inventory provided by a major semiconductor company, which operated two factories (A and B).

METHODS

Descriptive statistics were obtained on the number of chemical products and ingredients, photoresists, and carcinogens, classified by the International Agency for Research on Cancer (IARC), as well as trade secret ingredients. The total chemical use per year was estimated from chemical inventories mass (kg).

RESULTS

A total of 428 and 432 chemical products were used in factories A and B, respectively. The number of pure chemical ingredients, after removing both trade secret ingredients and multiple counting, was 189 and 157 in factories A and B, respectively. The number of products containing carcinogens, such as sulfuric acid, catechol, and naphthalene was 47/428 (A) and 28/432 (B). Chemicals used in photolithography were 21% (A) and 26% (B) of all chemical products, and more than 97% among them were chemicals containing trade secret ingredients.

CONCLUSIONS

Each year, 4.3 and 8.3 tons of chemicals were used per person in factories A and B, respectively. Because of the high level of commercial secrecy and the use of many unregulated chemicals, more sustainable policies and methods should be implemented to address health and safety issues in the semiconductor industry.

Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry

Background

The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safety data sheets (MSDSs) and analytical results.

Methods

A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards.

Results

Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin.

Conclusion

We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment.

Comprehensive Evaluation of Hazardous Chemical Exposure Control System at a Semiconductor Manufacturing Company in South Korea

The goal of this study was to evaluate the hazardous chemical exposure control system in a semiconductor manufacturing company and recommend an appropriate exposure surveillance system for hazardous agents. We reviewed compliance-based chemical exposure data compiled between 2012 and 2014 by the study company. The chemical management system, characteristics of chemical use and hazardous gas monitoring system were also investigated. We evaluated the airborne isopropyl alcohol (IPA) and acetone generally used as cleaning solvents, volatile organic compounds and metals levels using internationally recommended sampling and analytical methods. Based on the results of past working environment measurement data and of our investigation, the overall current exposure to chemicals by semiconductor workers during routine production work appears to be controlled below occupational exposure limits. About 40% of chemical products used were found to contain at least one unidentifiable trade-secret substance. There are several situations and maintenance tasks that need special attention to reduce exposure to carcinogens as much as possible. In addition, a job-exposure matrix as a tool of surveillance system that can examine the exposure and health status of semiconductor workers according to type of operation and type of job or task is recommended.

New concept for occupational health development: 3 phases

Occupational health development in a country can be classified into 3 phases as External, Internal (or Personal), and Social Environmental Phases. Occupational health usually focuses on work environment, but it cannot advance without controlling workers' health and cannot be achieved without a complimentary understanding of the social security system. Society may continue wasting social costs for determining whether a disease of workers is caused by or arising from work. In order to understand the status of occupational diseases in a country, one must know about the comprehensiveness of the social security system in that society.

The health impacts of semiconductor production: an epidemiologic review

BACKGROUND

Despite concerns over the harmful health effects of semiconductor production, epidemiological studies have shown mixed results.

OBJECTIVES

We aim to critically appraise epidemiologic studies to date, and to suggest future research and actions to protect workers in semiconductor industry.

METHODS

Epidemiologic studies were identified through electronic database searches, review of reference lists of relevant published works, and expert consultations, and were narratively reviewed.

RESULTS

Most evidence suggests reproductive risks from fabrication jobs, including spontaneous abortion (SAB), congenital malformation, and reduced fertility. Although chemicals have been suspected as causal agents, knowledge of the likely contribution(s) from specific exposures is still limited. Evidence of cancer risk seems to be equivocal. However, the available studies had serious limitations including healthy worker effects (HWEs), information bias, and insufficient power, all of which are associated with underestimation. Nevertheless, excess risks for non-Hodgkin's lymphoma (NHL), leukemia, brain tumor, and breast cancer were observed.

CONCLUSIONS

Monitoring and innovative research based on international collaboration with a focus on sentinel events are required.