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Qiu Y, Shi L, Chen L, Yu Y, Yu G, Zhu M, Zhou H. A Wide-Band Magnetoelectric Sensor Based on a Negative-Feedback Compensated Readout Circuit. SENSORS (BASEL, SWITZERLAND) 2024; 24:423. [PMID: 38257514 PMCID: PMC10820417 DOI: 10.3390/s24020423] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/20/2023] [Revised: 12/24/2023] [Accepted: 12/28/2023] [Indexed: 01/24/2024]
Abstract
Magnetoelectric (ME) sensors cannot effectively detect broadband magnetic field signals due to their narrow bandwidth, and existing readout circuits are unable to vary the bandwidth of the sensors. To expand the bandwidth, this paper introduces a negative-feedback readout circuit, fabricated by introducing a negative-feedback compensation circuit based on the direct readout circuit of the ME sensor. The negative-feedback compensation circuit contains a current amplifier, a feedback resistor, and a feedback coil. For this purpose, a Metglas/PVDF/Metglas ME sensor was prepared. Experimental measurements show that there is a six-fold difference between the maximum and minimum values of the ME voltage coefficients in the 6-39 kHz frequency band for the ME sensor without the negative-feedback compensation circuit when the sensor operates at the optimal bias magnetic field. However, the ME voltage coefficient in this band remains stable, at 900 V/T, after the charge amplification of the direct-reading circuit and the negative-feedback circuit. In addition, experimental results show that this negative-feedback readout circuit does not increase the equivalent magnetic noise of the sensor, with a noise level of 240 pT/√Hz in the frequency band lower than 25 kHz, 63 pT/√Hz around the resonance frequency of 30 kHz, and 620 pT/√Hz at 39 kHz. This paper proposes a negative-feedback readout circuit based on the direct readout circuit, which greatly increases the bandwidth of ME sensors and promotes the widespread application of ME sensors in the fields of broadband weak magnetic signal detection and DBS electrode positioning.
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Affiliation(s)
- Yang Qiu
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Lingshan Shi
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Longyu Chen
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Yuxuan Yu
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Guoliang Yu
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Mingmin Zhu
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
| | - Haomiao Zhou
- The Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, China
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2
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Mion T, D’Agati MJ, Sofronici S, Bussmann K, Staruch M, Kost JL, Co K, Olsson RH, Finkel P. High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer. SENSORS (BASEL, SWITZERLAND) 2023; 23:8626. [PMID: 37896719 PMCID: PMC10610584 DOI: 10.3390/s23208626] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/08/2023] [Revised: 10/10/2023] [Accepted: 10/16/2023] [Indexed: 10/29/2023]
Abstract
Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed-fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co1-xFex)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron-cobalt-hafnium alloy (Fe0.5Co0.5)0.92Hf0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed.
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Affiliation(s)
- Thomas Mion
- US Naval Research Laboratory, American Society for Engineering Education Postdoc, Washington, DC 02375, USA;
| | - Michael J. D’Agati
- Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA; (M.J.D.); (S.S.)
| | - Sydney Sofronici
- Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA; (M.J.D.); (S.S.)
| | - Konrad Bussmann
- US Naval Research Laboratory, Materials Science and Technology Division, Washington, DC 02375, USA; (K.B.); (M.S.)
| | - Margo Staruch
- US Naval Research Laboratory, Materials Science and Technology Division, Washington, DC 02375, USA; (K.B.); (M.S.)
| | - Jason L. Kost
- US Naval Research Laboratory, Acoustics Division, Washington, DC 02375, USA;
| | - Kevin Co
- Laboratoire Structures, Propriétés et Modélisation des Solides, CentraleSupélec, Université Paris-Saclay, 91190 Gif-sur-Yvette, France;
| | - Roy H. Olsson
- Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA; (M.J.D.); (S.S.)
| | - Peter Finkel
- US Naval Research Laboratory, Materials Science and Technology Division, Washington, DC 02375, USA; (K.B.); (M.S.)
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3
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Chu Z, Mao Z, Song K, Jiang S, Min S, Dan W, Yu C, Wu M, Ren Y, Lu Z, Jiao J, Nan T, Dong S. A Multilayered Magnetoelectric Transmitter with Suppressed Nonlinearity for Portable VLF Communication. RESEARCH (WASHINGTON, D.C.) 2023; 6:0208. [PMID: 37719048 PMCID: PMC10503940 DOI: 10.34133/research.0208] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/06/2023] [Accepted: 07/28/2023] [Indexed: 09/19/2023]
Abstract
Acoustically actuated magnetoelectric (ME) antenna based on the efficient oscillation of magnetic dipoles has recently been considered as a promising solution for portable very-low-frequency communications. However, the severe nonlinear dynamic behavior in the case of strong-field excitation results in insufficient radiation capability and poor communication performance for a conventional ME antenna. In this work, we propose to suppress the nonlinearity of an ME antenna by neutralizing the spring-hardening effect in amorphous Metglas and the spring-softening effect in piezoelectric ceramics through an ME multilayered transmitter (ME-MLTx) design. With a driving voltage of 50 Vpp at the resonance frequency of 21.2 kHz, a magnetic flux density as high as 108 fT at a distance of 100 m is produced from a single ME-MLTx. In addition, ME-MLTx performs a decreased mechanical quality factor (Q m) less than 40.65, and, thus, a broadened bandwidth of 500 Hz is generated. Finally, a communication link transmitting binary American Standard Code for Information Interchange-coded message is built, which allows for an error-free communication with a distance of 18 m and a data rate of 300 bit/s in the presence of heavy environment noise. The communication distance can be further estimated over 100 m when using a femtotesla-class-inductive magnetic field receiver. The obtained results are believed to bring ME antennas one step closer to being applicable in very-low-frequency communications.
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Affiliation(s)
- Zhaoqiang Chu
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
- College of Underwater Acoustics Engineering, Harbin Engineering University, Harbin 150001, China
| | - Zhineng Mao
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Kaixin Song
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Shizhan Jiang
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Shugang Min
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Wei Dan
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Chenyuan Yu
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Meiyu Wu
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Yinghui Ren
- Qingdao Innovation and Development Base, Harbin Engineering University, Qingdao 266071, China
| | - Zhichao Lu
- Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808 China
| | - Jie Jiao
- Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
| | - Tianxiang Nan
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Shuxiang Dong
- College of Engineering, Peking University, Beijing 100871, China
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4
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Bichurin M, Sokolov O, Ivanov S, Ivasheva E, Leontiev V, Lobekin V, Semenov G. Modeling the Magnetoelectric Composites in a Wide Frequency Range. MATERIALS (BASEL, SWITZERLAND) 2023; 16:5813. [PMID: 37687506 PMCID: PMC10488542 DOI: 10.3390/ma16175813] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/05/2023] [Revised: 08/11/2023] [Accepted: 08/21/2023] [Indexed: 09/10/2023]
Abstract
This article presents a general theory of the ME effect in composites in the low- and high-frequency ranges. Besides the quasi-static region, the area of electromechanical resonance, including longitudinal, bending, longitudinal shear, and torsional modes, is considered in more detail. To demonstrate the theory, expressions of ME voltage coefficients are obtained for symmetric and asymmetric layered structures. A comparison is made with the experimental results for the GaAs/Metglas and LiNbO3/Metglas structures. The main microwave ME effect, consisting of the FMR line shift in an electric field, for the ferromagnetic metals, their alloys, and YIG ferrite using various piezoelectrics is discussed. In addition to analytical calculations, in the article, finite element modeling is considered. The calculation methods and experimental results are compared for some composites.
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Affiliation(s)
- Mirza Bichurin
- Institute of Electronic and Information Systems, Yaroslav-the-Wise Novgorod State University, ul. B. St. Petersburgskaya, 41, 173003 Velikiy Novgorod, Russia; (O.S.); (S.I.); (E.I.); (V.L.); (V.L.); (G.S.)
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5
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Burdin DA, Chashin DV, Ekonomov NA, Fetisov LY, Preobrazhensky VL, Fetisov YK. Low-Frequency Resonant Magnetoelectric Effects in Layered Heterostructures Antiferromagnet-Piezoelectric. SENSORS (BASEL, SWITZERLAND) 2023; 23:5901. [PMID: 37447750 DOI: 10.3390/s23135901] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2023] [Revised: 06/21/2023] [Accepted: 06/22/2023] [Indexed: 07/15/2023]
Abstract
Magnetic field sensors using magnetoelectric (ME) effects in planar ferromagnetic-piezoelectric heterostructures convert a magnetic field into an output voltage. The parameters of ME sensors are determined by characteristics of the magnetic constituent. In this work, the low-frequency ME effects in heterostructures comprising a layer of antiferromagnetic hematite α-Fe2O3 crystal with easy-plane anisotropy and a piezoelectric layer are studied. The effects arise due to a combination of magnetostriction and piezoelectricity because of mechanical coupling of the layers. The field dependences of magnetization and magnetostriction of the hematite crystal are measured. The resonant ME effects in the hematite-piezopolymer and hematite-piezoceramic structures are studied. The strong coupling between magnetic and acoustic subsystems of hematite results in a tuning of the acoustic resonance frequency by the magnetic field. For the hematite layer, the frequency tuning was found to be ~37% with an increase in the bias field up to 600 Oe. For the hematite-PVDF heterostructure, the frequency tuning reached ~24% and the ME coefficient was 58 mV/(Oe∙cm). For the hematite-piezoceramic heterostructure, the frequency tuning was ~4.4% and the ME coefficient 4.8 V/(Oe∙cm). Efficient generation of the second voltage harmonic in the hematite-piezoceramic heterostructure was observed.
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Affiliation(s)
- Dmitri A Burdin
- MIREA-Russian Technological University, Moscow 119454, Russia
| | | | | | | | | | - Yuri K Fetisov
- MIREA-Russian Technological University, Moscow 119454, Russia
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6
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Fetisov LY, Dzhaparidze MV, Savelev DV, Burdin DA, Turutin AV, Kuts VV, Milovich FO, Temirov AA, Parkhomenko YN, Fetisov YK. Magnetoelectric Effect in Amorphous Ferromagnetic FeCoSiB/Langatate Monolithic Heterostructure for Magnetic Field Sensing. SENSORS (BASEL, SWITZERLAND) 2023; 23:s23094523. [PMID: 37177727 PMCID: PMC10181502 DOI: 10.3390/s23094523] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/07/2023] [Revised: 04/21/2023] [Accepted: 05/04/2023] [Indexed: 05/15/2023]
Abstract
This paper investigates the possibilities of creating magnetic field sensors using the direct magnetoelectric (ME) effect in a monolithic heterostructure of amorphous ferromagnetic material/langatate. Layers of 1.5 μm-thick FeCoSiB amorphous ferromagnetic material were deposited on the surface of the langatate single crystal using magnetron sputtering. At the resonance frequency of the structure, 107 kHz, the ME coefficient of linear conversion of 76.6 V/(Oe∙cm) was obtained. Furthermore, the nonlinear ME effect of voltage harmonic generation was observed with an increasing excitation magnetic field. The efficiency of generating the second and third harmonics was about 6.3 V/(Oe2∙cm) and 1.8 V/(Oe3∙cm), respectively. A hysteresis dependence of ME voltage on a permanent magnetic field was observed due to the presence of α-Fe iron crystalline phases in the magnetic layer. At the resonance frequency, the monolithic heterostructure had a sensitivity to the AC magnetic field of 4.6 V/Oe, a minimum detectable magnetic field of ~70 pT, and a low level of magnetic noise of 0.36 pT/Hz1/2, which allows it to be used in ME magnetic field sensors.
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Affiliation(s)
- L Y Fetisov
- Research and Educational Center 'Magnetoelectric Materials and Devices', MIREA-Russian Technological University, 119454 Moscow, Russia
| | - M V Dzhaparidze
- Research and Educational Center 'Magnetoelectric Materials and Devices', MIREA-Russian Technological University, 119454 Moscow, Russia
| | - D V Savelev
- Research and Educational Center 'Magnetoelectric Materials and Devices', MIREA-Russian Technological University, 119454 Moscow, Russia
| | - D A Burdin
- Research and Educational Center 'Magnetoelectric Materials and Devices', MIREA-Russian Technological University, 119454 Moscow, Russia
| | - A V Turutin
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - V V Kuts
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - F O Milovich
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - A A Temirov
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Y N Parkhomenko
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Y K Fetisov
- Research and Educational Center 'Magnetoelectric Materials and Devices', MIREA-Russian Technological University, 119454 Moscow, Russia
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7
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Elnemr YE, Abu-Libdeh A, Raj GCA, Birjis Y, Nazemi H, Munirathinam P, Emadi A. Multi-Transduction-Mechanism Technology, an Emerging Approach to Enhance Sensor Performance. SENSORS (BASEL, SWITZERLAND) 2023; 23:s23094457. [PMID: 37177661 PMCID: PMC10181588 DOI: 10.3390/s23094457] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/28/2023] [Revised: 04/28/2023] [Accepted: 04/29/2023] [Indexed: 05/15/2023]
Abstract
Conventional sensor systems employ single-transduction technology where they respond to an input stimulus and transduce the measured parameter into a readable output signal. As such, the technology can only provide limited corresponding data of the detected parameters due to relying on a single transformed output signal for information acquisition. This limitation commonly results in the need for utilizing sensor array technology to detect targeted parameters in complex environments. Multi-transduction-mechanism technology, on the other hand, may combine more than one transduction mechanism into a single structure. By employing this technology, sensors can be designed to simultaneously distinguish between different input signals from complex environments for greater degrees of freedom. This allows a multi-parameter response, which results in an increased range of detection and improved signal-to-noise ratio. In addition, utilizing a multi-transduction-mechanism approach can achieve miniaturization by reducing the number of required sensors in an array, providing further miniaturization and enhanced performance. This paper introduces the concept of multi-transduction-mechanism technology by exploring different candidate combinations of fundamental transduction mechanisms such as piezoresistive, piezoelectric, triboelectric, capacitive, and inductive mechanisms.
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Affiliation(s)
- Youssef Ezzat Elnemr
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Aya Abu-Libdeh
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Gian Carlo Antony Raj
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Yumna Birjis
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Haleh Nazemi
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Pavithra Munirathinam
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
| | - Arezoo Emadi
- Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada
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8
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Azam T, Bukhari SH, Liaqat U, Miran W. Emerging Methods in Biosensing of Immunoglobin G-A Review. SENSORS (BASEL, SWITZERLAND) 2023; 23:676. [PMID: 36679468 PMCID: PMC9862834 DOI: 10.3390/s23020676] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/12/2022] [Revised: 12/30/2022] [Accepted: 01/01/2023] [Indexed: 06/17/2023]
Abstract
Human antibodies are produced due to the activation of immune system components upon exposure to an external agent or antigen. Human antibody G, or immunoglobin G (IgG), accounts for 75% of total serum antibody content. IgG controls several infections by eradicating disease-causing pathogens from the body through complementary interactions with toxins. Additionally, IgG is an important diagnostic tool for certain pathological conditions, such as autoimmune hepatitis, hepatitis B virus (HBV), chickenpox and MMR (measles, mumps, and rubella), and coronavirus-induced disease 19 (COVID-19). As an important biomarker, IgG has sparked interest in conducting research to produce robust, sensitive, selective, and economical biosensors for its detection. To date, researchers have used different strategies and explored various materials from macro- to nanoscale to be used in IgG biosensing. In this review, emerging biosensors for IgG detection have been reviewed along with their detection limits, especially electrochemical biosensors that, when coupled with nanomaterials, can help to achieve the characteristics of a reliable IgG biosensor. Furthermore, this review can assist scientists in developing strategies for future research not only for IgG biosensors but also for the development of other biosensing systems for diverse targets.
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Affiliation(s)
- Tehmina Azam
- School of Chemical and Materials Engineering (SCME), National University of Sciences and Technology (NUST), Islamabad 44000, Pakistan
| | - Syed Hassan Bukhari
- College of Computational Sciences and Natural Sciences, Minerva University, San Francisco, CA 94103, USA
| | - Usman Liaqat
- School of Chemical and Materials Engineering (SCME), National University of Sciences and Technology (NUST), Islamabad 44000, Pakistan
| | - Waheed Miran
- School of Chemical and Materials Engineering (SCME), National University of Sciences and Technology (NUST), Islamabad 44000, Pakistan
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9
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Yin JH, Tan GL, Duan CC. Antiferroelectrics and Magnetoresistance in La 0.5Sr 0.5Fe 12O 19 Multiferroic System. MATERIALS (BASEL, SWITZERLAND) 2023; 16:492. [PMID: 36676231 PMCID: PMC9862427 DOI: 10.3390/ma16020492] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/21/2022] [Revised: 12/24/2022] [Accepted: 12/28/2022] [Indexed: 06/17/2023]
Abstract
The appearance of antiferroelectrics (AFE) in the ferrimagnetism (FM) system would give birth to a new type of multiferroic candidate, which is significant to the development of novel devices for energy storage. Here we demonstrate the realization of full antiferroelectrics in a magnetic La0.5Sr0.5Fe12O19 system (AFE+FM), which also presents a strong magnetodielectric response (MD) and magnetoresistance (MR) effect. The antiferroelectric phase was achieved at room temperature by replacing 0.5 Sr2+ ions with 0.5 La2+ ions in the SrFe12O19 compound, whose phase transition temperature of ferroelectrics (FE) to antiferroelectrics was brought down from 174 °C to -141 °C, while the temperature of antiferroelectrics converting to paraelectrics (PE) shifts from 490 °C to 234 °C after the substitution. The fully separated double P-E hysteresis loops reveal the antiferroelectrics in La0.5Sr0.5Fe12O19 ceramics. The magnitude of exerting magnetic field enables us to control the generation of spin current, which induces MD and MR effects. A 1.1T magnetic field induces a large spin current of 15.6 n A in La0.5Sr0.5Fe12O19 ceramics, lifts up dielectric constants by 540%, and lowers the resistance by -89%. The magnetic performance remains as usual. The multiple functions in one single phase allow us to develop novel intelligent devices.
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Affiliation(s)
- Jia-Hang Yin
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
| | - Guo-Long Tan
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
- Department of Electronic Engineering, Luzhou Vocational and Technical College, Luzhou 646000, China
| | - Cong-Cong Duan
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
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10
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Turutin AV, Skryleva EA, Kubasov IV, Milovich FO, Temirov AA, Raketov KV, Kislyuk AM, Zhukov RN, Senatulin BR, Kuts VV, Malinkovich MD, Parkhomenko YN, Sobolev NA. Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas. MATERIALS (BASEL, SWITZERLAND) 2023; 16:ma16020484. [PMID: 36676218 PMCID: PMC9861317 DOI: 10.3390/ma16020484] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/06/2022] [Revised: 12/22/2022] [Accepted: 12/29/2022] [Indexed: 05/27/2023]
Abstract
Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium niobate single crystal and a film of magnetostrictive metglas. In the former, a ferroelectric bidomain structure is created using a technique developed by the authors. A cantilever is formed by microblasting inside the lithium niobate crystal. Metglas layers are deposited by magnetron sputtering. The quality of the metglas layers was assessed by XPS depth profiling and TEM. Detailed measurements of the magnetoelectric effect in the quasistatic and dynamic modes were performed. The magnetoelectric coefficient |α32| reaches a value of 492 V/(cm·Oe) at bending resonance. The quality factor of the structure was Q = 520. The average phase amounted to 93.4° ± 2.7° for the magnetic field amplitude ranging from 12 to 100 pT. An AC magnetic field detection limit of 12 pT at a resonance frequency of 3065 Hz was achieved which exceeds by a factor of 5 the best value for magnetoelectric MEMS lead-free composites reported in the literature. The noise level of the magnetoelectric signal was 0.47 µV/Hz1/2. Ways to improve the sensitivity of the developed sensors to the magnetic field for biomedical applications are indicated.
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Affiliation(s)
- Andrei V. Turutin
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
- Department of Physics and I3N, University of Aveiro, 3810-193 Aveiro, Portugal
| | - Elena A. Skryleva
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Ilya V. Kubasov
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Filipp O. Milovich
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Alexander A. Temirov
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Kirill V. Raketov
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
- Mapper LLC, Volgogradsky Pr. 42 k. 5, 109316 Moscow, Russia
| | - Aleksandr M. Kislyuk
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Roman N. Zhukov
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Boris R. Senatulin
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Victor V. Kuts
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Mikhail D. Malinkovich
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
| | - Yuriy N. Parkhomenko
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
- JSC ‘‘Giredmet’’, 2 Elektrodnaya Str., 111524 Moscow, Russia
| | - Nikolai A. Sobolev
- Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia
- Department of Physics and I3N, University of Aveiro, 3810-193 Aveiro, Portugal
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Lyu H, Wang Z, Yang W, Xiong X, Liu Z, Zou X. Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect. MICROMACHINES 2022; 13:mi13050674. [PMID: 35630140 PMCID: PMC9145385 DOI: 10.3390/mi13050674] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/30/2022] [Revised: 04/19/2022] [Accepted: 04/20/2022] [Indexed: 11/29/2022]
Abstract
A mode-localized ΔE-effect magnetic sensor model is established theoretically and numerically. Based on the designed weakly coupled resonators with multi-layer film structure, it is investigated how the ΔE-effect of the magnetostrictive film under the external magnetic field causes the stiffness perturbation of the coupled resonators to induce the mode localization effect. Using the amplitude ratio (AR) as the output in the mode-localized ΔE-effect magnetic sensor can improve the relative sensitivity by three orders of magnitude compared with the traditional frequency output, which has been verified by simulations based on the finite element method (FEM). In addition, the effects of material properties and geometric dimensions on sensor performance parameters, such as sensitivity, linear range, and static operating point are also analyzed and studied in detail, providing the theoretical basis for the design and optimization of the mode-localized ΔE-effect magnetic sensor in different application scenarios. By reasonably optimizing the key parameters of the weekly coupled resonators, a mode-localized ΔE-effect magnetic sensor with the sensitivity of 18 AR/mT and a linear range of 0.8 mT can be achieved.
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Affiliation(s)
- Haoqi Lyu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (H.L.); (W.Y.); (X.X.); (Z.L.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Zheng Wang
- QiLu Aerospace Information Research Institute, Jinan 250101, China;
| | - Wuhao Yang
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (H.L.); (W.Y.); (X.X.); (Z.L.)
| | - Xingyin Xiong
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (H.L.); (W.Y.); (X.X.); (Z.L.)
| | - Zhenxi Liu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (H.L.); (W.Y.); (X.X.); (Z.L.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Xudong Zou
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China; (H.L.); (W.Y.); (X.X.); (Z.L.)
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- QiLu Aerospace Information Research Institute, Jinan 250101, China;
- Correspondence: ; Tel.: +86-135-8177-8370
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12
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Repeatable and deterministic all electrical switching in a mixed phase artificial multiferroic. Sci Rep 2022; 12:5332. [PMID: 35351999 PMCID: PMC8964689 DOI: 10.1038/s41598-022-09417-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/28/2022] [Accepted: 03/15/2022] [Indexed: 11/25/2022] Open
Abstract
We demonstrate a repeatable all-electric magnetic switching behaviour in a PMN-PT/FeRh thin film artificial multiferroic. The magnitude of the effect is significantly smaller than expected from conventional thermomagnetic switching of FeRh thin films and we explore properties of the PMN-PT/FeRh system in order to understand the origin of this reduction. The data demonstrate the importance of the crystallographic phase of PMN-PT and show how a phase transition at ~ 100 °C modifies the magneto-electric coupling. We demonstrate a large strain remanence effect in the PMN-PT substrate, which limits the magnetoelectric coupling on successive cycling of the applied electric field.
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Kopyl S, Surmenev R, Surmeneva M, Fetisov Y, Kholkin A. Magnetoelectric effect: principles and applications in biology and medicine- a review. Mater Today Bio 2021; 12:100149. [PMID: 34746734 PMCID: PMC8554634 DOI: 10.1016/j.mtbio.2021.100149] [Citation(s) in RCA: 29] [Impact Index Per Article: 9.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/18/2021] [Revised: 10/05/2021] [Accepted: 10/08/2021] [Indexed: 12/26/2022] Open
Abstract
Magnetoelectric (ME) effect experimentally discovered about 60 years ago remains one of the promising research fields with the main applications in microelectronics and sensors. However, its applications to biology and medicine are still in their infancy. For the diagnosis and treatment of diseases at the intracellular level, it is necessary to develop a maximally non-invasive way of local stimulation of individual neurons, navigation, and distribution of biomolecules in damaged cells with relatively high efficiency and adequate spatial and temporal resolution. Recently developed ME materials (composites), which combine elastically coupled piezoelectric (PE) and magnetostrictive (MS) phases, have been shown to yield very strong ME effects even at room temperature. This makes them a promising toolbox for solving many problems of modern medicine. The main ME materials, processing technologies, as well as most prospective biomedical applications will be overviewed, and modern trends in using ME materials for future therapies, wireless power transfer, and optogenetics will be considered.
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Affiliation(s)
- S. Kopyl
- Department of Physics & CICECO - Aveiro Institute of Materials, University of Aveiro, Aveiro, Portugal
| | - R. Surmenev
- Physical Materials Science and Composite Materials Centre, Research School of Chemistry & Applied Biomedical Sciences, National Research Tomsk Polytechnic University, Tomsk, Russia
- Piezo- and Magnetoelectric Materials Research & Development Centre, Research School of Chemistry & Applied Biomedical Sciences, National Research Tomsk Polytechnic University, Tomsk, Russia
| | - M. Surmeneva
- Physical Materials Science and Composite Materials Centre, Research School of Chemistry & Applied Biomedical Sciences, National Research Tomsk Polytechnic University, Tomsk, Russia
- Piezo- and Magnetoelectric Materials Research & Development Centre, Research School of Chemistry & Applied Biomedical Sciences, National Research Tomsk Polytechnic University, Tomsk, Russia
| | - Y. Fetisov
- Research & Education Centre ‘Magnetoelectric Materials and Devices’, MIREA – Russian Technological University, Moscow, Russia
| | - A. Kholkin
- Department of Physics & CICECO - Aveiro Institute of Materials, University of Aveiro, Aveiro, Portugal
- Piezo- and Magnetoelectric Materials Research & Development Centre, Research School of Chemistry & Applied Biomedical Sciences, National Research Tomsk Polytechnic University, Tomsk, Russia
- School of Natural Sciences and Mathematics, Ural Federal University, Ekaterinburg, Russia
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