An Accelerometer Based on All Silica In-Line Fiber Fabry-Perot Etalon for High Temperature up to 800 °C.
MICROMACHINES 2022;
13:mi13040548. [PMID:
35457853 PMCID:
PMC9027713 DOI:
10.3390/mi13040548]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/05/2022] [Revised: 03/25/2022] [Accepted: 03/29/2022] [Indexed: 11/17/2022]
Abstract
High-temperature accelerometers have been widely used in aerospace, nuclear reactors, automobile technologies, etc. In this paper, a fiber-optic Fabry–Perot accelerometer (FOFPA) with a cantilever beam for high temperature is designed and experimentally demonstrated. The FOFPA is formed by bonding an all-silica in-line fiber Fabry–Perot etalon (ILFFPE) to one surface of the uniform cantilever beam with the lumped mass at the free end for acceleration measurement. The all silica in-line fiber FP etalon is made by welding two gold-coat single-mode fiber (GSMF) and a hollow silica glass tube (HST). The research results indicate that the sensitivity of the FOFPA is 0.02328rad/g, and the resonance frequency is 1146.6 Hz in the range of 1 g ~ 10 g. The high-temperature performance of the FOFPA was also evaluated. From 20 °C to 800 °C, the temperature drift is about 0.3178 nm/°C. The FOFPA has the potential of being applicable in higher temperatures compared to conventional accelerometers.
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