Fabrication and Optical Characterization of Polymeric Aspherical Microlens Array Using Hot Embossing Technology

Rapid Fabrication of Silica Microlens Arrays via Glass 3D Printing

Rapid manufacturing of high purity fused silica glass micro-optics using a filament-based glass 3D printer has been demonstrated. A multilayer 5 × 5 microlens array was printed and subsequently characterized, showing fully dense lenses with uniform focal lengths and good imaging performance. A surface roughness on the order of Ra = 0.12 nm was achieved. Printing time for each lens was <10 s. Creating arrays with multifocal imaging capabilities was possible by individually varying the number of printed layers and radius for each lens, effectively changing the lens height and curvature. Glass 3D printing is shown in this study to be a versatile approach for fabricating silica micro-optics suitable for rapid prototyping or manufacturing.

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays using thermal reflow combined with ICP etching. When the temperature rises above the glass transition temperature, the polymer cylinder will reflow into a smooth hemisphere due to the surface tension effect. The dimensional differences generated after reflow can be corrected using etching selectivity in the following ICP etching process, which transfers the microstructure on the photoresist to the substrate. The volume variation before and after reflow, as well as the effect of etching selectivity using process parameters, such as RF power and gas flow, were explored. Due to the surface tension effect and the simultaneous molding of all microlens units, machining a 3.84 × 3.84 mm2 silicon microlens array required only 3 min of reflow and 15 min of ICP etching with an extremely low average surface roughness Sa of 1.2 nm.

Fabrication of Polymethyl Methacrylate (PMMA) Hydrophilic Surfaces Using Combined Offset-Tool-Servo Flycutting and Hot Embossing Methods

Polymethyl methacrylate (PMMA) is a material with good surface wettability and has unique and widespread applications in industrial fields. However, fabricating this material in an environmentally friendly way while maintaining its mechanical robustness remains a challenging task. One effective way is through the rational design of microstructure surfaces. The current study fabricated a pyramid microstructure array on a mold surface using offset-tool-servo flycutting, which was then combined with hot embossing to replicate an inverted pyramid microstructure array on a PMMA surface. Firstly, a toolpath compensation algorithm was developed to linearize the arc toolpath and reduce the cost of ultra-precision lathe. Then, the algorithm was further developed to achieve automatic linear toolpath intersection, aiming to ensure the machining accuracy and improve machining efficiency. An experiment testing the linear toolpath intersecting at 90° was conducted, fabricating a pyramid microstructure array with nanoscale roughness on the mold surface. This surface was then employed for replicating an inverted pyramid microstructure array on the PMMA surface using hot embossing. Furthermore, the accuracy of replication was evaluated, and the experimental results demonstrated excellent replication fidelity, exceeding 98%. The microstructural surface of the PMMA exhibited a change in surface wettability. The wettability test showed a water-droplet contact angle reduction from 84.8° ± 0.1° to 56.2° ± 0.1°, demonstrating a good hydrophilic effect. This study introduces a novel, environmentally friendly and high-precision method to fabricate a functional PMMA surface with an inverted pyramid microstructure array. The results of this study also provide strong technical support and theoretical guidance for micro-nanostructure functional surface machining and replicating.

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold was carried out by perfluorooctyl phosphoric acid (PFOPA) liquid deposition. Through the orthogonal experiment of hot embossing with the treated mold and subsequent inductively coupled plasma (ICP) etching, the microstructure of MLA was transferred to the silicon substrate, with a root mean square error of 17.7 nm and a roughness of 12.1 nm Sa. The average fitted radius of the microlens array units is 406.145 µm, which is 1.54% different from the design radius.

Study on Filling Capacity of Optical Glass in a Novel Rapid Hot Embossing Process

This paper aims to present a novel rapid hot embossing approach and to study filling capacity of optical glass in the hot embossing process. Firstly, a novel rapid hot embossing device is developed, which consists of a rapid heating module and a precision loading module. Particularly, the rapid heating module allows a maximum temperature of 800 °C and a heating rate of 300 °C/min, with decent temperature control accuracy and uniform temperature distribution. In hot embossing process, by incompletely filling the microhole of silicon carbide mold, a microlens would be formed on the surface of glass disc, and the filling capacity of glass is quantified by the maximum height of the microlens. The tailor-made hot embossing device was exploited to conduct a series of experiments for evaluating effects of process parameters on the filling capacity of N-BK7 glass. Experimental results indicate that the filling capacity of glass could be enhanced by increasing the embossing force, the embossing temperature, the soaking time but decreasing the annealing rate. Furthermore, compared to soaking time and annealing rate, embossing force and embossing temperature have more significant influence on the filling capacity of N-BK7 glass. Therefore, the novel rapid hot embossing is a practical and promising technology for fabricating microstructures on glass materials with high softening points.