Capacitance Electrochemical pH Sensor Based on Different Hafnium Dioxide (HfO2) Thicknesses

A high-precision and wide-range pH monitoring system based on broadband cavity-enhanced absorption spectrum

A high-precision pH monitoring system over a wide pH range is introduced. The system comprises a cavity-enhancement module constructed by two high-reflectivity mirrors, a microfluidic pH sensing chip based on a binary-indicator membrane of Congo red and m-cresol purple, and a hyperspectral transmission module. This structure extends the effective absorption optical path of the sensing chip, significantly amplifying the spectral differences at various pH values. The spectrum of the transmitted light is recorded by a self-developed hyperspectral module and then converted to broadband cavity-enhanced absorption spectrum (BBCEAS) via the Beer-Lambert law. An artificial neural network (ANN) is employed to predict pH values of the solution. With such a design, this system exhibits a wide detecting range of 2 M [H+] - 2 M [OH-] (corresponding to pH -0.3-14.3) with a response time of about 120 s. The system can achieve a higher detection accuracy with root mean square error (RMSE) of 0.073, as compared to 0.137 without the cavity enhancement. The system also possesses good properties of repeatability, long-term stability, ion resistance, and organic corrosion resistance. These excellent properties make the proposed system a promising candidate technology for harsh environments, such as seawater acidification warning, chemical plant sewage monitoring, and biological sample detection.

Effect of Microwave Annealing on the Sensing Characteristics of HfO2 Thin Film for High Sensitive pH-EGFET Sensor

Recently, certain challenges have persisted in PH sensor applications, especially when employing hafnium oxide (HfO2) thin films as sensing layers, where issues related to sensitivity, hysteresis, and long-term stability hamper performance. Microwave annealing (MWA) technology, as a promising solution for addressing these challenges, has gained significant attraction due to its unique advantages. In this article, the effects of microwave annealing (MWA) treatment on the sensing behaviors of Extended-Gate Field-Effect Transistors (EGFETs) utilizing HfO2 as a sensing film have been investigated for the first time. Various power levels of MWA treatment (1750 W/2100 W/2450 W) were selected to explore the optimal processing conditions. A thorough physical analysis was conducted to characterize the surface of the MWA-treated HfO2 sensing thin film using techniques such as X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Our findings reveal that MWA treatment effectively increased the surface sites (Ns) in the HfO2 sensing thin film, consequently leading to an increase in the pH sensitivity of EGFETs to 59.6 mV/pH, as well as a reduction in hysteresis and an enhancement in long-term stability. These results suggest that MWA offers a straightforward, energy-efficient method to enhance overall HfO2 sensing film performance in EGFETs, offering insights for HfO2 applications and broader microelectronics challenges.

Dual Ion-Selective Membrane Deposited Ion-Sensitive Field-Effect Transistor Integrating a Whole Blood Processing Microchamber for In Situ Blood Ion Testing

Blood ion testing is one of the methods that is commonly used for monitoring the immune status and providing physiological information for disease diagnosis. However, traditional blood ion sensing methods often require well-trained operators to process the whole blood sample and perform the measurements using bulky instruments, making real-time and continuous blood ion sensing at the bedside difficult. To address the above issues, we proposed a dual ion-selective membrane deposited ion-sensitive field-effect transistor (DISM-ISFET) sensor integrating a microchamber to enable on-chip serum extraction and in situ Na⁺/K⁺ ion sensing. As a proof of concept, we sequentially dispensed NaCl and KCl solutions at various concentrations on the DISM-ISFET to find out the highest ion sensitivity and selectivity. Next, we also confirm the high red blood cell sedimentation and serum purity using a microchamber. Finally, we evaluated the system performance using nine clinical whole blood samples and compared their Na⁺/K⁺ ion-sensing results with a commercial pocket ion meter. To sum up, our results showed that a DISM-ISFET system can successfully extract 200 μL serum from 500 μL whole blood sample and simultaneously achieve Na⁺/K⁺ ion sensing. All the sample processes and measurements can be finished within 10 min in a single chip. We envision this compact and easy-to-use system can be potentially used for various medical environments requiring real-time and continuous blood ion monitoring, such as in a hemodialysis room, operation room, and intensive care unit.

Investigation of the Atomic Layer Deposition of the Titanium Dioxide (TiO2) Film as pH Sensor Using a Switched Capacitor Amplifier

The electrical and chemical properties of the titanium dioxide (TiO2) coated spirals grown by the atomic layer deposition (ALD) technique in two different temperatures of 150 °C and 300 °C are studied. The thickness of the TiO2 layers studied are 20, 40, and 80 nm. A switched capacitor amplifier is used to investigate the pH response and the capacitance of the samples. It is found that the performance of the TiO2 samples depends on either the thickness or the deposition temperature due to the differences in the physical properties of the oxide layer such as surface roughness and film density. The high temperature samples are more crystalline, whereas the low temperature samples are more amorphous. Since there is a low pass filter effect in the electrolyte–sample interface, the TiO2 coated samples show the better response to the pH change for the high temperature samples as the sensor surface area for binding the hydrogen ions is larger and the charge transfer resistance is smaller. Furthermore, more roughness on the surface can be obtained by increasing the thickness, which reduces the charge transfer resistance. In this study, the 80 nm sample deposited at 300 °C gives the best pH response of 40 mV/pH.

Influence of Y Doping on WO3 Membranes Applied in Electrolyte-Insulator-Semiconductor Structures

In this paper, tungsten oxide (WO₃) is deposited on a silicon substrate applied in electrolyte-insulator-semiconductor structures for pH sensing devices. To boost the sensing performance, yttrium (Y) is doped into WO₃ membranes, and annealing is incorporated in the fabrication process. To investigate the effects of Y doping and annealing, multiple material characterizations including X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atom force microscopy (AFM), scanning electron microscopy (SEM), and transmission electron microscopy (TEM) are performed. Material analysis results indicate that annealing and Y doping can increase crystallinity, suppress defects, and enhance grainization, thereby strengthening membrane sensing capabilities in terms of sensitivity, linearity, and reliability. Because of their stable response, high reliability, and compact size, Y-doped WO₃ membranes are promising for future biomedical applications.

Validation of Low-Cost Impedance Analyzer via Nitrate Detection

Impedance spectroscopy is a widely used electrochemical technique with a wide variety of applications. Many of these applications benefit from the additional accessibility provided by low-cost impedance devices. With this in mind, a low-cost impedance device was designed for a high performance-to-cost ratio. The performance of this analyzer was validated against a high-performance DropSens µStat-i 400s potentiostat by performing an application-based experiment. Nitrate detection provides a relevant experiment because of the importance of maintaining precise nitrate concentrations to mitigate the impact of nitrate fluctuations on the environment. Dissolved nitrate samples of different concentrations, in the range 3-1000 mg/L, were confirmed colorimetrically and measured with both instruments. A calibration curve of the real impedance matched a sigmoidal transfer, with a linear region for concentrations below 10 mg/L. The device under investigation exhibited an average magnitude error of 1.28% and an average phase error of 0.96∘ relative to the high-performance standard, which validates the performance of the low-cost device. A cost analysis is presented that highlights some of the complexities of cost comparisons.

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating

The chemical, structural, morphological, and optical properties of Al-doped TiO₂ thin films, called TiO₂/Al₂O₃ nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si <100> and commercial SLG glass were discussed. High-quality PEALD TiO₂/Al₂O₃ nanolaminates were produced in the amorphous and crystalline phases. All crystalline nanolaminates have an overabundance of oxygen, while amorphous ones lack oxygen. The superabundance of oxygen on the crystalline film surface was illustrated by a schematic representation that described this phenomenon observed for PEALD TiO₂/Al₂O₃ nanolaminates. The transition from crystalline to amorphous phase increased the surface hardness and the optical gap and decreased the refractive index. Therefore, the doping effect of TiO₂ by the insertion of Al₂O₃ monolayers showed that it is possible to adjust different parameters of the thin-film material and to control, for example, the mobility of the hole-electron pair in the metal-insulator-devices semiconductors, corrosion protection, and optical properties, which are crucial for application in a wide range of technological areas, such as those used to manufacture fluorescence biosensors, photodetectors, and solar cells, among other devices.