Gold Nanoparticles-Coated SU-8 for Sensitive Fluorescence-Based Detections of DNA

Metrology and characterization of SU-8 microstructures using autofluorescence emission

Sophisticated three-dimensional microstructures fabricated using the negative tone SU-8 photoresist are used in many biomedical and microfluidic applications. Scanning electron microscopy (SEM) and profilometry are commonly used metrological techniques for the dimensional characterization of fabricated SU-8 microstructures but are not viable for non-destructive measurements and characterization of subsurface features like hidden microchannels. In this study, we report a unique methodology for the non-destructive dimensional characterization of SU-8 microstructures using the emitted autofluorescence radiation from fabricated SU-8 microstructures to generate depth profiles. The relationship between autofluorescence emission intensities and the thicknesses of the microstructures measured using SEM was determined and used to characterize the dimensions of unknown SU-8 microstructures based on their autofluorescence intensities. Lateral dimensions were also measured. This relationship was used to create highly accurate depth profiles for different types of microstructures including hidden subsurface features. These results were validated by comparison with SEM. The results suggest a feasible and accurate non-destructive, low cost, metrological technique to characterize SU-8 surface and subsurface microstructures using autofluorescence emission intensities.

Multidimensional Anisotropic Architectures on Polymeric Microparticles

Next generation life science technologies will require the integration of building blocks with tunable physical and chemical architectures at the microscale. A central issue is to govern the multidimensional anisotropic space that defines these microparticle attributes. However, this control is limited to one or few dimensions due to profound fabrication tradeoffs, a problem that is exacerbated by miniaturization. Here, a vast number of anisotropic dimensions are integrated combining SU-8 photolithography with (bio)chemical modifications via soft-lithography. Microparticles in a 15-D anisotropic space are demonstrated, covering branching, faceting, fiducial, topography, size, aspect ratio, stiffness, (bio)molecular and quantum dot printing, top/bottom surface coverage, and quasi-0D, 1D, 2D, and 3D surface patterning. The strategy permits controlled miniaturization on physical dimensions below 1 µm and molecular patterns below 1 µm² . By combining building blocks, anisotropic microparticles detect pH changes, form the basis for a DNA-assay recognition platform, and obtain an extraordinary volumetric barcoding density up to 1093 codes µm^-3 in a 3 × 12 × 0.5 µm³ volume.

SU-8 as a material for lab-on-a-chip-based mass spectrometry

This short review focuses on the application of SU-8 for the microchip-based approach to the miniaturization of mass spectrometry. Chip-based mass spectrometry will make the technology commonplace and bring benefits such as lower costs and autonomy. The chip-based miniaturization of mass spectrometry necessitates the use of new materials which are compatible with top-down fabrication involving both planar and non-planar processes. In this context, SU-8 is a very versatile epoxy-based, negative tone resist which is sensitive to ultraviolet radiation, X-rays and electron beam exposure. It has a very wide thickness range, from nanometres to millimetres, enabling the formation of mechanically rigid, very high aspect ratio, vertical, narrow width structures required to form microfluidic slots and channels for laboratory-on-a-chip design. It is also relatively chemically resistant and biologically compatible in terms of the liquid solutions used for mass spectrometry. This review looks at the impact and potential of SU-8 on the different parts of chip-based mass spectrometry - pre-treatment, ionization processes, and ion sorting and detection.