Nikooienejad N, Maroufi M, Moheimani SOR. Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design.
THE REVIEW OF SCIENTIFIC INSTRUMENTS 2019;
90:073702. [PMID:
31370473 DOI:
10.1063/1.5098499]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/02/2019] [Accepted: 05/30/2019] [Indexed: 06/10/2023]
Abstract
We present an analysis and a systematic design methodology for a novel nonraster scan method based on a rosette pattern and demonstrate its application in video-rate atomic force microscopy. This pattern is traced when the lateral axes of a parallel kinematic scanner are commanded to follow a combination of two sinusoids with identical amplitudes and different frequencies. We design an internal-model-based controller to enhance the tracking performance of this pattern and implement the scheme on a microelectromechanical system scanner. The results reveal high-precision tracking of the rosette pattern in order to acquire time-lapsed atomic force microscope images at the rate of 10 frames/s.
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