The Influence of Plasma-Assisted Production and Milling Processes of DLC Flakes on Their Size, Composition and Chemical Structure

Barrier Diamond-like Carbon Coatings on Polydimethylsiloxane Substrate

The plasma modification of polydimethylsiloxane (PDMS) substrates is one way to change their surface geometry, which enables the formation of wrinkles. However, these changes are very often accompanied by the process of restoring the hydrophobic properties of the modified material. In this work, the RF PACVD device (radio frequency plasma-assisted chemical vapor deposition) was used, with which the plasma treatment of PDMS substrates was carried out in argon, nitrogen, oxygen, and methane atmospheres at variable negative biases ranging from 100 V to 500 V. The obtained results show the stability of contact angles for deionized water only in the case of surfaces modified by diamond-like carbon (DLC) coatings. The influence of the applied production conditions on the thickness (between 10 and 30 nm) and chemical structure (ID/IG between 0.41 and 0.8) of DLC coatings is discussed. In the case of plasma treatments with other gases introduced into the working chamber, the phenomenon of changing from hydrophilic to hydrophobic properties after the modification processes was observed. The presented results confirm the barrier nature of the DLC coatings produced on the PDMS substrate.

Impact of Plasma Pre-Treatment on the Tribological Properties of DLC Coatings on PDMS Substrates

The processes of the deposition of carbon coatings on PDMS (polydimethylsiloxane) substrates using plasma techniques are widely used in a large number of studies, in applications ranging from electronic to biological. That is why the potential improvement of their functional properties, including tribological properties, seems very interesting. This paper presents an analysis of the impact of plasma pre-treatment on the properties of the produced diamond-like carbon (DLC) coatings, including changes in the coefficients of friction and wear rates. The initial modification processes were performed using two different techniques based on low-pressure plasma (RF PACVD, radio-frequency plasma-assisted chemical vapour deposition) and dielectric barrier discharge (DBD) plasma. The effects of the above-mentioned treatments on the geometric structure of the PDMS surface and its water contact angles and stability over time were determined. The basic properties of the DLC coatings produced on unmodified substrates were compared to those of the coatings subjected to plasma pre-treatment. The most interesting effects in terms of tribological properties were achieved after the DBD process and production of DLC coatings, achieving a decrease in wear rates to 2.45 × 10⁻⁸ mm³/Nm. The tests demonstrate that the cross-linking of the polymer substrate occurs during plasma pre-treatment.