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Chen J, Zhu BH, Yang S, Yue W, Lee DM, Kim ES, Kim NY. Design and Micro-Nano Fabrication of a GaAs-Based On-Chip Miniaturized Bandpass Filter with Intertwined Inductors and Circinate Capacitor Using Integrated Passive Device Technology. NANOMATERIALS 2022; 12:nano12030347. [PMID: 35159692 PMCID: PMC8840602 DOI: 10.3390/nano12030347] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/28/2021] [Revised: 01/19/2022] [Accepted: 01/20/2022] [Indexed: 01/27/2023]
Abstract
In this study, we propose a miniaturized bandpass filter (BPF) developed by combining an approximate circular (36-gon) winding inductor, a circinate capacitor, and five air-bridge structures fabricated on a gallium arsenide (GaAs) substrate using an integrated passive device (IPD) technology. We introduced air-bridge structures into the outer metal wire to improve the capacitance per unit volume while utilizing a miniaturized chip with dimensions 1538 μm × 800 μm (0.029 λ0 × 0.015 λ0) for the BPF. The pattern was designed and optimized by simulating different dimensional parameters, and the group delay and current density are presented. The equivalent circuit was modeled to analysis various parasitic effect. Additionally, we described the GaAs-based micro-nano scale fabrication process to elucidate the proposed IPD technology and the physical structure of the BPF. Measurements were conducted with a center frequency of 1.53 GHz (insertion loss of 0.53 dB) and a 3-dB fractional bandwidth (FBW) of 70.59%. The transmission zero was located at 4.16 GHz with restraint of 35.86 dB. Owing to the benefits from its miniaturized chip size and high performance, the proposed GaAs-based IPD BPF was verified as an excellent device for various S-band applications, such as satellite communication, keyless vehicle locks, wireless headphones, and radar.
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Affiliation(s)
- Jian Chen
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
| | - Bao-Hua Zhu
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
| | - Shan Yang
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
| | - Wei Yue
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
| | - Dong-Min Lee
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
| | - Eun-Seong Kim
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
- Correspondence: (E.-S.K.); (N.-Y.K.)
| | - Nam-Young Kim
- Radio Frequency Integrated Circuit Center, Kwangwoon University, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea; (J.C.); (B.-H.Z.); (S.Y.); (W.Y.); (D.-M.L.)
- NDAC Centre, Kwangwoon University, 20 Kwangwoon-ro, Wolgye-Dong, Nowon-Ku, Seoul 139-701, Korea
- Correspondence: (E.-S.K.); (N.-Y.K.)
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