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Borodaenko Y, Khairullina E, Levshakova A, Shmalko A, Tumkin I, Gurbatov S, Mironenko A, Mitsai E, Modin E, Gurevich EL, Kuchmizhak AA. Noble-Metal Nanoparticle-Embedded Silicon Nanogratings via Single-Step Laser-Induced Periodic Surface Structuring. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1300. [PMID: 37110886 PMCID: PMC10146168 DOI: 10.3390/nano13081300] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/31/2023] [Revised: 03/30/2023] [Accepted: 04/05/2023] [Indexed: 06/19/2023]
Abstract
Here, we show that direct femtosecond laser nanostructuring of monocrystalline Si wafers in aqueous solutions containing noble-metal precursors (such as palladium dichloride, potassium hexachloroplatinate, and silver nitrate) allows for the creation of nanogratings decorated with mono- (Pd, Pt, and Ag) and bimetallic (Pd-Pt) nanoparticles (NPs). Multi-pulse femtosecond-laser exposure was found to drive periodically modulated ablation of the Si surface, while simultaneous thermal-induced reduction of the metal-containing acids and salts causes local surface morphology decoration with functional noble metal NPs. The orientation of the formed Si nanogratings with their nano-trenches decorated with noble-metal NPs can be controlled by the polarization direction of the incident laser beam, which was justified, for both linearly polarized Gaussian and radially (azimuthally) polarized vector beams. The produced hybrid NP-decorated Si nanogratings with a radially varying nano-trench orientation demonstrated anisotropic antireflection performance, as well as photocatalytic activity, probed by SERS tracing of the paraaminothiophenol-to-dimercaptoazobenzene transformation. The developed single-step maskless procedure of liquid-phase Si surface nanostructuring that proceeds simultaneously with the localized reduction of noble-metal precursors allows for the formation of hybrid Si nanogratings with controllable amounts of mono- and bimetallic NPs, paving the way toward applications in heterogeneous catalysis, optical detection, light harvesting, and sensing.
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Affiliation(s)
- Yulia Borodaenko
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, 690041 Vladivostok, Russia
| | - Evgeniia Khairullina
- Institute of Chemistry, Saint Petersburg State University, 7/9 Universitetskaya Nab., 199034 St. Petersburg, Russia
| | - Aleksandra Levshakova
- Institute of Chemistry, Saint Petersburg State University, 7/9 Universitetskaya Nab., 199034 St. Petersburg, Russia
| | - Alexander Shmalko
- Interdisciplinary Resource Center for Nanotechnology of Research Park of SPbSU, Saint Petersburg State University, 7/9 Universitetskaya Nab., 199034 St. Petersburg, Russia
| | - Ilya Tumkin
- Institute of Chemistry, Saint Petersburg State University, 7/9 Universitetskaya Nab., 199034 St. Petersburg, Russia
| | - Stanislav Gurbatov
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, 690041 Vladivostok, Russia
| | | | - Eugeny Mitsai
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, 690041 Vladivostok, Russia
| | - Evgeny Modin
- CIC nanoGUNE BRTA, E-20018 Donostia-San Sebastian, Spain
| | - Evgeny L. Gurevich
- Laser Center (LFM), University of Applied Sciences Munster, Stegerwaldstraße 39, 48565 Steinfurt, Germany
| | - Aleksandr A. Kuchmizhak
- Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences, 690041 Vladivostok, Russia
- Far Eastern Federal University, 690090 Vladivostok, Russia
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Zhang X, Hou Z, Song J, Jin Z, Yao Z. Material Removal Capability and Profile Quality Assessment on Silicon Carbide Micropillar Fabrication with a Femtosecond Laser. MATERIALS (BASEL, SWITZERLAND) 2022; 16:244. [PMID: 36614584 PMCID: PMC9822181 DOI: 10.3390/ma16010244] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/30/2022] [Revised: 12/18/2022] [Accepted: 12/22/2022] [Indexed: 06/17/2023]
Abstract
Silicon carbide (SiC) has a variety of applications because of its favorable chemical stability and outstanding physical characteristics, such as high hardness and high rigidity. In this study, a femtosecond laser with a spiral scanning radial offset of 5 μm and a spot radius of 6 μm is utilized to process micropillars on a SiC plate. The influence of pulsed laser beam energies and laser translation velocities on the micropillar profiles, dimensions, surface roughness Ra, and material removal capability (MRC) of micropillars was investigated. The processing results indicate that the micropillar has the best perpendicularity, with a micropillar bottom angle of 75.59° under a pulsed beam energy of 50 μJ in the range of 10-70 μJ, with a pulsed repetition rate of 600 kHz and a translation velocity of 0.1 m/s. As the laser translation velocity increases between 0.2 m/s and 1.0 m/s under a fixed pulsed beam energy of 50 μJ and a constant pulsed repetition rate of 600 kHz, the micropillar height decreases from 119.88 μm to 81.79 μm, with the MRC value increasing from 1.998 μm3/μJ to 6.816 μm3/μJ, while the micropillar bottom angle increases from 68.87° to 75.59°, and the Ra value diminishes from 0.836 μm to 0.341 μm. It is suggested that a combination of a higher pulsed laser beam energy with a faster laser translation speed is recommended to achieve micropillars with the same height, as well as an improved processing efficiency and surface finish.
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Affiliation(s)
- Xifang Zhang
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Zhibao Hou
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Jiacheng Song
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Zhiyi Jin
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Zhenqiang Yao
- School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China
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Syubaev S, Mitsai E, Starikov S, Kuchmizhak A. Laser-printed hemispherical silicon Mie resonators. OPTICS LETTERS 2021; 46:2304-2307. [PMID: 33988605 DOI: 10.1364/ol.425809] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/23/2021] [Accepted: 04/16/2021] [Indexed: 06/12/2023]
Abstract
Subwavelength nanostructures made of high-index low-loss materials have revolutionized the fields of linear and nonlinear nanophotonics, stimulating growing demands for efficient and inexpensive fabrication technologies. Here, we demonstrate high-precision and reproducible printing of hemispherical Si nanoparticles (NPs) via controllable dewetting of glass-supported $\alpha$-Si films driven by a single femtosecond laser pulse. The diameter of the formed nanocrystalline NPs can be fully controlled by initial $\alpha$-Si film thickness as well as lateral size of the laser spot and can be predicted by a simple empirical model based on conservation of energy and mass. A resonant optical response associated with Mie-type resonances supported by hemispherical NPs was confirmed by combining numerical modeling with optical microspectroscopy. Inexpensive and high-performing direct laser printing of nanocrystalline Si Mie resonators with a user-defined arrangement opens a pathway for various applications in optical sensing and nonlinear nanophotonics.
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