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For: Zhao L, Shang H, Wang D, Liu Y, Tian B, Wang W. Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications. Materials (Basel) 2020;14:E128. [PMID: 33396814 PMCID: PMC7796197 DOI: 10.3390/ma14010128] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/27/2020] [Revised: 12/18/2020] [Accepted: 12/28/2020] [Indexed: 11/25/2022]
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