1
|
Strak P, Miller W, Krukowski S. Charge-Controlled Energy Optimization of the Reconstruction of Semiconductor Surfaces: sp3- sp2 Transformation of Stoichiometric GaN(0001) Surface to (4 × 4) Pattern. MATERIALS (BASEL, SWITZERLAND) 2024; 17:2614. [PMID: 38893877 PMCID: PMC11173834 DOI: 10.3390/ma17112614] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/26/2024] [Revised: 05/24/2024] [Accepted: 05/26/2024] [Indexed: 06/21/2024]
Abstract
It was demonstrated by ab initio calculations that energy optimization in the reconstruction of semiconductor surfaces is controlled by the global charge balance. The charge control was discovered during simulations of the influence of heavy doping in the GaN bulk, which changes sp3 to sp2 ratio in the reconstruction of stoichiometric GaN(0001), i.e., a Ga-polar surface. Thus, the reconstruction is not limited to the charge in the surface only; it can be affected by the charge in the bulk. The discovered new reconstruction of the GaN(0001) surface is (4 × 4), which is different from the previously reported (2 × 1) pattern. The undoped GaN reconstruction is surface charge controlled; accordingly, (3/8) top-layer Ga atoms remain in a standard position with sp3 hybridized bonding, while the remaining (5/8) top-layer Ga atoms are shifted into the plane of N atoms with sp2 hybridized bonding. The change in the charge balance caused by doping in the bulk leads to a change or disappearance of the reconstruction pattern.
Collapse
Affiliation(s)
- Pawel Strak
- Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland;
| | - Wolfram Miller
- Leibniz Institute for Crystal Growth (IKZ), Max-Born-Str. 2, D-12489 Berlin, Germany;
| | - Stanislaw Krukowski
- Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland;
| |
Collapse
|
2
|
Adhikari S, Kremer F, Lysevych M, Jagadish C, Tan HH. Core-shell GaN/AlGaN nanowires grown by selective area epitaxy. NANOSCALE HORIZONS 2023; 8:530-542. [PMID: 36825590 DOI: 10.1039/d2nh00500j] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
GaN/AlGaN core-shell nanowires with various Al compositions have been grown on GaN nanowire array using selective area metal organic chemical vapor deposition technique. Growth of the AlGaN shell using pure N2 carrier gas resulted in a smooth surface for the nonpolar m-plane sidewalls with superior optical properties, whereas, growth using a mixed N2/H2 carrier gas resulted in a striated surface similar to the commonly observed morphology in the growth of nonpolar III-nitrides. The Al compositions in the AlGaN shells are found to be less than the gas phase input ratio. The systematic reduction in efficiency of Al incorporation in the AlGaN shells with increasing the Al molar flow in the gas phase is attributed to geometric loss, strain-limited Al incorporation, and increased gas phase parasitic reactions. Defect-related luminescence has been observed for AlGaN shells with Al content ≥ 30% and the origin of the defect luminescence has been determined as the (VIII-2ON)1- complex. Microstructural analysis of the AlGaN shells revealed that the dominant defects are partial dislocations. Growth of the nonpolar m-plane AlxGa1-xN/AlyGa1-yN quantum wells on the sidewalls of the GaN nanowires produced arrays with excellent morphology and optical emission, which demonstrated the viability of such a growth scheme for large area efficient ultraviolet LEDs as well as for next generation ultraviolet micro-LEDs.
Collapse
Affiliation(s)
- Sonachand Adhikari
- Department of Electronic Materials Engineering, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia.
- Council of Scientific & Industrial Research - Central Electronics Engineering Research Institute, Pilani, Rajasthan 333031, India
| | - Felipe Kremer
- Centre for Advanced Microscopy, The Australian National University, Canberra, Australian Capital Territory 2600, Australia
| | - Mykhaylo Lysevych
- Australian National Fabrication Facility ACT Node, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia
| | - Chennupati Jagadish
- Department of Electronic Materials Engineering, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia.
- Australian Research Council Centre of Excellence for Transformative Meta-Optical Systems, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia
| | - Hark Hoe Tan
- Department of Electronic Materials Engineering, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia.
- Australian Research Council Centre of Excellence for Transformative Meta-Optical Systems, Research School of Physics, The Australian National University, Canberra, Australian Capital Territory 2600, Australia
| |
Collapse
|
3
|
Yutomo EB, Noor FA, Winata T. Effect of Ni atomic fraction on active species of graphene growth on Cu–Ni alloy catalysts: a density functional theory study. Phys Chem Chem Phys 2023; 25:708-723. [DOI: 10.1039/d2cp04621k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/12/2022]
Abstract
The CH and C monomers on the surface are the active species on Cu–Ni catalysts with low Ni atomic fractions. In contrast, the C monomer species on the subsurface acts as an active species on a Cu–Ni catalyst with a high Ni atomic fraction.
Collapse
Affiliation(s)
- Erik Bhekti Yutomo
- Physics of Electronic Materials Research Division, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung, 40132, Indonesia
| | - Fatimah Arofiati Noor
- Physics of Electronic Materials Research Division, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung, 40132, Indonesia
| | - Toto Winata
- Physics of Electronic Materials Research Division, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung, 40132, Indonesia
| |
Collapse
|
4
|
Yosho D, Matsuo Y, Kusaba A, Kempisty P, Kangawa Y, Murakami H, Koukitu A. Facet stability of GaN during tri-halide vapor phase epitaxy: an ab initio-based approach. CrystEngComm 2021. [DOI: 10.1039/d0ce01683g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
An ab initio-based approach is used to study the facet stability of GaN during THVPE. The surface phase diagrams as functions of temperature and pressure are determined. Wulff construction is used to predict the crystal shape.
Collapse
Affiliation(s)
- Daichi Yosho
- Department of Aeronautics and Astronautics
- Kyushu University
- Fukuoka 816-8580
- Japan
| | - Yuriko Matsuo
- Research Institute for Applied Mechanics
- Kyushu University
- Fukuoka 816-8580
- Japan
| | - Akira Kusaba
- Research Institute for Applied Mechanics
- Kyushu University
- Fukuoka 816-8580
- Japan
| | - Pawel Kempisty
- Research Institute for Applied Mechanics
- Kyushu University
- Fukuoka 816-8580
- Japan
- Institute of High Pressure Physics
| | - Yoshihiro Kangawa
- Department of Aeronautics and Astronautics
- Kyushu University
- Fukuoka 816-8580
- Japan
- Research Institute for Applied Mechanics
| | - Hisashi Murakami
- Department of Applied Chemistry
- Tokyo University of Agriculture and Technology
- Tokyo 184-8588
- Japan
| | - Akinori Koukitu
- Department of Applied Chemistry
- Tokyo University of Agriculture and Technology
- Tokyo 184-8588
- Japan
| |
Collapse
|
5
|
Li Z, Zhang L, Liu Y, Shao C, Gao Y, Fan F, Wang J, Li J, Yan J, Li R, Li C. Surface‐Polarity‐Induced Spatial Charge Separation Boosts Photocatalytic Overall Water Splitting on GaN Nanorod Arrays. Angew Chem Int Ed Engl 2020; 59:935-942. [DOI: 10.1002/anie.201912844] [Citation(s) in RCA: 67] [Impact Index Per Article: 16.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/08/2019] [Indexed: 11/08/2022]
Affiliation(s)
- Zheng Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Liang Zhang
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Yong Liu
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Chenyi Shao
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Yuying Gao
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Fengtao Fan
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Junxi Wang
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Jinmin Li
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Janchang Yan
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Rengui Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Can Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| |
Collapse
|
6
|
Li Z, Zhang L, Liu Y, Shao C, Gao Y, Fan F, Wang J, Li J, Yan J, Li R, Li C. Surface‐Polarity‐Induced Spatial Charge Separation Boosts Photocatalytic Overall Water Splitting on GaN Nanorod Arrays. Angew Chem Int Ed Engl 2019. [DOI: 10.1002/ange.201912844] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Affiliation(s)
- Zheng Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Liang Zhang
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Yong Liu
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Chenyi Shao
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Yuying Gao
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
- University of Chinese Academy of Sciences Beijing 100049 China
| | - Fengtao Fan
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Junxi Wang
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Jinmin Li
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Janchang Yan
- Semiconductor Lighting Technology Research and Development CenterInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
| | - Rengui Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| | - Can Li
- State Key Laboratory of CatalysisDalian National Laboratory for Clean EnergyDalian Institute of Chemical PhysicsChinese Academy of Sciences Dalian 116023 China
| |
Collapse
|
7
|
CH₄ Adsorption Probability on GaN(0001) and (000-1) during Metalorganic Vapor Phase Epitaxy and Its Relationship to Carbon Contamination in the Films. MATERIALS 2019; 12:ma12060972. [PMID: 30909584 PMCID: PMC6470845 DOI: 10.3390/ma12060972] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/25/2019] [Revised: 03/19/2019] [Accepted: 03/21/2019] [Indexed: 11/16/2022]
Abstract
Suppression of carbon contamination in GaN films grown using metalorganic vapor phase epitaxy (MOVPE) is a crucial issue in its application to high power and high frequency electronic devices. To know how to reduce the C concentration in the films, a sequential analysis based on first principles calculations is performed. Thus, surface reconstruction and the adsorption of the CH₄ produced by the decomposition of the Ga source, Ga(CH₃)₃, and its incorporation into the GaN sub-surface layers are investigated. In this sequential analysis, the dataset of the adsorption probability of CH₄ on reconstructed surfaces is indispensable, as is the energy of the C impurity in the GaN sub-surface layers. The C adsorption probability is obtained based on steepest-entropy-ascent quantum thermodynamics (SEAQT). SEAQT is a thermodynamic ensemble-based, non-phenomenological framework that can predict the behavior of non-equilibrium processes, even those far from equilibrium. This framework is suitable especially when one studies the adsorption behavior of an impurity molecule because the conventional approach, the chemical potential control method, cannot be applied to a quantitative analysis for such a system. The proposed sequential model successfully explains the influence of the growth orientation, GaN(0001) and (000-1), on the incorporation of C into the film. This model can contribute to the suppression of the C contamination in GaN MOVPE.
Collapse
|
8
|
Robin Y, Evropeitsev EA, Shubina TV, Kirilenko DA, Davydov VY, Smirnov AN, Toropov AA, Eliseyev IA, Bae SY, Kushimoto M, Nitta S, Ivanov SV, Amano H. Localization and transient emission properties in InGaN/GaN quantum wells of different polarities within core-shell nanorods. NANOSCALE 2018; 11:193-199. [PMID: 30525165 DOI: 10.1039/c8nr05863f] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Transient photoluminescence (PL) characteristics and localization phenomena in InGaN/GaN core-shell nanorods (NRs) were investigated from 6 K up to 285 K. The NRs exhibit three well-defined PL bands in the near-UV, blue, and green range ascribed to the emission of quantum well (QW) areas situated at the (1.00) sidewalls, (10.1) top facets, and (00.1) tip, respectively. At low temperature, time-resolved PL shows a fast decay time of about 0.5 ns for the semi- and non-polar QWs, while the polar QWs exhibit at least a twice-longer time. Rapid delocalization of carriers above 50 K indicates shallow potential fluctuations in the QWs. At room temperature, the characteristic fast PL decay time of the three QW bands stabilizes around 300 ps. The slow decaying PL components have different characteristic decay times that are explained by additional localization at basal stacking faults (BSFs), taking into account the quantum confined Stark effect. In addition, narrow excitonic luminescence lines are observed in the BSF-enriched polar QWs, providing direct evidence of the impact of the BSF/QW crossings on the optical properties of the NRs. A PL rise time of about 100 ps does not show any deviation between bands. These findings are suggestive of similar transport mechanisms in temperature equilibrium without inter-facet transport between different QWs. We believe that predictable transient characteristics can play a key role in creating uniform NR ensembles for device applications.
Collapse
Affiliation(s)
- Y Robin
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Japan.
| | | | | | | | | | | | | | | | | | | | | | | | | |
Collapse
|
9
|
Sone J, Uematsu K, Matsufuji Y, Oshima M, Yamada K, Higashi M. Analysis of Gas Phase Reaction Pathways for InN Metal Organic Vapor Phase Epitaxy. JOURNAL OF CHEMICAL ENGINEERING OF JAPAN 2018. [DOI: 10.1252/jcej.17we288] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Junji Sone
- Faculty of Engineering, Tokyo Polytechnic University
| | - Kouta Uematsu
- Faculty of Engineering, Tokyo Polytechnic University
| | | | - Masato Oshima
- Faculty of Engineering, Tokyo Polytechnic University
| | | | | |
Collapse
|
10
|
Insight into the performance of multi-color InGaN/GaN nanorod light emitting diodes. Sci Rep 2018; 8:7311. [PMID: 29743644 PMCID: PMC5943402 DOI: 10.1038/s41598-018-25473-x] [Citation(s) in RCA: 16] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/29/2018] [Accepted: 04/20/2018] [Indexed: 11/30/2022] Open
Abstract
We report on the thorough investigation of light emitting diodes (LEDs) made of core-shell nanorods (NRs) with InGaN/GaN quantum wells (QWs) in the outer shell, which are grown on patterned substrates by metal-organic vapor phase epitaxy. The multi-bands emission of the LEDs covers nearly the whole visible region, including UV, blue, green, and orange ranges. The intensity of each emission is strongly dependent on the current density, however the LEDs demonstrate a rather low color saturation. Based on transmission electron microscopy data and comparing them with electroluminescence and photoluminescence spectra measured at different excitation powers and temperatures, we could identify the spatial origination of each of the emission bands. We show that their wavelengths and intensities are governed by different thicknesses of the QWs grown on different crystal facets of the NRs as well as corresponding polarization-induced electric fields. Also the InGaN incorporation strongly varies along the NRs, increasing at their tips and corners, which provides the red shift of emission. With increasing the current, the different QW regions are activated successively from the NR tips to the side-walls, resulting in different LED colors. Our findings can be used as a guideline to design effectively emitting multi-color NR-LEDs.
Collapse
|
11
|
Kusaba A, Li G, von Spakovsky MR, Kangawa Y, Kakimoto K. Modeling the Non-Equilibrium Process of the Chemical Adsorption of Ammonia on GaN(0001) Reconstructed Surfaces Based on Steepest-Entropy-Ascent Quantum Thermodynamics. MATERIALS (BASEL, SWITZERLAND) 2017; 10:E948. [PMID: 28809816 PMCID: PMC5578314 DOI: 10.3390/ma10080948] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/21/2017] [Revised: 08/11/2017] [Accepted: 08/11/2017] [Indexed: 11/17/2022]
Abstract
Clearly understanding elementary growth processes that depend on surface reconstruction is essential to controlling vapor-phase epitaxy more precisely. In this study, ammonia chemical adsorption on GaN(0001) reconstructed surfaces under metalorganic vapor phase epitaxy (MOVPE) conditions (3Ga-H and Nad-H + Ga-H on a 2 × 2 unit cell) is investigated using steepest-entropy-ascent quantum thermodynamics (SEAQT). SEAQT is a thermodynamic-ensemble based, first-principles framework that can predict the behavior of non-equilibrium processes, even those far from equilibrium where the state evolution is a combination of reversible and irreversible dynamics. SEAQT is an ideal choice to handle this problem on a first-principles basis since the chemical adsorption process starts from a highly non-equilibrium state. A result of the analysis shows that the probability of adsorption on 3Ga-H is significantly higher than that on Nad-H + Ga-H. Additionally, the growth temperature dependence of these adsorption probabilities and the temperature increase due to the heat of reaction is determined. The non-equilibrium thermodynamic modeling applied can lead to better control of the MOVPE process through the selection of preferable reconstructed surfaces. The modeling also demonstrates the efficacy of DFT-SEAQT coupling for determining detailed non-equilibrium process characteristics with a much smaller computational burden than would be entailed with mechanics-based, microscopic-mesoscopic approaches.
Collapse
Affiliation(s)
- Akira Kusaba
- Department of Aeronautics and Astronautics, Kyushu University, Fukuoka 819-0395, Japan.
| | - Guanchen Li
- Department of Engineering Science, University of Oxford, Parks Road, Oxford OX1 3PJ, UK.
- Center for Energy Systems Research (CESR), Mechanical Engineering Department, Virginia Tech, Blacksburg, VA 24061, USA.
| | - Michael R von Spakovsky
- Center for Energy Systems Research (CESR), Mechanical Engineering Department, Virginia Tech, Blacksburg, VA 24061, USA.
| | - Yoshihiro Kangawa
- Department of Aeronautics and Astronautics, Kyushu University, Fukuoka 819-0395, Japan.
- Research Institute for Applied Mechanics (RIAM), Kyushu University, Fukuoka 816-8580, Japan.
- Center for Integrated Research of Future Electronics (CIRFE), Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan.
| | - Koichi Kakimoto
- Department of Aeronautics and Astronautics, Kyushu University, Fukuoka 819-0395, Japan.
- Research Institute for Applied Mechanics (RIAM), Kyushu University, Fukuoka 816-8580, Japan.
| |
Collapse
|
12
|
Kempisty P, Strąk P, Sakowski K, Kangawa Y, Krukowski S. Thermodynamic foundations of applications of ab initio methods for determination of the adsorbate equilibria: hydrogen at the GaN(0001) surface. Phys Chem Chem Phys 2017; 19:29676-29684. [DOI: 10.1039/c7cp05214f] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
This paper describes the equilibrium between vapor and the adsorbed layer at the surface in terms of pressure and temperature.
Collapse
Affiliation(s)
- Pawel Kempisty
- Institute of High Pressure Physics
- Polish Academy of Sciences
- 01-142 Warsaw
- Poland
- Center for Integrated Research of Future Electronics (CIRFE)
| | - Paweł Strąk
- Institute of High Pressure Physics
- Polish Academy of Sciences
- 01-142 Warsaw
- Poland
| | - Konrad Sakowski
- Institute of High Pressure Physics
- Polish Academy of Sciences
- 01-142 Warsaw
- Poland
| | - Yoshihiro Kangawa
- Center for Integrated Research of Future Electronics (CIRFE)
- Institute of Materials and Systems for Sustainability (IMaSS)
- Nagoya University
- Nagoya 464-8603
- Japan
| | - Stanisław Krukowski
- Institute of High Pressure Physics
- Polish Academy of Sciences
- 01-142 Warsaw
- Poland
| |
Collapse
|
13
|
Kong S, Wei H, Yang S, Li H, Feng Y, Chen Z, Liu X, Wang L, Wang Z. Morphology and structure controlled growth of one-dimensional AlN nanorod arrays by hydride vapor phase epitaxy. RSC Adv 2014. [DOI: 10.1039/c4ra09590a] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
|
14
|
Gaur R, Mishra L, Siddiqi MA, Atakan B. Ruthenium complexes as precursors for chemical vapor-deposition (CVD). RSC Adv 2014. [DOI: 10.1039/c4ra04701j] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
The progress in precursor chemistry for the chemical vapor deposition of ruthenium containing thin films is reviewed.
Collapse
Affiliation(s)
- Ruchi Gaur
- Department of Chemistry
- Faculty of Science
- Banaras Hindu University
- Varanasi-221005, India
| | - Lallan Mishra
- Department of Chemistry
- Faculty of Science
- Banaras Hindu University
- Varanasi-221005, India
| | - M. Aslam Siddiqi
- Thermodynamics
- IVG
- Faculty of Engineering, and CeNIDE
- University of Duisburg Essen
- 47057 Duisburg, Germany
| | - Burak Atakan
- Thermodynamics
- IVG
- Faculty of Engineering, and CeNIDE
- University of Duisburg Essen
- 47057 Duisburg, Germany
| |
Collapse
|