The Recent Development in Chemoresistive-Based Heterostructure Gas Sensor Technology, Their Future Opportunities and Challenges: A Review

Exploiting volatile fingerprints for bladder cancer diagnosis: A scoping review of metabolomics and sensor-based approaches

Bladder cancer (BC) represents a significant global health concern, for which early detection is essential to improve patient outcomes. This review evaluates the potential of the urinary volatile organic compounds (VOCs) as biomarkers for detecting and staging BC. The methods used include gas chromatography-mass spectrometry (GC-MS)-based metabolomics and electronic-nose (e-nose) sensors. The GC-MS studies that have been published reveal diverse results in terms of diagnostic performance. The sensitivities range from 27 % to an impressive 97 %, while specificities vary between 43 % and 94 %. Furthermore, the accuracies reported in these studies range from 80 to 89 %. In the urine of BC patients, a total of 80 VOCs were discovered to be significantly altered when compared to controls. These VOCs encompassed a variety of chemical classes such as alcohols, aldehydes, alkanes, aromatic compounds, fatty acids, ketones, and terpenoids, among others. Conversely, e-nose-based studies displayed sensitivities from 60 to 100 %, specificities from 53 to 96 %, and accuracies from 65 to 97 %. Interestingly, conductive polymer-based sensors performed better, followed by metal oxide semiconductor and optical sensors. GC-MS studies have shown improved performance in detecting early stages and low-grade tumors, providing valuable insights into staging. Based on these findings, VOC-based diagnostic tools hold great promise for early BC detection and staging. Further studies are needed to validate biomarkers and their classification performance. In the future, advancements in VOC profiling technologies may significantly contribute to improving the overall survival and quality of life for BC patients.

A hard mask process and alignment device aims to achieve high consistency and mass-scale production of gas sensors based on spraying hydrothermal gas sensing material

The material synthesized through the hydrothermal method has received extensive and in-depth study in recent years, with a large number of literature reporting their excellent performance in the fields of catalysis or gas sensitivity. In order to combine the hydrothermal material with micro-electro-mechanical system processes to achieve large-scale manufacturing of hydrothermal synthesized materials at the wafer-level, this paper proposes a series of processes for hard mask patterned electro-atomization spraying of hydrothermal materials and designs and manufactures an alignment device that achieves the alignment of silicon hard mask and electrode wafers based on the vacuum clamping principle. Through experiments, it has been verified that this device can achieve micrometer-level alignment between the hard mask and the electrode wafer. By conducting electro-atomization spraying, hard mask patterning, optical microscopy, and confocal laser scanning microscope measurements, as well as gas sensitivity testing on a CeO2/TiO2 hydrothermal composite material published in our previous research, it was further verified that this process has good film formation consistency (Sa and Sq are both less than 3 μm and the average film thickness deviation is less than 5 μm), excellent and consistent gas sensitivity performance, and good long-term working stability. This article provides a promising process method for the large-scale production of hydrothermal synthesis materials at the wafer-level.

Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors

During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of gas sensor integration, it is necessary that future devices can be manufactured using a fabrication technology which is also compatible with the processes applied to digital logic transistors. This will likely involve adopting the mature complementary metal oxide semiconductor (CMOS) fabrication technique or a technique which is compatible with CMOS due to the inherent low costs, scalability, and potential for mass production that this technology provides. While chemiresistive semiconductor metal oxide (SMO) gas sensors have been the principal semiconductor-based gas sensor technology investigated in the past, resulting in their eventual commercialization, they need high-temperature operation to provide sufficient energies for the surface chemical reactions essential for the molecular detection of gases in the ambient. Therefore, the integration of a microheater in a MEMS structure is a requirement, which can be quite complex. This is, therefore, undesirable and room temperature, or at least near-room temperature, solutions are readily being investigated and sought after. Room-temperature SMO operation has been achieved using UV illumination, but this further complicates CMOS integration. Recent studies suggest that two-dimensional (2D) materials may offer a solution to this problem since they have a high likelihood for integration with sophisticated CMOS fabrication while also providing a high sensitivity towards a plethora of gases of interest, even at room temperature. This review discusses many types of promising 2D materials which show high potential for integration as channel materials for digital logic field effect transistors (FETs) as well as chemiresistive and FET-based sensing films, due to the presence of a sufficiently wide band gap. This excludes graphene from this review, while recent achievements in gas sensing with graphene oxide, reduced graphene oxide, transition metal dichalcogenides (TMDs), phosphorene, and MXenes are examined.