A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

Thermal Calibration of Triaxial Accelerometer for Tilt Measurement

The application of MEMS accelerometers used to measure inclination is constrained by their temperature dependence, and each accelerometer needs to be calibrated individually to increase stability and accuracy. This paper presents a calibration and thermal compensation method for triaxial accelerometers that aims to minimize cost and processing time while maintaining high accuracy. First, the number of positions to perform the calibration procedure is optimized based on the Levenberg-Marquardt algorithm, and then, based on this optimized calibration number, thermal compensation is performed based on the least squares method, which is necessary for environments with large temperature variations, since calibration parameters change at different temperatures. The calibration procedures and algorithms were experimentally validated on marketed accelerometers. Based on the optimized calibration method, the calibrated results achieved nearly 100 times improvement. Thermal drift calibration experiments on the triaxial accelerometer show that the thermal compensation scheme in this paper can effectively reduce drift in the temperature range of -40 °C to 60 °C. The temperature drifts of x- and y-axes are reduced from -13.2 and 11.8 mg to -0.9 and -1.1 mg, respectively. The z-axis temperature drift is reduced from -17.9 to 1.8 mg. We have conducted various experiments on the proposed calibration method and demonstrated its capacity to calibrate the sensor frame error model (SFEM) parameters. This research proposes a new low-cost and efficient strategy for increasing the practical applicability of triaxial accelerometers.