Yariesbouei M, Sanders RGP, Wiegerink RJ, Lötters JC. Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor.
SENSORS (BASEL, SWITZERLAND) 2023;
23:4062. [PMID:
37112403 PMCID:
PMC10141069 DOI:
10.3390/s23084062]
[Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/14/2022] [Revised: 01/13/2023] [Accepted: 04/11/2023] [Indexed: 06/19/2023]
Abstract
This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0-150 g/h for water, 0-38 g/h for isopropyl alcohol (IPA), and 0-50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.
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