High-Speed Manipulation of Microobjects Using an Automated Two-Fingered Microhand for 3D Microassembly

MiGriBot: A miniature parallel robot with integrated gripping for high-throughput micromanipulation

Although robotic micromanipulation using microtweezers has been widely explored, the current manipulation throughput hardly exceeds one operation per second. Increasing the manipulation throughput is thus a key factor for the emergence of robotized microassembly industries. This article presents MiGriBot (Millimeter Gripper Robot), a miniaturized parallel robot with a configurable platform and soft joints, designed to perform pick-and-place operations at the microscale. MiGriBot combines in a single robot the benefits of a parallel kinematic architecture with a configurable platform and the use of soft joints at the millimeter scale. The configurable platform of the robot provides an internal degree of freedom that can be used to actuate microtweezers using piezoelectric bending actuators located at the base of the robot, which notably reduces the robot's inertia. The soft joints make it possible to miniaturize the mechanism and to avoid friction. These benefits enable MiGriBot to reach a throughput of 10 pick-and-place cycles per second of micrometer-sized objects, with a precision of 1 micrometer.

Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young’s Modulus of MEMS Surfaces

Adhesion is a critical factor in microelectromechanical systems (MEMSs) and is influenced by many parameters. In important fields, such as microassembly, an improved understanding of adhesion can result in higher precision. This study examines the influence of deposition of gold and titanium onto the atomic force microscope (AFM) tips in adhesion forces and Young’s modulus, between a few MEMS substrates (silicon, gold, and silver) and the AFM tips. It was found that, except for gold substrate, an AFM tip coated with gold has the highest adhesion force of 42.67 nN for silicon substrates, whereas the titanium-coated AFM tip decreases the force for all the samples. This study suggests that such changes must be taken into account while studying the adhesion force. The final results indicate that utilizing gold substrate with titanium AFM tip led to the lowest adhesion force, which could be useful in adhesion force measurement during microassembly.

Artificial Intelligence Algorithms Enable Automated Characterization of the Positive and Negative Dielectrophoretic Ranges of Applied Frequency

The present work describes the phenomenological approach to automatically determine the frequency range for positive and negative dielectrophoresis (DEP)—an electrokinetic force that can be used for massively parallel micro- and nano-assembly. An experimental setup consists of the microfabricated chip with gold microelectrode array connected to a function generator capable of digitally controlling an AC signal of 1 V (peak-to-peak) and of various frequencies in the range between 10 kHz and 1 MHz. The suspension of latex microbeads (3-μm diameter) is either attracted or repelled from the microelectrodes under the influence of DEP force as a function of the applied frequency. The video of the bead movement is captured via a digital camera attached to the microscope. The OpenCV software package is used to digitally analyze the images and identify the beads. Positions of the identified beads are compared for successive frames via Artificial Intelligence (AI) algorithm that determines the cloud behavior of the microbeads and algorithmically determines if the beads experience attraction or repulsion from the electrodes. Based on the determined behavior of the beads, algorithm will either increase or decrease the applied frequency and implement the digital command of the function generator that is controlled by the computer. Thus, the operation of the study platform is fully automated. The AI-guided platform has determined that positive DEP (pDEP) is active below 500 kHz frequency, negative DEP (nDEP) is evidenced above 1 MHz frequency and the crossover frequency is between 500 kHz and 1 MHz. These results are in line with previously published experimentally determined frequency-dependent DEP behavior of the latex microbeads. The phenomenological approach assisted by live AI-guided feedback loop described in the present study will assist the active manipulation of the system towards the desired phenomenological outcome such as, for example, collection of the particles at the electrodes, even if, due to the complexity and plurality of the interactive forces, model-based predictions are not available.

Manipulation of Miniature and Microminiature Bodies on a Harmonically Oscillating Platform by Controlling Dry Friction

Currently used nonprehensile manipulation systems that are based on vibrational techniques employ temporal (vibrational) asymmetry, spatial asymmetry, or force asymmetry to provide and control a directional motion of a body. This paper presents a novel method of nonprehensile manipulation of miniature and microminiature bodies on a harmonically oscillating platform by creating a frictional asymmetry through dynamic dry friction control. To theoretically verify the feasibility of the method and to determine the control parameters that define the motion characteristics, a mathematical model was developed, and modeling was carried out. Experimental setups for miniature and microminiature bodies were developed for nonprehensile manipulation by dry friction control, and manipulation experiments were carried out to experimentally verify the feasibility of the proposed method and theoretical findings. By revealing how characteristic control parameters influence the direction and velocity, the modeling results theoretically verified the feasibility of the proposed method. The experimental investigation verified that the proposed method is technically feasible and can be applied in practice, as well as confirmed the theoretical findings that the velocity and direction of the body can be controlled by changing the parameters of the function for dynamic dry friction control. The presented research enriches the classical theories of manipulation methods on vibrating plates and platforms, as well as the presented results, are relevant for industries dealing with feeding, assembling, or manipulation of miniature and microminiature bodies.

Bubbles in microfluidics: an all-purpose tool for micromanipulation

In recent decades, the integration of microfluidic devices and multiple actuation technologies at the microscale has greatly contributed to the progress of related fields. In particular, microbubbles are playing an increasingly important role in microfluidics because of their unique characteristics that lead to specific responses to different energy sources and gas-liquid interactions. Many effective and functional bubble-based micromanipulation strategies have been developed and improved, enabling various non-invasive, selective, and precise operations at the microscale. This review begins with a brief introduction of the morphological characteristics and formation of microbubbles. The theoretical foundations and working mechanisms of typical micromanipulations based on acoustic, thermodynamic, and chemical microbubbles in fluids are described. We critically review the extensive applications and the frontline advances of bubbles in microfluidics, including microflow patterns, position and orientation control, biomedical applications, and development of bubble-based microrobots. We lastly present an outlook to provide directions for the design and application of microbubble-based micromanipulation tools and attract the attention of relevant researchers to the enormous potential of microbubbles in microfluidics.