Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Deep learning for sub-Nyquist sampling scanning white light interferometry

This Letter introduces sub-Nyquist sampling vertical scanning white light interferometry (SWLI) using deep learning. The method designs Envelope-Deep Residual Shrinkage Networks with channel-wise thresholds (E-DRSN-cw), a network model extracting oversampling envelopes from undersampled signals. The model improves the training efficiency, accuracy, and robustness by following the soft thresholding nonlinear layer approach, pre-padding undersampled interference signals with zeros, using LayerNorm for augmenting inputs and labels, and predicting regression envelopes. Simulation data train the network, and experiments demonstrate its superior performance over classical methods in the accuracy and the robustness. The E-DRSN-cw provides a swift measurement solution for SWLI, removing the need for prior knowledge.

Pseudo Wigner-Ville distribution for 3D white light scanning interferometric measurement

White light scanning interferometry is a commonly used optical measurement method for three-dimensional (3D) surface profiles. In the case of large phase errors, accurate height values can generally be obtained indirectly from the interferometric signal envelope information derived using various envelope extraction methods. However, the current envelope extraction algorithms have the disadvantages of low robustness, increasing the half-width of the envelope information, and requiring correct parameter settings in advance. In this study, the pseudo Wigner-Ville distribution is modified and applied to white light scanning interferometric 3D measurement to avoid the above-mentioned drawbacks. Simulations and experiments are performed in a single-frequency mode (only the approximate central wave-number is used to guide both the proposed and wavelet transform methods). The simulation results prove that the proposed method has a 31.7% higher reconstruction accuracy than the wavelet transform method under a 25 dB signal to noise ratio condition. Concurrently, the proposed method is insensitive to the change in the central wavelength with a constant central wave-number parameter and has a good extraction effect for a long coherent length. The experiments measure standard step objects (VLSI standard, 1.761 ± 0.01 µm), and the reconstruction height error of the proposed method is 0.0035 µm. Simulations and experiments show that the proposed method can adaptively provide accurate envelope information after half-width reduction under the condition that only the approximate central wave-number a priori knowledge is used. Simultaneously, the proposed method is shown to be robust and effective.

Analysis and Optimization of a Microgripper Driven by Linear Ultrasonic Motors

This paper presents the vibration response analysis and optimal structural design of a microgripper driven by linear ultrasonic motors (LUMs) dedicated to improving end-point positioning accuracy. Based on structural vibration theory, a parametric vibration response model of the microgripper finger was established, and the relative sensitivities of the structural and material parameters that affect the vibration amplitude of the fingertip were calculated within the structural and material constraints. Then, according to the sensitivity calculation results, a multidimensional constrained nonlinear optimization model was constructed to suppress the vibration of the end-effector. The improved internal penalty function method combined with Newton iteration was adopted to obtain the optimal structural parameters. Finally, the vibration experimental results show that the vibration amplitude of the initial microgripper fingertip is 16.31 μm, and the value measured after optimization was 2.49 μm, exhibiting a reduction of 84.7%. Therefore, the proposed optimal design method can effectively restrain the vibration of the microgripper end-effector and improve manipulation stability.

Event based coherence scanning interferometry

Coherence scanning interferometry enables high precision measurements in manifold research and industry applications. In most modern systems, a digital camera (CCD/CMOS) is used to record the interference signals for each pixel. When measuring steep surfaces or using light sources with a broad wavelength spectrum, only a small area of the sensor captures useable interference signals in one frame, so a large fraction of pixels is unused. To overcome this problem and enable measurements with high dynamic range and high scan speeds, we propose the use of an event based image sensor. In these sensors, each pixel independently registers only changes in the signal, which leads to a continuous asynchronous pixel stream of information not based on fixed frame capturing. In this Letter, we show the signal generation, an implementation in a coherence scanning microscope in combination with the nanopositioning and nanometrology machine NPMM-200, and first measurements as promising results for event based interferometry.