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For: Li H, Lin Z, Guo Y, Song J, Huang R, Lin Z. The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines (Basel) 2021;12:mi12060637. [PMID: 34070734 PMCID: PMC8228809 DOI: 10.3390/mi12060637] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/26/2021] [Revised: 05/26/2021] [Accepted: 05/27/2021] [Indexed: 11/16/2022]

For:	Li H, Lin Z, Guo Y, Song J, Huang R, Lin Z. The Effect of Nitrogen Incorporation on the Optical Properties of Si-Rich a-SiCx Films Deposited by VHF PECVD. Micromachines (Basel) 2021;12:mi12060637. [PMID: 34070734 PMCID: PMC8228809 DOI: 10.3390/mi12060637] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/26/2021] [Revised: 05/26/2021] [Accepted: 05/27/2021] [Indexed: 11/16/2022]

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(The first 100,000 artilces are displayed in RCA.)