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Shen Z, Wang X, Li Q, Ge B, Jiang L, Tian J, Wu S. A High-Sensitivity Vacuum Diode Temperature Sensor Based on Barrier-Lowering Effect. MICROMACHINES 2022; 13:mi13020286. [PMID: 35208410 PMCID: PMC8876930 DOI: 10.3390/mi13020286] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/07/2022] [Revised: 02/03/2022] [Accepted: 02/07/2022] [Indexed: 02/01/2023]
Abstract
A new kind of temperature sensor based on a vacuum diode was proposed and numerically studied in this paper. This device operated under different electron emission mechanisms according to the electron density in the vacuum channel. The temperature determination ability of this device was only empowered when working in the electric-field-assisted thermionic emission regime (barrier-lowering effect). The simulated results indicated that the temperature-sensing range of this device was around 273 K–325 K with a supply current of 1 μA. To obtain a linear dependency of voltage on temperature, we designed a proportional-to-absolute-temperature (PTAT) circuit. The mathematic derivation of the PTAT voltage is presented in this study. The temperature-sensing sensitivity was calculated as 7.6 mV/K according to the measured I-U (current versus voltage) characteristic. The structure and principle of the device presented in this paper might provide an alternative method for the study of temperature sensors.
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Affiliation(s)
- Zhihua Shen
- School of Electronics and Information Engineering, Nantong Vocational University, Nantong 226007, China; (Q.L.); (B.G.); (L.J.)
- Correspondence: (Z.S.); (S.W.)
| | - Xiao Wang
- School of Electronic Information and Artificial Intelligence, Shaanxi University of Science and Technology, Xi’an 710049, China;
| | - Qiaoning Li
- School of Electronics and Information Engineering, Nantong Vocational University, Nantong 226007, China; (Q.L.); (B.G.); (L.J.)
| | - Bin Ge
- School of Electronics and Information Engineering, Nantong Vocational University, Nantong 226007, China; (Q.L.); (B.G.); (L.J.)
| | - Linlin Jiang
- School of Electronics and Information Engineering, Nantong Vocational University, Nantong 226007, China; (Q.L.); (B.G.); (L.J.)
| | - Jinshou Tian
- State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics of CAS, Xi’an 710119, China;
| | - Shengli Wu
- Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China
- Correspondence: (Z.S.); (S.W.)
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