A Novel Parallel Processing Model for Noise Reduction and Temperature Compensation of MEMS Gyroscope

Thermal calibration for triaxial gyroscope of MEMS-IMU based on segmented systematic method

With the progress of micro electromechanical system (MEMS) technology, the performance of MEMS inertial measurement unit (IMU) composed of gyroscopes and accelerometers has been improved. Among the inertial sensors, MEMS triaxial gyroscope plays an important role in attitude estimation, navigation and positioning of intelligent mobile terminals such as unmanned aerial vehicles and unmanned vehicles. However, the measured values of low and medium cost MEMS triaxial gyroscopes are mainly affected by temperature (or thermal effect) and random errors. As results, the drift errors correlated with temperature will reduce application accuracy of MEMS triaxial gyroscope. The traditional calibration method for thermal drift errors relies on the expensive equipment, such as turntable and the temperature control system, which increases the cost of calibration. Therefore, an effective thermal calibration method that is available when using low- or high-cost tools for MEMS triaxial gyroscope will be meaningful for majority users. Hence, this paper analyzed and established the thermal drift model of MEMS triaxial gyroscope, and proposed a segmented systematic calibration method based on 24 states according to this model. Simulation shows that the proposed method can obtain the results approaching the real parameter thermal drift curves. Calibration experiments and parameters test show that the max errors of attitude calculation are reduced to 10% of the results using the original parameters, which indicates that the effectiveness of the proposed method.

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

The reliability of MEMS inertial devices applied in complex environments involves interdisciplinary fields, such as structural mechanics, material mechanics and multi-physics field coupling. Nowadays, MEMS inertial devices are widely used in the fields of automotive industry, consumer electronics, aerospace and missile guidance, and a variety of reliability issues induced by complex environments arise subsequently. Hence, reliability analysis and design of MEMS inertial devices are becoming increasingly significant. Since the reliability issues of MEMS inertial devices are mainly caused by complex mechanical and thermal environments with intricate failure mechanisms, there are fewer reviews of related research in this field. Therefore, this paper provides an extensive review of the research on the reliability of typical failure modes and mechanisms in MEMS inertial devices under high temperature, temperature cycling, vibration, shock, and multi-physical field coupling environments in the last five to six years. It is found that though multiple studies exist examining the reliability of MEMS inertial devices under single stress, there is a dearth of research conducted under composite stress and a lack of systematic investigation. Through analyzing and summarizing the current research progress in reliability design, it is concluded that multi-physical field coupling simulation, theoretical modeling, composite stress experiments, and special test standards are important directions for future reliability research on MEMS inertial devices.

Research on Optical Fiber Ring Resonator Q Value and Coupling Efficiency Optimization

The coupling efficiency of the fiber ring resonator has an important influence on the scale factor of the resonant fiber gyroscope. In order to improve the scale factor of the gyroscope, the coupling efficiency of the fiber ring resonator and its influential factors on the scale factor of the gyroscope are analyzed and tested. The results show that the coupling efficiency is affected by both the splitting ratio of the coupler and the loss in the cavity. When the coupling efficiency approaches 0.75 at the under-coupling state, the scaling factor of the gyroscope is the highest. This provides a theoretical reference and an experimental basis for the enhancement of the scaling factor of the resonant fiber gyroscope with the fiber ring resonator as the sensitive unit, providing options for multiple applications such as sea, land, sky and space.

Temperature Drift Compensation for Four-Mass Vibration MEMS Gyroscope Based on EMD and Hybrid Filtering Fusion Method

This paper presents an improved empirical modal decomposition (EMD) method to eliminate the influence of the external environment, accurately compensate for the temperature drift of MEMS gyroscopes, and improve their accuracy. This new fusion algorithm combines empirical mode decomposition (EMD), a radial basis function neural network (RBF NN), a genetic algorithm (GA), and a Kalman filter (KF). First, the working principle of a newly designed four-mass vibration MEMS gyroscope (FMVMG) structure is given. The specific dimensions of the FMVMG are also given through calculation. Second, finite element analysis is carried out. The simulation results show that the FMVMG has two working modes: a driving mode and a sensing mode. The resonant frequency of the driving mode is 30,740 Hz, and the resonant frequency of the sensing mode is 30,886 Hz. The frequency separation between the two modes is 146 Hz. Moreover, a temperature experiment is performed to record the output value of the FMVMG, and the proposed fusion algorithm is used to analyse and optimise the output value of the FMVMG. The processing results show that the EMD-based RBF NN+GA+KF fusion algorithm can compensate for the temperature drift of the FMVMG effectively. The final result indicates that the random walk is reduced from 99.608°/h/Hz1/2 to 0.967814°/h/Hz1/2, and the bias stability is decreased from 34.66°/h to 3.589°/h. This result shows that the algorithm has strong adaptability to temperature changes, and its performance is significantly better than that of an RBF NN and EMD in compensating for the FMVMG temperature drift and eliminating the effect of temperature changes.

High-G MEMS Accelerometer Calibration Denoising Method Based on EMD and Time-Frequency Peak Filtering

In order to remove noise generated during the accelerometer calibration process, an accelerometer denoising method based on empirical mode decomposition (EMD) and time-frequency peak filtering (TFPF) is proposed in this paper. Firstly, a new design of the accelerometer structure is introduced and analyzed by finite element analysis software. Then, an algorithm combining EMD and TFPF is proposed for the first time to deal with the noise of the accelerometer calibration process. Specific steps taken are to remove the intrinsic mode function (IMF) component of the high frequency band after the EMD decomposition, and then to use the TFPF algorithm to process the IMF component of the medium frequency band; meanwhile, the IMF component of the low frequency band is reserved, and finally the signal is reconstructed. The reconstruction results show that the algorithm can effectively suppress the random noise generated during the calibration process. The results of spectrum analysis show that EMD + TFPF can effectively protect the characteristics of the original signal and that the error can be controlled within 0.5%. Finally, Allan variance is used to analyze the results of the three methods to verify the filtering effect. The results show that the filtering effect of EMD + TFPF is the most obvious, being 97.4% higher than the original data.

A Novel Temperature Drift Error Precise Estimation Model for MEMS Accelerometers Using Microstructure Thermal Analysis

Owing to the fact that the conventional Temperature Drift Error (TDE) precise estimation model for a MEMS accelerometer has incomplete Temperature-Correlated Quantities (TCQ) and inaccurate parameter identification to reduce its accuracy and real time, a novel TDE precise estimation model using microstructure thermal analysis is studied. First, TDE is traced precisely by analyzing the MEMS accelerometer’s structural thermal deformation to obtain complete TCQ, ambient temperature T and its square T2, ambient temperature variation ∆T and its square ∆T2, which builds a novel TDE precise estimation model. Second, a Back Propagation Neural Network (BPNN) based on Particle Swarm Optimization plus Genetic Algorithm (PSO-GA-BPNN) is introduced in its accurate parameter identification to avoid the local optimums of the conventional model based on BPNN and enhance its accuracy and real time. Then, the TDE test method is formed by analyzing heat conduction process between MEMS accelerometers and a thermal chamber, and a temperature experiment is designed. The novel model is implemented with TCQ and PSO-GA-BPNN, and its performance is evaluated by Mean Square Error (MSE). At last, the conventional and novel models are compared. Compared with the conventional model, the novel one’s accuracy is improved by 16.01% and its iterations are reduced by 99.86% at maximum. This illustrates that the novel model estimates the TDE of a MEMS accelerometer more precisely to decouple temperature dependence of Si-based material effectively, which enhances its environmental adaptability and expands its application in diverse complex conditions.