1
|
Guan R, Xu H, Lou Z, Zhao Z, Wang L. Design and Development of Metasurface Materials for Enhancing Photodetector Properties. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024:e2402530. [PMID: 38970208 DOI: 10.1002/advs.202402530] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/11/2024] [Revised: 05/20/2024] [Indexed: 07/08/2024]
Abstract
Recently, metasurface-based photodetectors (metaphotodetectors) have been developed and applied in various fields. Metasurfaces are artificial materials with unique properties that have emerged over the past decade, and photodetectors are powerful tools used to quantify incident electromagnetic wave information by measuring changes in the conductivity of irradiated materials. Through an efficient microstructural design, metasurfaces can effectively regulate numerous characteristics of electromagnetic waves and have demonstrated unique advantages in various fields, including holographic projection, stealth, biological image enhancement, biological sensing, and energy absorption applications. Photodetectors play a crucial role in military and civilian applications; therefore, efficient photodetectors are essential for optical communications, imaging technology, and spectral analysis. Metaphotodetectors have considerably improved sensitivity and noise-equivalent power and miniaturization over conventional photodetectors. This review summarizes the advantages of metaphotodetectors based on five aspects. Furthermore, the applications of metaphotodetectors in various fields including military and civil applications, are systematically discussed. It highlights the potential future applications and developmental trends of metasurfaces in metaphotodetectors, provides systematic guidance for their development, and establishes metasurfaces as a promising technology.
Collapse
Affiliation(s)
- Renquan Guan
- State Key Laboratory for Superlattices and Microstructures, Institution of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
| | - Hao Xu
- State Key Laboratory for Superlattices and Microstructures, Institution of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
| | - Zheng Lou
- State Key Laboratory for Superlattices and Microstructures, Institution of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Zhao Zhao
- Faculty of Physics, Northeast Normal University, Changchun, 130024, China
| | - Lili Wang
- State Key Laboratory for Superlattices and Microstructures, Institution of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| |
Collapse
|
2
|
Bouanane I, Bedu F, Ozerov I, Sciacca B, Santinacci L, Duché D, Berginc G, Escoubas L, Margeat O, Le Rouzo J. Design of infrared optical absorber using silver nanorings array made by a top-down process. Sci Rep 2023; 13:7770. [PMID: 37173376 PMCID: PMC10182000 DOI: 10.1038/s41598-023-34579-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/17/2023] [Accepted: 05/02/2023] [Indexed: 05/15/2023] Open
Abstract
This paper presents the numerical simulation and fabrication of a metasurface composed of silver nanorings with a split-ring gap. These nanostructures can exhibit optically-induced magnetic responses with unique possibilities to control absorption at optical frequencies. The absorption coefficient of the silver nanoring was optimized by performing a parametric study with Finite Difference Time Domain (FDTD) simulations. The absorption and scattering cross sections of the nanostructures are numerically calculated to assess the impact of the inner and outer radii, the thickness and the split-ring gap of one nanoring, as well as the periodicity factor for a group of four nanorings. This showed full control on resonance peaks and absorption enhancement in the near infrared spectral range. The experimental fabrication of this metasurface made of an array of silver nanorings is achieved by e-beam lithography and metallization. Optical characterizations are then carried out and compared to the numerical simulations. In contrast to usual microwave split-ring resonator metasurfaces reported in literature, the present study shows both the realization by a top-down process and modelling performed in the infrared frequency range.
Collapse
Affiliation(s)
- I Bouanane
- Aix Marseille University, Université de Toulon, CNRS, IM2NP, Marseille, France.
- Thales LAS France SAS, Élancourt, France.
| | - F Bedu
- Aix Marseille University, CNRS, CINAM, AMUTECH, Marseille, France
| | - I Ozerov
- Aix Marseille University, CNRS, CINAM, AMUTECH, Marseille, France
| | - B Sciacca
- Aix Marseille University, CNRS, CINAM, AMUTECH, Marseille, France
| | - L Santinacci
- Aix Marseille University, CNRS, CINAM, AMUTECH, Marseille, France
| | - D Duché
- Aix Marseille University, Université de Toulon, CNRS, IM2NP, Marseille, France
| | - G Berginc
- Thales LAS France SAS, Élancourt, France
| | - L Escoubas
- Aix Marseille University, Université de Toulon, CNRS, IM2NP, Marseille, France
| | - O Margeat
- Aix Marseille University, CNRS, CINAM, AMUTECH, Marseille, France
| | - J Le Rouzo
- Aix Marseille University, Université de Toulon, CNRS, IM2NP, Marseille, France
| |
Collapse
|
3
|
Feng J, Liang Z, Shi X, Zhang X, Meng D, Dai R, Zhang S, Jia Y, Yan N, Li S, Wang Z. Enhanced ultrathin ultraviolet detector based on a diamond metasurface and aluminum reflector. OPTICS EXPRESS 2023; 31:15836-15847. [PMID: 37157675 DOI: 10.1364/oe.488265] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
Metasurface is a kind of sub-wavelength artificial electromagnetic structure, which can resonate with the electric field and magnetic field of the incident light, promote the interaction between light and matter, and has great application value and potential in the fields of sensing, imaging, and photoelectric detection. Most of the metasurface-enhanced ultraviolet detectors reported so far are metal metasurfaces, which have serious ohmic losses, and studies on the use of all-dielectric metasurface-enhanced ultraviolet detectors are rare. The multilayer structure of the diamond metasurface-gallium oxide active layer-silica insulating layer-aluminum reflective layer was theoretically designed and numerically simulated. In the case of gallium oxide thickness of 20 nm, the absorption rate of more than 95% at the working wavelength of 200-220 nm is realized, and the working wavelength can be adjusted by changing the structural parameters. The proposed structure has the characteristics of polarization insensitivity and incidence angle insensitivity. This work has great potential in the fields of ultraviolet detection, imaging, and communications.
Collapse
|
4
|
Scattolo E, Cian A, Petti L, Lugli P, Giubertoni D, Paternoster G. Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons. SENSORS (BASEL, SWITZERLAND) 2023; 23:856. [PMID: 36679653 PMCID: PMC9860920 DOI: 10.3390/s23020856] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/09/2022] [Revised: 01/06/2023] [Accepted: 01/08/2023] [Indexed: 06/17/2023]
Abstract
Recent years have witnessed a growing interest in detectors capable of detecting single photons in the near-infrared (NIR), mainly due to the emergence of new applications such as light detection and ranging (LiDAR) for, e.g., autonomous driving. A silicon single-photon avalanche diode is surely one of the most interesting and available technologies, although it yields a low efficiency due to the low absorption coefficient of Si in the NIR. Here, we aim at overcoming this limitation through the integration of complementary metal-oxide-semiconductor (CMOS) -compatible nanostructures on silicon photodetectors. Specifically, we utilize silver grating arrays supporting surface plasmons polaritons (SPPs) to superficially confine the incoming NIR photons and therefore to increase the probability of photons generating an electron-hole pair. First, the plasmonic silver array is geometrically designed using time domain simulation software to achieve maximum detector performance at 950 nm. Then, a plasmonic silver array characterized by a pitch of 535 nm, a dot width of 428 nm, and a metal thickness of 110 nm is integrated by means of the focused ion beam technique on the detector. Finally, the integrated detector is electro-optically characterized, demonstrating a QE of 13% at 950 nm, 2.2 times higher than the reference. This result suggests the realization of a silicon device capable of detecting single NIR photons, at a low cost and with compatibility with standard CMOS technology platforms.
Collapse
Affiliation(s)
- Elia Scattolo
- Sensors and Devices Center, Bruno Kessler Foundation, I-38123 Trento, Italy
- Faculty of Science and Technology, Free University of Bozen, 39100 Bolzano, Italy
| | - Alessandro Cian
- Faculty of Science and Technology, Free University of Bozen, 39100 Bolzano, Italy
| | - Luisa Petti
- Sensors and Devices Center, Bruno Kessler Foundation, I-38123 Trento, Italy
| | - Paolo Lugli
- Sensors and Devices Center, Bruno Kessler Foundation, I-38123 Trento, Italy
| | - Damiano Giubertoni
- Faculty of Science and Technology, Free University of Bozen, 39100 Bolzano, Italy
| | - Giovanni Paternoster
- Faculty of Science and Technology, Free University of Bozen, 39100 Bolzano, Italy
| |
Collapse
|
5
|
Cortés E, Wendisch FJ, Sortino L, Mancini A, Ezendam S, Saris S, de S. Menezes L, Tittl A, Ren H, Maier SA. Optical Metasurfaces for Energy Conversion. Chem Rev 2022; 122:15082-15176. [PMID: 35728004 PMCID: PMC9562288 DOI: 10.1021/acs.chemrev.2c00078] [Citation(s) in RCA: 25] [Impact Index Per Article: 12.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/09/2023]
Abstract
Nanostructured surfaces with designed optical functionalities, such as metasurfaces, allow efficient harvesting of light at the nanoscale, enhancing light-matter interactions for a wide variety of material combinations. Exploiting light-driven matter excitations in these artificial materials opens up a new dimension in the conversion and management of energy at the nanoscale. In this review, we outline the impact, opportunities, applications, and challenges of optical metasurfaces in converting the energy of incoming photons into frequency-shifted photons, phonons, and energetic charge carriers. A myriad of opportunities await for the utilization of the converted energy. Here we cover the most pertinent aspects from a fundamental nanoscopic viewpoint all the way to applications.
Collapse
Affiliation(s)
- Emiliano Cortés
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Fedja J. Wendisch
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Luca Sortino
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Andrea Mancini
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Simone Ezendam
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Seryio Saris
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Leonardo de S. Menezes
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
- Departamento
de Física, Universidade Federal de
Pernambuco, 50670-901 Recife, Pernambuco, Brazil
| | - Andreas Tittl
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
| | - Haoran Ren
- MQ Photonics
Research Centre, Department of Physics and Astronomy, Macquarie University, Macquarie
Park, New South Wales 2109, Australia
| | - Stefan A. Maier
- Chair
in Hybrid Nanosystems, Nano Institute Munich, Faculty of Physics, Ludwig-Maximilians-University Munich, Königinstraße 10, 80539 Munich, Germany
- School
of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia
- Department
of Phyiscs, Imperial College London, London SW7 2AZ, United Kingdom
| |
Collapse
|