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Li CH, Huang Z, Lin J, Hou T, Zi Y, Li J. Excellent-Moisture-Resistance Fluorinated Polyimide Composite Film and Self-Powered Acoustic Sensing. ACS APPLIED MATERIALS & INTERFACES 2023. [PMID: 37432932 DOI: 10.1021/acsami.3c05154] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/13/2023]
Abstract
As a clean, sustainable energy source, sound can carry a wealth of information and play a huge role in the Internet of Things era. In recent years, triboelectric acoustic sensors have received increasing attention due to the advantages of self-power supply and high sensitivity. However, the triboelectric charge is susceptible to ambient humidity, which reduces the reliability of the sensor and limits the application scenarios significantly. In this paper, a highly moisture-resistant fluorinated polyimide composited with an amorphous fluoropolymer film was prepared. The charge injection performance, triboelectric performance, and moisture resistance of the composite film were investigated. In addition, we developed a self-powered, highly sensitive, and moisture-resistant porous-structure acoustic sensor based on contact electrification. The detection characteristics of the acoustic sensor are also obtained.
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Affiliation(s)
- Chang-Heng Li
- State Key Laboratory of Power Transmission Equipment & System Security and New Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, China
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong SAR 000000, China
| | - Zhengyong Huang
- State Key Laboratory of Power Transmission Equipment & System Security and New Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, China
| | - Junping Lin
- State Key Laboratory of Power Transmission Equipment & System Security and New Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, China
| | - Tingting Hou
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong SAR 000000, China
| | - Yunlong Zi
- Thrust of Sustainable Energy and Environment, The Hong Kong University of Science and Technology (Guangzhou), Nansha, Guangzhou, Guangdong 511400, China
| | - Jian Li
- State Key Laboratory of Power Transmission Equipment & System Security and New Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, China
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Gemelli A, Tambussi M, Fusetto S, Aprile A, Moisello E, Bonizzoni E, Malcovati P. Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review. MICROMACHINES 2023; 14:847. [PMCID: PMC10146864 DOI: 10.3390/mi14040847] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/24/2023] [Revised: 04/11/2023] [Accepted: 04/12/2023] [Indexed: 06/12/2023]
Abstract
In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical equipment, automotive systems, and many more). This review, besides analyzing the main integrated sound transduction principles typically exploited, surveys the current State-of-the-Art scenario, presenting the recent performance advances and trends of MEMS microphones and speakers. In addition, the interface Integrated Circuits (ICs) needed to properly read the sensed signals or, on the other hand, to drive the actuation structures are addressed with the aim of offering a complete overview of the currently adopted solutions.
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Yang C, Xiang Y, Liao B, Hu X. 3D-Printed Bionic Ear for Sound Identification and Localization Based on In Situ Polling of PVDF-TrFE Film. Macromol Biosci 2023; 23:e2200374. [PMID: 36408815 DOI: 10.1002/mabi.202200374] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/13/2022] [Revised: 11/02/2022] [Indexed: 11/22/2022]
Abstract
Bionic acoustic sensors are an indispensable part to realize interactions between humans and robotics. In this work, a PVDF-TrFE sensor array with multiple active pixels combined with a 3D-printed bionic ear model is prepared, which can accurately detect sounds with different frequencies and locate the sound source from different directions. The PVDF-TrFE sensor array can clearly identify the sound within 25 cm, and the error between the accepted sound frequency and the original input frequency is less than 0.001%. Through the algorithm analysis of the input signal, the location of the sound source can be immediately analyzed. Compared with other acoustic sensors, this sensor has the advantages of being self-powered, small size, and high flexibility, which holds great potential for bionic applications.
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Affiliation(s)
- Caokun Yang
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, China.,Advanced Energy Institute, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Yong Xiang
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, China.,Advanced Energy Institute, University of Electronic Science and Technology of China, Chengdu, 611731, China.,Sichuan Flexible Display Materials Genome Engineering Center, Chengdu, 611731, China
| | - Bin Liao
- Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, No. 29 Zhongguancun East Road, Haidian District, Beijing, 100190, P. R. China
| | - Xiaoran Hu
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, China.,Advanced Energy Institute, University of Electronic Science and Technology of China, Chengdu, 611731, China.,Sichuan Flexible Display Materials Genome Engineering Center, Chengdu, 611731, China
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Jing J, Zhang Z, Liao Z, Yao B, Guo Y, Zhang W, Xu Y, Xue C. A Hardware System for Synchronous Processing of Multiple Marine Dynamics MEMS Sensors. MICROMACHINES 2022; 13:2135. [PMID: 36557434 PMCID: PMC9788603 DOI: 10.3390/mi13122135] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/26/2022] [Revised: 11/22/2022] [Accepted: 11/29/2022] [Indexed: 06/17/2023]
Abstract
Temperature, depth, conductivity, and turbulence are fundamental parameters of marine dynamics in the field of ocean science. These closely correlated parameters require time-synchronized observations to provide feedback on marine environmental problems, which requires using sensors with synchronized power supply, multi-path data solving, recording, and storage performances. To address this challenge, this work proposes a hardware system capable of synchronously processing temperature, depth, conductivity, and turbulence data on marine dynamics collected by sensors. The proposed system uses constant voltage sources to excite temperature and turbulence sensors, a constant current source to drive a depth sensor, and an alternating current (AC) constant voltage source to drive a conductivity sensor. In addition, the proposed system uses a high-precision analog-digital converter to acquire the direct current (DC) signals from temperature, depth, and turbulence sensors, as well as the AC signals from conductivity sensors. Since the sampling frequency of turbulence sensors is different from that of the other sensors, the proposed system stores the generated data at different storage rates as multiple-files. Further, the proposed hardware system manages these files through a file system (file allocation tab) to reduce the data parsing difficulty. The proposed sensing and hardware logic system is verified and compared with the standard conductivity-temperature-depth measurement system in the National Center of Ocean Standards and Metrology. The results indicate that the proposed system achieved National Verification Level II Standard. In addition, the proposed system has a temperature indication error smaller than 0.02 °C, a conductivity error less than 0.073 mS/cm, and a pressure error lower than 0.8‱ FS. The turbulence sensor shows good response and consistency. Therefore, for observation methods based on a single point, single line, and single profile, it is necessary to study multi-parameter data synchronous acquisition and processing in the time and spatial domains to collect fundamental physical quantities of temperature, salt, depth, and turbulence. The four basic physical parameters collected by the proposed system are beneficial to the in-depth research on physical ocean motion, heat transfer, energy transfer, mass transfer, and heat-energy-mass coupling and can help to realize accurate simulation, inversion, and prediction of ocean phenomena.
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Affiliation(s)
- Junmin Jing
- Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
| | - Zengxing Zhang
- School of Aerospace Engineering, Xiamen University, Xiamen 361005, China
| | - Zhiwei Liao
- Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
| | - Bin Yao
- Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
| | - Yuzhen Guo
- Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
| | - Wenjun Zhang
- School of Aerospace Engineering, Xiamen University, Xiamen 361005, China
| | - Yanbo Xu
- School of Aerospace Engineering, Xiamen University, Xiamen 361005, China
| | - Chenyang Xue
- Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
- Tan Kah Kee Innovation Laboratory, Xiamen 361005, China
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Rennoll V, McLane I, Elhilali M, West JE. Optimized Acoustic Phantom Design for Characterizing Body Sound Sensors. SENSORS (BASEL, SWITZERLAND) 2022; 22:9086. [PMID: 36501787 PMCID: PMC9735779 DOI: 10.3390/s22239086] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/26/2022] [Revised: 11/19/2022] [Accepted: 11/19/2022] [Indexed: 06/17/2023]
Abstract
Many commercial and prototype devices are available for capturing body sounds that provide important information on the health of the lungs and heart; however, a standardized method to characterize and compare these devices is not agreed upon. Acoustic phantoms are commonly used because they generate repeatable sounds that couple to devices using a material layer that mimics the characteristics of skin. While multiple acoustic phantoms have been presented in literature, it is unclear how design elements, such as the driver type and coupling layer, impact the acoustical characteristics of the phantom and, therefore, the device being measured. Here, a design of experiments approach is used to compare the frequency responses of various phantom constructions. An acoustic phantom that uses a loudspeaker to generate sound and excite a gelatin layer supported by a grid is determined to have a flatter and more uniform frequency response than other possible designs with a sound exciter and plate support. When measured on an optimal acoustic phantom, three devices are shown to have more consistent measurements with added weight and differing positions compared to a non-optimal phantom. Overall, the statistical models developed here provide greater insight into acoustic phantom design for improved device characterization.
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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor. MICROMACHINES 2022; 13:mi13071142. [PMID: 35888959 PMCID: PMC9321605 DOI: 10.3390/mi13071142] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/24/2022] [Revised: 07/12/2022] [Accepted: 07/16/2022] [Indexed: 11/16/2022]
Abstract
Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less research has been reported on the performance of piezoresistive pressure sensors in dynamic environments, especially considering the vibrations and shocks frequently encountered during the application of the sensors. To address these issues, this paper proposes a design method for a MEMS piezoresistive pressure sensor, and the fabricated sensor is evaluated in a series of systematic dynamic environmental adaptability tests. After testing, the output sensitivity of the sensor chip was 9.21 mV∙bar−1, while the nonlinearity was 0.069% FSS. The sensor overreacts to rapidly changing pressure environments and can withstand acceleration shocks of up to 20× g. In addition, the sensor is capable of providing normal output over the vibration frequency range of 0–5000 Hz with a temperature coefficient sensitivity of −0.30% FSS °C−1 over the temperature range of 0–80 °C. Our proposed sensor can play a key role in applications with wide pressure ranges, high-frequency vibrations, and high acceleration shocks, as well as guide MEMS-based pressure sensors in high pressure ranges and complex environmental adaptability in their design.
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Chen Y, Hou A, Wu X, Cong T, Zhou Z, Jiao Y, Luo Y, Wang Y, Mi W, Cao J. Assessing Hemorrhagic Shock Severity Using the Second Heart Sound Determined from Phonocardiogram: A Novel Approach. MICROMACHINES 2022; 13:mi13071027. [PMID: 35888843 PMCID: PMC9316924 DOI: 10.3390/mi13071027] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/04/2022] [Revised: 06/26/2022] [Accepted: 06/26/2022] [Indexed: 12/04/2022]
Abstract
Introduction: Hemorrhagic shock (HS) is a severe medical emergency. Early diagnosis of HS is important for clinical treatment. In this paper, we report a flexible material-based heart sound monitoring device which can evaluate the degree of HS through a phonocardiogram (PCG) change. Methods: Progressive hemorrhage treatments (H1, H2, and H3 stage) were used in swine to build animal models. The PCG sensor was mounted on the chest of the swine. Routine monitoring was used at the same time. Results: This study showed that arterial blood pressure decreased significantly from the H1 phase, while second heart sound amplitude (S2A) and energy (S2E) decreased significantly from the H2 phase. Both S2A and S2E correlated well with BP (p < 0.001). The heart rate, pulse pressure variation and serum hemoglobin level significantly changed in the H3 stage (p < 0.05). Discussion: The change of second heart sound (S2) was at the H2 stage and was earlier than routine monitoring methods. Therefore, PCG change may be a new indicator for the early detection of HS severity.
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Affiliation(s)
- Yan Chen
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Aisheng Hou
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Xiaodong Wu
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Ting Cong
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Zhikang Zhou
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Youyou Jiao
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Yungen Luo
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Yuheng Wang
- The Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China;
| | - Weidong Mi
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
| | - Jiangbei Cao
- Department of Anesthesiology, the First Medical Center of Chinese PLA General Hospital, Beijing 100853, China; (Y.C.); (A.H.); (X.W.); (T.C.); (Z.Z.); (Y.J.); (Y.L.); (W.M.)
- Correspondence:
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Hua X, Zheng Y, Chen J, Wu L, Zhao X, Li Z, Gao X, Zhou C, Gao R, Li J, Bai J, Zhang Z, Xue C. Compact fiber-optic Fabry-Perot cavity based on sandwich structure adopting direct bonding of quartz glass. APPLIED OPTICS 2022; 61:2818-2824. [PMID: 35471357 DOI: 10.1364/ao.448487] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/23/2021] [Accepted: 02/18/2022] [Indexed: 06/14/2023]
Abstract
A compact fiber-optic Fabry-Perot (F-P) cavity for a sensor is designed based on a sandwich structure, adopting direct bonding of quartz glass. The reflective F-P cavity is manufactured by a fiber optic with a quartz glass ferrule and the sandwich structure with an air cavity, which is achieved by direct bonding of quartz glass. This fabrication process includes plasma surface activation, hydrophilic pre-bonding, high-temperature annealing, and dicing. The cross section of the bonding interface tested by a scanning electron microscope indicates that the sandwich structure is well bonded, and the air cavity is not deformed. Experiments show that the quality factor of the F-P cavity is 2711. Tensile strength testing shows that the bond strength exceeds 35 MPa. The advantage of direct bonding of quartz glass is that high consistency and mass production of the cavity can be realized. Moreover, the cavity is free of problems caused by the mismatch of thermal expansion coefficients between different materials. Therefore, the F-P cavity can be made into a sensor, which is promising in detecting air pressure, acoustic and high temperature.
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