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Zhang Z, Zhao D, He H, Tang L, He Q. Analysis of Noise-Detection Characteristics of Electric Field Coupling in Quartz Flexible Accelerometer. MICROMACHINES 2023; 14:535. [PMID: 36984945 PMCID: PMC10058819 DOI: 10.3390/mi14030535] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/01/2023] [Revised: 02/22/2023] [Accepted: 02/22/2023] [Indexed: 06/18/2023]
Abstract
The internal electric field coupling noise of a quartz flexible accelerometer (QFA) restricts the improvement of the measurement accuracy of the accelerometer. In this paper, the internal electric field coupling mechanism of a QFA is studied, an electric field coupling detection noise model of the accelerometer is established, the distributed capacitance among the components of the QFA is simulated, the structure of the detection noise transfer system of different carrier modulation differential capacitance detection circuits is analyzed, and the influence of each transfer chain on the detection noise is discussed. The simulation results of electric field coupling detection noise show that the average value of detection noise can reach 41.7 μg, which is close to the effective resolution of the QFA, 50 μg. This confirms that electric field coupling detection noise is a non-negligible factor affecting the measurement accuracy of the accelerometer. A method of adding a high-pass filter to the front of the phase-shifting circuit is presented to suppress the noise of electric field coupling detection. This method attenuates the average value of the detected noise by about 78 dB, and reduces the average value of the detected noise to less than 0.1 μg, which provides a new approach and direction for effectively breaking through the performance of the QFA.
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Affiliation(s)
- Zhigang Zhang
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Dongxue Zhao
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Huiyong He
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Lijun Tang
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
| | - Qian He
- School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China
- Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China
- Key Laboratory of Electromagnetic Environment Monitoring and Modeling in Hunan Province, Changsha 410114, China
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Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer. SENSORS 2022; 22:s22134930. [PMID: 35808419 PMCID: PMC9269488 DOI: 10.3390/s22134930] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/28/2022] [Revised: 06/23/2022] [Accepted: 06/27/2022] [Indexed: 12/04/2022]
Abstract
Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to suppress the acceleration noise due to deposited charge. A model of the electrostatic force on the mass is established and the deviation voltage is found to be the dominant source of charge noise. Based on the analysis of disturbance electrostatic force under DC and AC signals, actuation combined with DC and AC voltage is designed and the disturbance force due to charge can be suppressed through adjustment towards the duty cycle of different compositions. Simulations and experiments are carried out and the results indicate that the disturbance due to charge can be suppressed up to 40%, which validates the efficiency of the scheme.
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