A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry-Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0-250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%.

Crosstalk suppression of extrinsic Fabry-Perot interferometric sensor array based on five-step phase shift demodulation scheme using multiwavelength averaging

A five-step phase shift demodulation scheme based on a multiwavelength averaging method is proposed to suppress crosstalk within an extrinsic Fabry-Perot interferometric (EFPI) sensor array. The paper focuses on a two-element sensing system based on the EFPI sensors to investigate the crosstalk in the EFPI sensor array. A detailed theoretical analysis of crosstalk suppression using the proposed demodulation method is presented. Numerical simulations and experiments are put forward to demonstrate the effectiveness of the proposed demodulation scheme in suppressing crosstalk under varying parameters. The results of the multiwavelength demodulation scheme indicate superior crosstalk suppression capability in contrast to the conventional five-step phase shift demodulation scheme based on a single-wavelength demodulation method. Furthermore, the paper reveals the enhanced crosstalk suppression capability of the proposed demodulation scheme when the cavity length difference between elements is not equal to zero. It alleviates the requirement for consistent cavity length among different elements in the sensing array. The proposed demodulation scheme exhibits excellent crosstalk suppression capabilities in optical multiplexing arrays by decreasing the dependency on extinction ratio and could be potentially used in the large-scale optical hydrophone array system.

A Large-Range and High-Sensitivity Fiber-Optic Fabry-Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry-Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry-Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry-Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0-10 MPa in the temperature range of 20-370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.

Pressure and temperature dual-parameter optical sensor based on the MIM waveguide structure coupled with two T-shaped cavities

This paper elaborates on the design and simulation of a multifunctional optical sensor that features simultaneous detection of pressure and temperature, which is based on the metal-insulator-metal waveguide structure with two T-shaped resonant cavities. Depending on the simulation findings, pressure and temperature can be measured separately by two T-shaped cavities at different Fano resonance wavelengths. As the pressure applied to the upper T-shaped cavity increases, the resonance wavelength first shifts linearly due to the slight deformation of the cavity, and the maximum pressure sensitivity reaches 12.48 nm/MPa. After the pressure exceeds a threshold, the relationship between pressure and resonance wavelength transforms into a quadratic polynomial. In the lower T-shaped cavity, solid polydimethylsiloxane is sealed as a thermal-sensitive material, effectively preventing material overflow brought on by structural micro-vibration under pressure, and its high thermo-optical coefficient prompts a temperature sensitivity of 0.36 nm/°C. Furthermore, by optimizing the choice of Fano resonances, pressure and temperature can be sensed independently without mutual interference. The designed sensor provides extensive application possibilities for scenarios where multiparameter monitoring is required.

A Microwave Pressure Sensor Loaded with Complementary Split Ring Resonator for High-Temperature Applications

A passive substrate integrated waveguide (SIW) sensor based on the complementary split ring resonator (CSRR) is presented for pressure detection in high-temperature environments. The sensor pressure sensing mechanism is described through circuit analysis and the electromagnetic coupling principle. The pressure sensor is modeled in high frequency structure simulator (HFSS), designed through parameter optimization. According to the optimized parameters, the sensor was customized and fabricated on a high temperature co-fired ceramic (HTCC) substrate using the three-dimensional co-fired technology and screen-printing technology. The pressure sensor was tested in the high-temperature pressure furnace and can work stably in the ambient environment of 25-500 °C and 10-300 kPa. The pressure sensitivity is 139.77 kHz/kPa at 25 °C, and with increasing temperature, the sensitivity increases to 191.97 kHz/kPa at 500 °C. The temperature compensation algorithm is proposed to achieve accurate acquisition of pressure signals in a high-temperature environment.

Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test

Due to material plastic deformation and current leakage at high temperatures, SOI (silicon-on-insulator) and SOS (silicon-on-sapphire) pressure sensors have difficulty working over 500 °C. Silicon carbide (SiC) is a promising sensor material to solve this problem because of its stable mechanical and electrical properties at high temperatures. However, SiC is difficult to process which hinders its application as a high-temperature pressure sensor. This study proposes a piezoresistive SiC pressure sensor fabrication method to overcome the difficulties in SiC processing, especially deep etching. The sensor was processed by a combination of ICP (inductive coupled plasma) dry etching, high-temperature rapid annealing and femtosecond laser deep etching. Static and dynamic calibration tests show that the accuracy error of the fabricated sensor can reach 0.33%FS, and the dynamic signal response time is 1.2 μs. High and low temperature test results show that the developed sensor is able to work at temperatures from -50 °C to 600 °C, which demonstrates the feasibility of the proposed sensor fabrication method.

High-sensitive MEMS Fabry-Perot pressure sensor employing an internal-external cavity Vernier effect

In this paper, a high sensitivity pressure sensor employing an internal-external cavity Vernier effect is innovatively achieved with the microelectromechanical systems (MEMS) Fabry-Perot (FP) interferometer. The sensor consists of silicon cavity, vacuum cavity, and silicon-vacuum hybrid cavity, which is fabricated by direct bonding a silicon diaphragm with an etched cylindrical cavity and a silicon substrate. By rationally designing the optical lengths of the silicon cavity and silicon-vacuum hybrid cavity to match, the internal-external cavity Vernier effect will be generated. The proposed cascaded MEMS FP structure exhibits a pressure sensitivity of -1.028 nm/kPa by tracking the envelope evolution of the reflection spectrum, which is 58 times that of the silicon-vacuum hybrid cavity. What's more, it owns a minimal temperature sensitivity of 0.041 nm/°C for the envelope spectrum. The MEMS FP sensor based on internal-external cavity Vernier effect as the promising candidate provides an essential guideline for high sensitivity pressure measurement under the characteristic of short FP sensing cavity length, which demonstrates the value to the research community.