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For: Xu S, Zhou N, Shi M, Zhang C, Chen D, Mao H. Overview of the MEMS Pirani Sensors. Micromachines (Basel) 2022;13:945. [PMID: 35744559 DOI: 10.3390/mi13060945] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/18/2022] [Revised: 06/07/2022] [Accepted: 06/13/2022] [Indexed: 12/15/2022]

For:	Xu S, Zhou N, Shi M, Zhang C, Chen D, Mao H. Overview of the MEMS Pirani Sensors. Micromachines (Basel) 2022;13:945. [PMID: 35744559 DOI: 10.3390/mi13060945] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/18/2022] [Revised: 06/07/2022] [Accepted: 06/13/2022] [Indexed: 12/15/2022]

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(The first 100,000 artilces are displayed in RCA.)