Magnetic Shape Memory Microactuators

Actuation for flexible and stretchable microdevices

Flexible and stretchable microdevices incorporate highly deformable structures, facilitating precise functionality at the micro- and millimetre scale. Flexible microdevices have showcased extensive utility in the fields of biomedicine, microfluidics, and soft robotics. Actuation plays a critical role in transforming energy between different forms, ensuring the effective operation of devices. However, when it comes to actuating flexible microdevices at the small millimetre or even microscale, translating actuation mechanisms from conventional rigid large-scale devices is not straightforward. The recent development of actuation mechanisms leverages the benefits of device flexibility, particularly in transforming conventional actuation concepts into more efficient approaches for flexible devices. Despite many reviews on soft robotics, flexible electronics, and flexible microfluidics, a specific and systematic review of the actuation mechanisms for flexible and stretchable microdevices is still lacking. Therefore, the present review aims to address this gap by providing a comprehensive overview of state-of-the-art actuation mechanisms for flexible and stretchable microdevices. We elaborate on the different actuation mechanisms based on fluid pressure, electric, magnetic, mechanical, and chemical sources, thoroughly examining and comparing the structure designs, characteristics, performance, advantages, and drawbacks of these diverse actuation mechanisms. Furthermore, the review explores the pivotal role of materials and fabrication techniques in the development of flexible and stretchable microdevices. Finally, we summarise the applications of these devices in biomedicine and soft robotics and provide perspectives on current and future research.

Hysteretic structural changes within five-layered modulated 10M martensite of Ni-Mn-Ga(-Fe)

Modulated structure of Ni-Mn-Ga-based alloys is decisive in their magnetic shape memory (MSM) functionality. However, the precise nature of their five-layered modulated 10M martensite is still an open question. We used x-ray and neutron diffraction experiments on single crystals to investigate structural changes within 10M-modulated martensite of the Ni₅₀Mn₂₇Ga₂₂Fe₁MSM alloy. The modulation vector gradually increases upon cooling from commensurateq= (2/5)g₁₁₀, whereg₁₁₀is the reciprocal lattice vector, to incommensurate withqup to pseudo-commensurateq= (3/7)g₁₁₀. Upon heating, reverse changes are observed with a thermal hysteresis of ≈60 K. The same hysteretic behaviour was detected in the electrical resistivity and the effective elastic modulus. Scanning electron microscopy showed that the changes are accompanied by the refinement of thea/blaminate. These observations indicate that the commensurate state is a metastable form of 10M martensite. Upon cooling, this phase evolves through nanotwinning into a more irregular and more stable incommensurate structure.

Shape Memory Alloys and Polymers for MEMS/NEMS Applications: Review on Recent Findings and Challenges in Design, Preparation, and Characterization

Rapid progress in material science and nanotechnology has led to the development of the shape memory alloys (SMA) and the shape memory polymers (SMP) based functional multilayered structures that, due to their capability to achieve the properties not feasible by most natural materials, have attracted a significant attention from the scientific community. These shape memory materials can sustain large deformations, which can be recovered once the appropriate value of an external stimulus is applied. Moreover, the SMAs and SMPs can be reprogrammed to meet several desired functional properties. As a result, SMAs and SMPs multilayered structures benefit from the unprecedented physical and material properties such as the shape memory effect, superelasticity, large displacement actuation, changeable mechanical properties, and the high energy density. They hold promises in the design of advanced functional micro- and nano-electro-mechanical systems (MEMS/NEMS). In this review, we discuss the recent understanding and progress in the fields of the SMAs and SMPs. Particular attention will be given to the existing challenges, critical issues, limitations, and achievements in the preparation and characterization of the SMPs and NiTi-based SMAs thin films, and their heterostructures for MEMS/NEMS applications including both experimental and computational approaches. Examples of the recent MEMS/NEMS devices utilizing the unique properties of SMAs and SMPs such as micropumps, microsensors or tunable metamaterial resonators are highlighted. In addition, we also introduce the prospective future research directions in the fields of SMAs and SMPs for the nanotechnology applications.

Magnetic Shape Memory Turns to Nano: Microstructure Controlled Actuation of Free-Standing Nanodisks

Magnetic shape memory materials hold a great promise for next-generation actuation devices and systems for energy conversion, thanks to the intimate coupling between structure and magnetism in their martensitic phase. Here novel magnetic shape memory free-standing nanodisks are proposed, proving that the lack of the substrate constrains enables the exploitation of new microstructure-controlled actuation mechanisms by the combined application of different stimuli-i.e., temperature and magnetic field. The results show that a reversible areal strain (up to 5.5%) can be achieved and tuned in intensity and sign (i.e., areal contraction or expansion) by the application of a magnetic field. The mechanisms at the basis of the actuation are investigated by experiments performed at different length scales and directly visualized by several electron microscopy techniques, including electron holography, showing that thermo/magnetomechanical properties can be optimized by engineering the martensitic microstructure through epitaxial growth and lateral confinement. These findings represent a step forward toward the development of a new class of temperature-field controlled nanoactuators and smart nanomaterials.

Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers

Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb_0.97La_0.02)(Zr_0.95Ti_0.05)O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.